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Patent applications and USPTO patent grants for Charns; Leslie.The latest application filed is for "shallow trench isolation chemical mechanical planarization".
Patent | Date |
---|---|
Chemical mechanical planarization with overburden mask Grant 8,524,606 - Charns , et al. September 3, 2 | 2013-09-03 |
Chemical mechanical planarization processes for fabrication of FinFET devices Grant 8,513,127 - Chang , et al. August 20, 2 | 2013-08-20 |
Fabrication of replacement metal gate devices Grant 8,507,383 - Ando , et al. August 13, 2 | 2013-08-13 |
Shallow trench isolation chemical mechanical planarization Grant 8,497,210 - Charns , et al. July 30, 2 | 2013-07-30 |
Chemical Mechanical Planarization Processes For Fabrication of FINFET Devices App 20120083123 - Chang; Josephine B. ;   et al. | 2012-04-05 |
Fabrication of Replacement Metal Gate Devices App 20120083121 - Ando; Takashi ;   et al. | 2012-04-05 |
Chemical Mechanical Planarization With Overburden Mask App 20120083125 - Charns; Leslie ;   et al. | 2012-04-05 |
Shallow Trench Isolation Chemical Mechanical Planarization App 20120083122 - Charns; Leslie ;   et al. | 2012-04-05 |
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