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Patent applications and USPTO patent grants for Cheboli; Ramakrishna.The latest application filed is for "apparatus for electroless deposition of metals onto semiconductor substrates".
Patent | Date |
---|---|
Apparatus for electroless deposition of metals onto semiconductor substrates Grant 7,827,930 - Lubomirsky , et al. November 9, 2 | 2010-11-09 |
Vibration damping during chemical mechanical polishing Grant 7,497,767 - Chen , et al. March 3, 2 | 2009-03-03 |
Apparatus for electroless deposition of metals onto semiconductor substrates Grant 7,323,058 - Lubomirsky , et al. January 29, 2 | 2008-01-29 |
Apparatus for electroless deposition of metals onto semiconductor substrates App 20050263066 - Lubomirsky, Dmitry ;   et al. | 2005-12-01 |
Vibration damping during chemical mechanical polishing App 20050245181 - Chen, Hung Chih ;   et al. | 2005-11-03 |
Apparatus for electroless deposition of metals onto semiconductor substrates App 20050160990 - Lubomirsky, Dmitry ;   et al. | 2005-07-28 |
Vibration damping in a carrier head Grant 6,848,980 - Chen , et al. February 1, 2 | 2005-02-01 |
Carrier head with flexible membrane App 20040005842 - Chen, Hung Chih ;   et al. | 2004-01-08 |
Vibration damping in a carrier head App 20030068966 - Chen, Hung Chih ;   et al. | 2003-04-10 |
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