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Asynchronous Bias Control For An Optical Modulator Using A Multiple Tone Detection Technique With Phase Correction App 20170294967 - SCHMOGROW; Rene Marcel ;   et al. | 2017-10-12 |
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Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device Grant 7,175,503 - Lehman , et al. February 13, 2 | 2007-02-13 |
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Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing Grant 6,935,922 - Lehman , et al. August 30, 2 | 2005-08-30 |
Systems and methods for characterizing a polishing process Grant 6,884,146 - Lehman , et al. April 26, 2 | 2005-04-26 |
Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad Grant 6,866,559 - Lehman , et al. March 15, 2 | 2005-03-15 |
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Magnetic thin film recording media having extremely low noise and high thermal stability Grant 6,730,420 - Bertero , et al. May 4, 2 | 2004-05-04 |
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Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing App 20030181132 - Lehman, Kurt ;   et al. | 2003-09-25 |
Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad App 20030181139 - Lehman, Kurt ;   et al. | 2003-09-25 |
Systems and methods for characterizing a polishing process App 20030181131 - Lehman, Kurt ;   et al. | 2003-09-25 |
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool App 20030180973 - Lehman, Kurt ;   et al. | 2003-09-25 |
Method and apparatus for optical endpoint detection during chemical mechanical polishing Grant 6,618,130 - Chen September 9, 2 | 2003-09-09 |
Method and apparatus for optical endpoint calibration in CMP Grant 6,549,279 - Adams , et al. April 15, 2 | 2003-04-15 |
Method and apparatus for optical endpoint detection during chemical mechanical polishing App 20030053042 - Chen, Charles | 2003-03-20 |
Method and apparatus for optical endpoint calibration in CMP App 20030020909 - Adams, John A. ;   et al. | 2003-01-30 |
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Advanced embedded code hopping system having master fixed code encryption Grant 5,914,667 - Issa , et al. June 22, 1 | 1999-06-22 |
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