CHEN; Chia-Jen

Patent Applications and Registrations

Patent applications and USPTO patent grants for CHEN; Chia-Jen.The latest application filed is for "method and device for cleaning substrates".

Company Profile

19.80.84

CHEN; Chia-Jen - Jhudong Township TW
Chen; Chia-Jen - Chiaya TW
Chen; Chia-Jen - Hsinchu TW
Chen; Chia-Jen - Hsinchu County TW
Chen; Chia-Jen - Chiaya City TW
Chen; Chia-Jen - Chiayi TW
Chen; Chia-Jen - Jhudong Township, Hsinchu County N/A TW
Chen; Chia-Jen - Kaohsiung TW
Chen; Chia-Jen - Taichung Hsien TW
Chen; Chia-Jen - Kaohsiung City TW
Chen; Chia-Jen - Banciao TW
Chen; Chia-Jen - Hsin-Chu TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method And Device For Cleaning Substrates App 20220308464 - LIU; Chung-Hsuan ; et al.	2022-09-29
Semiconductor structure cutting process and structures formed thereby Grant 11,444,080 - Hung , et al. September 13, 2	2022-09-13
Air Spacer and Method of Forming Same App 20220285530 - Sie; Ming-Jhe ; et al.	2022-09-08
Photomask and method of fabricating a photomask Grant 11,435,660 - Lee , et al. September 6, 2	2022-09-06
Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors Grant 11,430,671 - Lin , et al. August 30, 2	2022-08-30
Photomask including fiducial mark and method of making semiconductor device using the photomask Grant 11,422,466 - Lee , et al. August 23, 2	2022-08-23
Method Of Manufacturing Photo Masks App 20220260926 - CHEN; Chien-Cheng ; et al.	2022-08-18
Particle Removing Assembly And Method Of Cleaning Mask For Lithography App 20220252993 - LIN; Chen-Yang ; et al.	2022-08-11
Air spacer and method of forming same Grant 11,349,014 - Sie , et al. May 31, 2	2022-05-31
Method of manufacturing photo masks Grant 11,327,405 - Chen , et al. May 10, 2	2022-05-10
Particle removing assembly and method of cleaning mask for lithography Grant 11,294,292 - Lin , et al. April 5, 2	2022-04-05
Ozone Wafer Cleaning Module Having An Ultraviolet Lamp Module With Rotatable Reflectors App 20220037171 - LIN; Chen-Yang ; et al.	2022-02-03
Air Spacer and Method of Forming Same App 20210408266 - Sie; Ming-Jhe ; et al.	2021-12-30
Euv Photo Masks And Manufacturing Method Thereof App 20210405519 - LEE; Hsin-Chang ; et al.	2021-12-30
Mask patterns and method of manufacture Grant 11,143,954 - Hsueh , et al. October 12, 2	2021-10-12
Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same Grant 11,137,684 - Lin , et al. October 5, 2	2021-10-05
Lithography Mask with a Black Border Regions and Method of Fabricating the Same App 20210294203 - Lin; Chin-Hsiang ; et al.	2021-09-23
Photomask Including Fiducial Mark And Method Of Making Semiconductor Device Using The Photomask App 20210286255 - LEE; Hsin-Chang ; et al.	2021-09-16
Method Of Manufacturing Extreme Ultraviolet Mask With Reduced Wafer Neighboring Effect App 20210247687 - HSUEH; Wen-Chang ; et al.	2021-08-12
Particle Removing Assembly And Method Of Cleaning Mask For Lithography App 20210200107 - LIN; Chen-Yang ; et al.	2021-07-01
Photomask including fiducial mark, method of patterning the photomask and method of making semiconductor device using the photomask Grant 11,042,084 - Lee , et al. June 22, 2	2021-06-22
Lithography mask with a black border regions and method of fabricating the same Grant 11,029,593 - Lin , et al. June 8, 2	2021-06-08
Extreme ultraviolet mask with reduced wafer neighboring effect and method of manufacturing the same Grant 10,996,553 - Hsueh , et al. May 4, 2	2021-05-04
Method Of Manufacturing Photo Masks App 20210055646 - CHEN; Chien-Cheng ; et al.	2021-02-25
Semiconductor Structure Cutting Process and Structures Formed Thereby App 20210050350 - Hung; Chih-Chang ; et al.	2021-02-18
Semiconductor structure cutting process and structures formed thereby Grant 10,867,998 - Hung , et al. December 15, 2	2020-12-15
Lithography mask with a black border region and method of fabricating the same Grant 10,866,504 - Lin , et al. December 15, 2	2020-12-15
Semiconductor structure cutting process and structures formed thereby Grant 10,833,077 - Hung , et al. November 10, 2	2020-11-10
Method of manufacturing photo masks Grant 10,816,892 - Chen , et al. October 27, 2	2020-10-27
Lithography Mask With Both Transmission-type And Reflective-type Overlay Marks And Method Of Fabricating The Same App 20200124958 - Lin; Yun-Yue ; et al.	2020-04-23
Lithography Mask with a Black Border Regions and Method of Fabricating the Same App 20200050098 - Lin; Chin-Hsiang ; et al.	2020-02-13
Mask Patterns and Method of Manufacture App 20190391480 - Hsueh; Wen-Chang ; et al.	2019-12-26
Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same Grant 10,514,597 - Lin , et al. Dec	2019-12-24
Semiconductor Structure Cutting Process and Structures Formed Thereby App 20190267374 - Hung; Chih-Chang ; et al.	2019-08-29
Photomask Including Fiducial Mark, Method Of Patterning The Photomask And Method Of Making Semiconductor Device Using The Photom App 20190258156 - LEE; Hsin-Chang ; et al.	2019-08-22
Lithography Mask With A Black Border Region And Method Of Fabricating The Same App 20190196322 - Lin; Chin-Hsiang ; et al.	2019-06-27
Photomask And Method Of Fabricating A Photomask App 20190155140 - LEE; Hsin-Chang ; et al.	2019-05-23
Photomask including fiducial mark, method of patterning the photomask and method of making semiconductor device using the photomask Grant 10,295,899 - Lee , et al.	2019-05-21
Method Of Manufacturing Photo Masks App 20190148110 - CHEN; Chien-Cheng ; et al.	2019-05-16
Extreme Ultraviolet Mask With Reduced Wafer Neighboring Effect And Method Of Manufacturing The Same App 20190146325 - HSUEH; Wen-Chang ; et al.	2019-05-16
Photomask Including Fiducial Mark, Method Of Patterning The Photomask And Method Of Making Semiconductor Device Using The Photomask App 20180364560 - LEE; Hsin-Chang ; et al.	2018-12-20
Lithography mask Grant 9,995,999 - Lin , et al. June 12, 2	2018-06-12
Lithography Mask With Both Transmission-type And Reflective-type Overlay Marks And Method Of Fabricating The Same App 20180149959 - Lin; Yun-Yue ; et al.	2018-05-31
Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof Grant 9,869,928 - Huang , et al. January 16, 2	2018-01-16
Method of making an extreme ultraviolet pellicle Grant 9,664,999 - Shih , et al. May 30, 2	2017-05-30
Mask and method for forming the same Grant 9,651,857 - Lin , et al. May 16, 2	2017-05-16
System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle Grant 9,558,944 - Hsu , et al. January 31, 2	2017-01-31
Assist feature for a photolithographic process Grant 9,557,649 - Huang , et al. January 31, 2	2017-01-31
Method and system for inspection of a patterned structure Grant 9,530,200 - Hsueh , et al. December 27, 2	2016-12-27
Method Of Making An Extreme Ultraviolet Pellicle App 20160363857 - Shih; Chih-Tsung ; et al.	2016-12-15
Lithography Mask App 20160299419 - Lin; Yun-Yue ; et al.	2016-10-13
Method of making an extreme ultraviolet pellicle Grant 9,442,368 - Shih , et al. September 13, 2	2016-09-13
Structure and method of photomask with reduction of electron-beam scatterring Grant 9,429,835 - Hsueh , et al. August 30, 2	2016-08-30
Extreme Ultraviolet Light (EUV) Photomasks, and Fabrication Methods Thereof App 20160223900 - Huang; Tao-Min ; et al.	2016-08-04
Assist Feature for a Photolithographic Process App 20160195812 - HUANG; TAO-MIN ; et al.	2016-07-07
Method of calibrating or exposing a lithography tool Grant 9,373,552 - Lin , et al. June 21, 2	2016-06-21
Lithography mask Grant 9,366,953 - Lin , et al. June 14, 2	2016-06-14
Pellicle structure and method for forming the same Grant 9,360,749 - Lin , et al. June 7, 2	2016-06-07
Reticle and method of fabricating the same Grant 9,341,940 - Hsueh , et al. May 17, 2	2016-05-17
Lithography system and method for patterning photoresist layer on EUV mask Grant 9,341,937 - Lin , et al. May 17, 2	2016-05-17
Method Of Making An Extreme Ultraviolet Pellicle App 20160109798 - Shih; Chih-Tsung ; et al.	2016-04-21
Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof Grant 9,310,675 - Huang , et al. April 12, 2	2016-04-12
Composite dummy gate with conformal polysilicon layer for FinFET device Grant 9,287,179 - Huang , et al. March 15, 2	2016-03-15
Assist feature for a photolithographic process Grant 9,285,673 - Huang , et al. March 15, 2	2016-03-15
Pellicle mounting system and method Grant 9,256,142 - Lee-Chih , et al. February 9, 2	2016-02-09
Method of making an extreme ultraviolet pellicle Grant 9,256,123 - Shih , et al. February 9, 2	2016-02-09
Photomask and method for forming the same Grant 9,244,341 - Lee , et al. January 26, 2	2016-01-26
Assist Feature for a Photolithographic Process App 20160011501 - HUANG; Tao-Min ; et al.	2016-01-14
Method And System For Inspection Of A Patterned Structure App 20150371377 - HSUEH; Wen-Chang ; et al.	2015-12-24
Method Of Calibrating Or Exposing A Lithography Tool App 20150364383 - Lin; Yu Chao ; et al.	2015-12-17
Reflective mask and method of making same Grant 9,213,232 - Hsu , et al. December 15, 2	2015-12-15
Reticle And Method Of Fabricating The Same App 20150331309 - HSUEH; Wen-Chang ; et al.	2015-11-19
Pellicle Structure And Method For Forming The Same App 20150309404 - LIN; Yun-Yue ; et al.	2015-10-29
Method Of Making An Extreme Ultraviolet Pellicle App 20150309405 - Shih; Chih-Tsung ; et al.	2015-10-29
Lithography System And Method For Patterning Photoresist Layer On Euv Mask App 20150309401 - LIN; Yun-Yue ; et al.	2015-10-29
System, Method And Reticle For Improved Pattern Quality In Extreme Ultraviolet (euv) Lithography And Method For Forming The Reticle App 20150255272 - HSU; Chia-Hao ; et al.	2015-09-10
Method of forming a pattern Grant 9,128,384 - Lin , et al. September 8, 2	2015-09-08
Structure and Method of Photomask with Reduction of Electron-Beam Scatterring App 20150227037 - Hsueh; Wen-Chang ; et al.	2015-08-13
Lithography Mask App 20150205194 - LIN; Yun-Yue ; et al.	2015-07-23
Mask And Method For Forming The Same App 20150177612 - Lin; Yun-Yue ; et al.	2015-06-25
Photomask and Method for Forming the Same App 20150168826 - Lee; Hsin-Chang ; et al.	2015-06-18
Systems and methods for lithography masks Grant 9,057,961 - Tu , et al. June 16, 2	2015-06-16
System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle Grant 9,046,776 - Hsu , et al. June 2, 2	2015-06-02
Reflective Mask And Method Of Making Same App 20150104736 - HSU; Pei-Cheng ; et al.	2015-04-16
Mask and method for forming the same Grant 8,974,988 - Lin , et al. March 10, 2	2015-03-10
Photomask and method for forming the same Grant 8,962,222 - Lee , et al. February 24, 2	2015-02-24
Method of making a lithography mask Grant 8,916,482 - Lee , et al. December 23, 2	2014-12-23
Structure and method for MOSFETS with high-K and metal gate structure Grant 8,912,610 - Lin , et al. December 16, 2	2014-12-16
Systems and Methods for Lithography Masks App 20140335446 - Tu; Chih-Chiang ; et al.	2014-11-13
Reflective mask and method of making same Grant 8,877,409 - Hsu , et al. November 4, 2	2014-11-04
Extreme Ultraviolet Light (EUV) Photomasks, and Fabrication Methods Thereof App 20140272681 - Huang; Tao-Min ; et al.	2014-09-18
Pellicle Mounting System And Method App 20140253898 - Lee-Chih; Yeh ; et al.	2014-09-11
System, Method And Reticle For Improved Pattern Quality In Extreme Ultraviolet (euv) Lithography And Method For Forming The Reticle App 20140218714 - HSU; Chia-Hao ; et al.	2014-08-07
Systems and methods for lithography masks Grant 8,785,083 - Tu , et al. July 22, 2	2014-07-22
Phase shift mask for extreme ultraviolet lithography and method of fabricating same Grant 8,765,330 - Shih , et al. July 1, 2	2014-07-01
Method Of Forming A Pattern App 20140134759 - Lin; Yu Chao ; et al.	2014-05-15
Mask and method for forming the mask Grant 8,709,682 - Chen , et al. April 29, 2	2014-04-29
Method of fabricating a lithography mask Grant 8,679,707 - Lee , et al. March 25, 2	2014-03-25
System and method for combined intraoverlay metrology and defect inspection Grant 8,656,318 - Lee , et al. February 18, 2	2014-02-18
Sports training device Grant 8,651,979 - Chen February 18, 2	2014-02-18
Phase Shift Mask for Extreme Ultraviolet Lithography and Method of Fabricating Same App 20140038086 - Shih; Chih-Tsung ; et al.	2014-02-06
Method of Fabricating a Lithography Mask App 20140038088 - Lee; Hsin-Chang ; et al.	2014-02-06
Photomask and photomask substrate with reduced light scattering properties Grant 8,624,345 - Wu , et al. January 7, 2	2014-01-07
Photomask And Method For Forming The Same App 20130337370 - Lee; Hsin-Chang ; et al.	2013-12-19
Systems and Methods for Lithography Masks App 20130323625 - Tu; Chih-Chiang ; et al.	2013-12-05
Reduce mask overlay error by removing film deposited on blank of mask Grant 8,589,828 - Lee , et al. November 19, 2	2013-11-19
System and Method for Combined Intraoverlay and Defect Inspection App 20130298088 - Lee; Hsin-Chang ; et al.	2013-11-07
Mask And Method For Forming The Same App 20130280644 - Lin; Yun-Yue ; et al.	2013-10-24
Reflective Mask And Method Of Making Same App 20130280643 - Hsu; Pei-Cheng ; et al.	2013-10-24
Method Of Making A Lithography Mask App 20130260573 - Lee; Hsin-Chang ; et al.	2013-10-03
Method Of Making A Lithography Mask App 20130260289 - Lin; Yun-Yue ; et al.	2013-10-03
Reduce Mask Overlay Error By Removing Film Deposited On Blank Of Mask App 20130219350 - Lee; Hsin-Chang ; et al.	2013-08-22
Mask And Method For Forming The Mask App 20130202992 - Chen; Chia-Jen ; et al.	2013-08-08
Composite Dummy Gate With Conformal Polysilicon Layer For Finfet Device App 20130187235 - Huang; Yuan-Sheng ; et al.	2013-07-25
Process of making natural tourmaline fiber and filter Grant 8,491,825 - Lin , et al. July 23, 2	2013-07-23
Structure and Method for MOSFETS with High-K and Metal Gate Structure App 20130119487 - Lin; Jr Jung ; et al.	2013-05-16
Photomask And Photomask Substrate With Reduced Light Scattering Properties App 20120237861 - Wu; Ken ; et al.	2012-09-20
Natural tourmaline anion fiber and filter and producing method Grant 8,231,968 - Lin , et al. July 31, 2	2012-07-31
Method for forming a robust mask with reduced light scattering Grant 8,198,118 - Wu , et al. June 12, 2	2012-06-12
Sports Training Device App 20120129633 - Chen; Chia-Jen	2012-05-24
System and method for manufacturing a mask for semiconductor processing Grant 7,999,910 - Chen , et al. August 16, 2	2011-08-16
Compensation of reticle flatness on focus deviation in optical lithography Grant 7,924,405 - Yeh , et al. April 12, 2	2011-04-12
Multiple resist layer phase shift mask (PSM) blank and PSM formation method Grant 7,906,252 - Lee , et al. March 15, 2	2011-03-15
Natural Tourmaline Anion Fiber And Filter And Producing Method App 20100117251 - Lin; Ming-Fung ; et al.	2010-05-13
Aperture design for improving critical dimension accuracy and electron beam lithography throughput Grant 7,642,532 - Chen , et al. January 5, 2	2010-01-05
Compensation Of Reticle Flatness On Focus Deviation In Optical Lithography App 20090027643 - Yeh; Lee-Chih ; et al.	2009-01-29
Dimension monitoring method and system Grant 7,460,251 - Chang , et al. December 2, 2	2008-12-02
Method for forming a robust mask with reduced light scattering App 20080102379 - Wu; Ken ; et al.	2008-05-01
Natural tourmaline anion fiber and filter and producing method App 20070259178 - Lin; Ming-Fung ; et al.	2007-11-08
Multiple resist layer phase shift mask (PSM) blank and PSM formation method App 20070207391 - Lee; Hsin-Chang ; et al.	2007-09-06
New aperture design for improving critical dimension accuracy and electron beam lithography throughput App 20070172744 - Chen; Chia-Jen ; et al.	2007-07-26
Methods and structures for critical dimension and profile measurement Grant 7,208,331 - Shieh , et al. April 24, 2	2007-04-24
Dimension monitoring method and system App 20070075037 - Chang; Shih-Ming ; et al.	2007-04-05
Method for forming a hard mask for gate electrode patterning and corresponding device Grant 7,186,662 - Chen , et al. March 6, 2	2007-03-06
System and method for manufacturing a mask for semiconductor processing App 20060246357 - Chen; Chia-Jen ; et al.	2006-11-02
Method for forming a hard mask for gate electrode patterning and corresponding device App 20060081917 - Chen; Chien-Hao ; et al.	2006-04-20

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