Patent | Date |
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Source/drain recess volume trim for improved device performance and layout dependence Grant 10,158,004 - Chen , et al. Dec | 2018-12-18 |
Floating grid and crown-shaping poly for improving ILD CMP dishing Grant 9,853,149 - Chen , et al. December 26, 2 | 2017-12-26 |
Surface profile for semiconductor region Grant 9,831,314 - Chen , et al. November 28, 2 | 2017-11-28 |
Source/drain Recess Volume Trim For Improved Device Performance And Layout Dependence App 20170317186 - Chen; Chao-Hsuing ;   et al. | 2017-11-02 |
V-shaped SiGe recess volume trim for improved device performance and layout dependence Grant 9,735,252 - Chen , et al. August 15, 2 | 2017-08-15 |
Methods and apparatus for doped SiGe source/drain stressor deposition Grant 9,722,082 - Chen , et al. August 1, 2 | 2017-08-01 |
Semiconductor device and manufacturing method thereof Grant 9,691,903 - Chen , et al. June 27, 2 | 2017-06-27 |
Semiconductor Device And Manufacturing Method Thereof App 20170012128 - CHEN; Chao-Hsuing ;   et al. | 2017-01-12 |
Semiconductor device and manufacturing method thereof Grant 9,530,889 - Chen December 27, 2 | 2016-12-27 |
Semiconductor Device And Manufacturing Method Thereof App 20160343845 - CHEN; Chao-Hsuing | 2016-11-24 |
V-shaped Sige Recess Volume Trim For Improved Device Performance And Layout Dependence App 20160254366 - Chen; Chao-Hsuing ;   et al. | 2016-09-01 |
Semiconductor device and manufacturing method thereof Grant 9,425,313 - Chen , et al. August 23, 2 | 2016-08-23 |
Methods and Apparatus for Doped SiGe Source/Drain Stressor Deposition App 20160240673 - Chen; Chao-Hsuing ;   et al. | 2016-08-18 |
V-shaped SiGe recess volume trim for improved device performance and layout dependence Grant 9,385,215 - Chen , et al. July 5, 2 | 2016-07-05 |
Methods and apparatus for doped SiGe source/drain stressor deposition Grant 9,324,836 - Chen , et al. April 26, 2 | 2016-04-26 |
Semiconductor device having V-shaped region Grant 9,269,812 - Chen , et al. February 23, 2 | 2016-02-23 |
Methods and Apparatus for Doped SiGe Source/Drain Stressor Deposition App 20150349090 - Chen; Chao-Hsuing ;   et al. | 2015-12-03 |
Surface Profile For Semiconductor Region App 20150340447 - Chen; Chao-Hsuing ;   et al. | 2015-11-26 |
SiGe SRAM butted contact resistance improvement Grant 9,196,545 - Chen , et al. November 24, 2 | 2015-11-24 |
Methods and apparatus for doped SiGe source/drain stressor deposition Grant 9,142,642 - Chen , et al. September 22, 2 | 2015-09-22 |
Surface profile for semiconductor region Grant 9,099,421 - Chen , et al. August 4, 2 | 2015-08-04 |
SRAM cells with dummy insertions Grant 9,053,974 - Chen , et al. June 9, 2 | 2015-06-09 |
Semiconductor Device Having V-shaped Region App 20150137182 - Chen; Chao-Hsuing ;   et al. | 2015-05-21 |
Semiconductor device having v-shaped region Grant 8,940,594 - Chen , et al. January 27, 2 | 2015-01-27 |
SiGe SRAM BUTTED CONTACT RESISTANCE IMPROVEMENT App 20140295630 - Chen; Chao-Hsuing ;   et al. | 2014-10-02 |
V-shaped Sige Recess Volume Trim For Improved Device Performance And Layout Dependence App 20140264440 - Chen; Chao-Hsuing ;   et al. | 2014-09-18 |
SiGe SRAM butted contact resistance improvement Grant 8,766,256 - Chen , et al. July 1, 2 | 2014-07-01 |
Semiconductor Device Having V-shaped Region App 20140175556 - Chen; Chao-Hsuing ;   et al. | 2014-06-26 |
Surface Profile For Semiconductor Region App 20140117512 - Chen; Chao-Hsuing ;   et al. | 2014-05-01 |
SRAM Cells with Dummy Insertions App 20140054716 - Chen; Chao-Hsuing ;   et al. | 2014-02-27 |
SiGe SRAM BUTTED CONTACT RESISTANCE IMPROVEMENT App 20130328127 - Chen; Chao-Hsuing ;   et al. | 2013-12-12 |
Methods and Apparatus for Doped SiGe Source/Drain Stressor Deposition App 20130207166 - Chen; Chao-Hsuing ;   et al. | 2013-08-15 |