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Patent applications and USPTO patent grants for Chartered Semiconductors Manufacturing Limited.The latest application filed is for "preventing plasma induced damage resulting from high density plasma deposition".
Patent | Date |
---|---|
Preventing plasma induced damage resulting from high density plasma deposition Grant 7,208,426 - Huang , et al. April 24, 2 | 2007-04-24 |
Method for integrated nucleation and bulk film deposition Grant 6,699,788 - Eristoff , et al. March 2, 2 | 2004-03-02 |
Method to fabricate MIM capacitor using damascene process Grant 6,645,810 - Ng , et al. November 11, 2 | 2003-11-11 |
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