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Patent applications and USPTO patent grants for chen ching horng.The latest application filed is for "metal etching with in situ plasma ashing".
Patent | Date |
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Semiconductor Processing Apparatus For Generating Plasma App 20210066054A1 - | 2021-03-04 |
Metal Etching With In Situ Plasma Ashing App 20200176269 - WANG; Hsing-Hsiang ;   et al. | 2020-06-04 |
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