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Patent applications and USPTO patent grants for Chao; Chung-Pei.The latest application filed is for "in-line wafer measurement data compensation method".
Patent | Date |
---|---|
Method for prognostic maintenance in semiconductor manufacturing equipments Grant 7,904,195 - Chao , et al. March 8, 2 | 2011-03-08 |
In-line Wafer Measurement Data Compensation Method App 20100228382 - CHAO; CHUNG-PEI | 2010-09-09 |
Method For Prognostic Maintenance In Semiconductor Manufacturing Equipments App 20090306804 - CHAO; CHUNG-PEI ;   et al. | 2009-12-10 |
Method of monitoring ultra-thin nitride quality by wet re-oxidation App 20030001243 - Wu, Yung-Hsien ;   et al. | 2003-01-02 |
Method for reducing capacitance in metal lines using air gaps Grant 6,291,030 - Chao , et al. September 18, 2 | 2001-09-18 |
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