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Machine learning enhanced optical-based screening for in-line wafer testing
Grant 11,199,505 - Chao , et al. December 14, 2 | 2021-12-14 |
Replacement-channel Fabrication Of Iii-v Nanosheet Devices
App 20210305407 - Zhang; Jingyun ; et al. | 2021-09-30 |
Replacement-channel fabrication of III-V nanosheet devices
Grant 11,081,567 - Zhang , et al. August 3, 2 | 2021-08-03 |
Secure wafer inspection and identification
Grant 11,079,337 - Lie , et al. August 3, 2 | 2021-08-03 |
Vertical field-effect transistor including a fin having sidewalls with a tapered bottom profile
Grant 10,985,273 - Yeung , et al. April 20, 2 | 2021-04-20 |
Techniques for vertical FET gate length control
Grant 10,978,576 - Liu , et al. April 13, 2 | 2021-04-13 |
Method for quantification of process non uniformity using model-based metrology
Grant 10,955,359 - Chao , et al. March 23, 2 | 2021-03-23 |
Predictive Multi-Stage Modelling for Complex Process Control
App 20210049241 - Halle; Scott ; et al. | 2021-02-18 |
Formation of dielectric layer as etch-stop for source and drain epitaxy disconnection
Grant 10,903,315 - Loubet , et al. January 26, 2 | 2021-01-26 |
Self-limiting and confining epitaxial nucleation
Grant 10,756,178 - Chao , et al. A | 2020-08-25 |
Self-limiting and confining epitaxial nucleation
Grant 10,756,177 - Chao , et al. A | 2020-08-25 |
Formation of dielectric layer as etch-stop for source and drain epitaxy disconnection
Grant 10,741,639 - Loubet , et al. A | 2020-08-11 |
Measuring defectivity by equipping model-less scatterometry with cognitive machine learning
Grant 10,692,203 - Kong , et al. | 2020-06-23 |
Nanosheet transistor with robust source/drain isolation from substrate
Grant 10,658,459 - Chao , et al. | 2020-05-19 |
Semiconductor Device And Method Of Forming The Semiconductor Device
App 20200152631 - Chao; Robin Hsin Kuo ; et al. | 2020-05-14 |
Dielectric isolation in gate-all-around devices
Grant 10,636,694 - Chao , et al. | 2020-04-28 |
Formation Of Dielectric Layer As Etch-stop For Source And Drain Epitaxy Disconnection
App 20200105868 - LOUBET; Nicolas ; et al. | 2020-04-02 |
Formation Of Dielectric Layer As Etch-stop For Source And Drain Epitaxy Disconnection
App 20200105869 - LOUBET; Nicolas ; et al. | 2020-04-02 |
Machine Learning Enhanced Optical-based Screening For In-line Wafer Testing
App 20200064275 - Chao; Robin Hsin Kuo ; et al. | 2020-02-27 |
Techniques for Vertical FET Gate Length Control
App 20200044055 - Liu; Chi-Chun ; et al. | 2020-02-06 |
Vertical Field-effect Transistor Including A Fin Having Sidewalls With A Tapered Bottom Profile
App 20200027984 - Yeung; Chun Wing ; et al. | 2020-01-23 |
Vertical field-effect transistor including a fin having sidewalls with a tapered bottom profile
Grant 10,529,850 - Yeung , et al. J | 2020-01-07 |
Nanosheet Transistor With Robust Source/drain Isolation From Substrate
App 20200006476 - Chao; Robin Hsin Kuo ; et al. | 2020-01-02 |
Dielectric Isolation In Gate-all-around Devices
App 20190393076 - Chao; Robin Hsin Kuo ; et al. | 2019-12-26 |
Techniques for vertical FET gate length control
Grant 10,475,905 - Liu , et al. Nov | 2019-11-12 |
Vertical Field-effect Transistor Including A Fin Having Sidewalls With A Tapered Bottom Profile
App 20190326435 - Yeung; Chun Wing ; et al. | 2019-10-24 |
Dielectric isolation in gate-all-around devices
Grant 10,453,736 - Chao , et al. Oc | 2019-10-22 |
Nanosheet transistor with robust source/drain isolation from substrate
Grant 10,431,651 - Chao , et al. O | 2019-10-01 |
Replacement-channel Fabrication Of Iii-v Nanosheet Devices
App 20190280102 - Zhang; Jingyun ; et al. | 2019-09-12 |
Self-aligned inner-spacer replacement process using implantation
Grant 10,411,120 - Chao , et al. Sept | 2019-09-10 |
Low-k Dielectric Inner Spacer For Gate All Around Transistors
App 20190267463 - Chao; Robin Hsin Kuo ; et al. | 2019-08-29 |
Measuring Defectivity by Equipping Model-Less Scatterometry with Cognitive Machine Learning
App 20190259145 - Kong; Dexin ; et al. | 2019-08-22 |
Self-limiting And Confining Epitaxial Nucleation
App 20190252494 - CHAO; ROBIN HSIN KUO ; et al. | 2019-08-15 |
Long Channels For Transistors
App 20190252497 - CHAO; ROBIN HSIN KUO ; et al. | 2019-08-15 |
Long Channels For Transistors
App 20190252520 - CHAO; ROBIN HSIN KUO ; et al. | 2019-08-15 |
Self-limiting And Confining Epitaxial Nucleation
App 20190252493 - CHAO; ROBIN HSIN KUO ; et al. | 2019-08-15 |
Undercut control in isotropic wet etch processes
Grant 10,374,034 - Liu , et al. | 2019-08-06 |
Techniques for Vertical FET Gate Length Control
App 20190237562 - Liu; Chi-Chun ; et al. | 2019-08-01 |
Long channels for transistors
Grant 10,355,103 - Chao , et al. July 16, 2 | 2019-07-16 |
Self-limiting and confining epitaxial nucleation
Grant 10,340,341 - Chao , et al. | 2019-07-02 |
Long Channels For Transistors
App 20190189776 - CHAO; ROBIN HSIN KUO ; et al. | 2019-06-20 |
Long Channels For Transistors
App 20190189748 - CHAO; ROBIN HSIN KUO ; et al. | 2019-06-20 |
Self-limiting And Confining Epitaxial Nucleation
App 20190189740 - CHAO; ROBIN HSIN KUO ; et al. | 2019-06-20 |
Long channels for transistors
Grant 10,312,326 - Chao , et al. | 2019-06-04 |
Self-aligned inner-spacer replacement process using implantation
Grant 10,276,695 - Chao , et al. | 2019-04-30 |
Dielectric Isolation In Gate-all-around Devices
App 20190109040 - CHAO; ROBIN HSIN KUO ; et al. | 2019-04-11 |
Self-aligned Inner-spacer Replacement Process Using Implantation
App 20180047834 - Chao; Robin Hsin-Kuo ; et al. | 2018-02-15 |
Self-aligned Inner-spacer Replacement Process Using Implantation
App 20180047835 - Chao; Robin Hsin-Kuo ; et al. | 2018-02-15 |
Self-aligned inner-spacer replacement process using implantation
Grant 9,831,324 - Chao , et al. November 28, 2 | 2017-11-28 |
Method For Quantification Of Process Non-uniformity Using Model-based Metrology
App 20150134286 - Chao; Robin Hsin-Kuo ; et al. | 2015-05-14 |
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