Chau; Quan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chau; Quan.The latest application filed is for "electrostatic chuck with thermal choke".
- Chau; Quan - San Jose CA
| Patent | Date |
|---|---|
| Electrostatic chuck with thermal choke Grant 9,805,963 - Long , et al. October 31, 2 | 2017-10-31 |
| Electrostatic Chuck With Thermal Choke App 20170098566 - Long; Maolin ; et al. | 2017-04-06 |
| Lower electrode assembly of plasma processing chamber Grant 9,412,555 - Augustino , et al. August 9, 2 | 2016-08-09 |
| Lower Electrode Assembly Of Plasma Processing Chamber App 20100108261 - Augustino; Jason ; et al. | 2010-05-06 |
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