Chegwidden; Scott R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chegwidden; Scott R..The latest application filed is for "double-metal euv mask absorber".
- Chegwidden; Scott R. - Mountain View CA
| Patent | Date |
|---|---|
| Dual-layer EUV mask absorber with trenches having opposing sidewalls that are straight and parallel Grant 7,410,733 - Yan , et al. August 12, 2 | 2008-08-12 |
| Double-metal EUV mask absorber App 20050227152 - Yan, Pei-Yang ; et al. | 2005-10-13 |
| Double-metal EUV mask absorber Grant 6,913,706 - Yan , et al. July 5, 2 | 2005-07-05 |
| Double-metal EUV mask absorber App 20040124174 - Yan, Pei-Yang ; et al. | 2004-07-01 |
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