loadpatents
Patent applications and USPTO patent grants for Chen; Che-Fu.The latest application filed is for "fin field-effect transistor and method of forming the same".
Patent | Date |
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Wafer release mechanism Grant 11,456,203 - Liu , et al. September 27, 2 | 2022-09-27 |
Semiconductor processing flow field control apparatus and method Grant 11,443,966 - Wei , et al. September 13, 2 | 2022-09-13 |
Methods for cleaning semiconductor device manufacturing apparatus Grant 11,211,232 - Hsieh , et al. December 28, 2 | 2021-12-28 |
Fin Field-effect Transistor And Method Of Forming The Same App 20210376114 - Hsiao; Hsu Ming ;   et al. | 2021-12-02 |
Cluster tool and method using the same Grant 11,177,150 - Houng , et al. November 16, 2 | 2021-11-16 |
Thickness measurement system and method Grant 11,177,183 - Liu , et al. November 16, 2 | 2021-11-16 |
Gas injector Grant 11,139,149 - Liu , et al. October 5, 2 | 2021-10-05 |
Systems and methods for automated robotic arm sensing Grant 11,101,163 - Liu , et al. August 24, 2 | 2021-08-24 |
Systems And Methods For Robotic Arm Sensing App 20210233797 - Liu; Yan-Hong ;   et al. | 2021-07-29 |
Robot Arm Device And Method For Transferring Wafer App 20210233788 - HOUNG; Wei-Hua ;   et al. | 2021-07-29 |
Semiconductor Processing Flow Field Control Apparatus And Method App 20210225673 - WEI; Kai-Chin ;   et al. | 2021-07-22 |
Systems And Methods For Orientator Based Wafer Defect Sensing App 20210225680 - LIU; Yan-Hong ;   et al. | 2021-07-22 |
Semiconductor device manufacturing system Grant 11,031,264 - Liu , et al. June 8, 2 | 2021-06-08 |
Robot arm device and method for transferring wafer Grant 11,004,713 - Houng , et al. May 11, 2 | 2021-05-11 |
Semiconductor Process Chamber Contamination Prevention System App 20210129170 - WEI; Kai-Chin ;   et al. | 2021-05-06 |
Semiconductor Process Chamber With Heat Pipe App 20210134565 - WEI; Kai-Chin ;   et al. | 2021-05-06 |
Semiconductor Cleaning Apparatus And Method App 20210114067 - Hsieh; Ian ;   et al. | 2021-04-22 |
Systems and methods for robotic arm sensing Grant 10,978,333 - Liu , et al. April 13, 2 | 2021-04-13 |
Systems and methods for orientator based wafer defect sensing Grant 10,978,331 - Liu , et al. April 13, 2 | 2021-04-13 |
Systems And Methods For Inspection Stations App 20210035834 - Liu; Yan-Hong ;   et al. | 2021-02-04 |
Robot Arm Device And Method For Transferring Wafer App 20200365436 - HOUNG; Wei-Hua ;   et al. | 2020-11-19 |
Systems and methods for inspection stations Grant 10,811,290 - Liu , et al. October 20, 2 | 2020-10-20 |
Cluster Tool And Method Using The Same App 20200294834 - HOUNG; Wei-Hua ;   et al. | 2020-09-17 |
Semiconductor Cleaning Apparatus And Method App 20200135435 - Hsieh; Ian ;   et al. | 2020-04-30 |
Reflectance Measurement System And Method Thereof App 20200098648 - LIU; Yan-Hong ;   et al. | 2020-03-26 |
Thickness Measurement System And Method App 20200091013 - LIU; Yan-Hong ;   et al. | 2020-03-19 |
Screwless Semiconductor Processing Chambers App 20200075402 - CHEN; Bo-Ru ;   et al. | 2020-03-05 |
Semiconuctor Device Manufacturing System App 20200058529 - Liu; Yan-Hong ;   et al. | 2020-02-20 |
Wafer Release Mechanism App 20200020564 - Liu; Yan-Hong ;   et al. | 2020-01-16 |
Electrostatic Chuck Sidewall Gas Curtain App 20200006109 - HSIEH; Ian ;   et al. | 2020-01-02 |
Systems And Methods For Inspection Stations App 20190362994 - LIU; Yan-Hong ;   et al. | 2019-11-28 |
Systems And Methods For Automated Robotic Arm Sensing App 20190237354 - Liu; Yan-Hong ;   et al. | 2019-08-01 |
Novel Gas Injector App 20190164724 - LIU; Yan-Hong ;   et al. | 2019-05-30 |
Systems And Methods For Robotic Arm Sensing App 20190148209 - LIU; Yan-Hong ;   et al. | 2019-05-16 |
Wafer Carrying Fork, Semiconductor Device Manufacturing System, And Wafer Transporting Method App 20190139801 - Liu; Yan-Hong ;   et al. | 2019-05-09 |
Wafer carrying fork, semiconductor device manufacturing system, and wafer transporting method Grant 10,283,393 - Liu , et al. | 2019-05-07 |
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