Chang; YungShan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chang; YungShan.The latest application filed is for "stress compensation for piezoelectric optical mems devices".

Company Profile

2.8.10

Chang; YungShan - Plano TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Stress compensation for piezoelectric optical MEMS devices Grant 11,148,939 - Chang , et al. October 19, 2	2021-10-19
Piezoelectric optical MEMS device with embedded moisture layers Grant 10,829,365 - Chang , et al. November 10, 2	2020-11-10
Method of forming a semiconductor device Grant 10,319,899 - Jiang , et al.	2019-06-11
Stress Compensation For Piezoelectric Optical Mems Devices App 20180179054 - Chang; YungShan ; et al.	2018-06-28
Piezoelectric Optical Mems Device With Embedded Moisture Layers App 20180141804 - Chang; YungShan ; et al.	2018-05-24
High-temperature isotropic plasma etching process to prevent electrical shorts Grant 9,939,710 - Jiang , et al. April 10, 2	2018-04-10
Stress compensation for piezoelectric optical MEMS devices Grant 9,890,040 - Chang , et al. February 13, 2	2018-02-13
Piezoelectric optical MEMS device with embedded moisture layers Grant 9,834,433 - Chang , et al. December 5, 2	2017-12-05
Piezoeletric Wet Etch Process With Reduced Resist Lifting And Controlled Undercut App 20170338401 - Jiang; Neng ; et al.	2017-11-23
Piezoeletric wet etch process with reduced resist lifting and controlled undercut Grant 9,755,139 - Jiang , et al. September 5, 2	2017-09-05
High-temperature Isotropic Plasma Etching Process To Prevent Electrical Shorts App 20160313627 - Jiang; Neng ; et al.	2016-10-27
High-temperature isotropic plasma etching process to prevent electrical shorts Grant 9,405,089 - Jiang , et al. August 2, 2	2016-08-02
Stress Compensation For Piezoelectric Optical Mems Devices App 20150378127 - Chang; YungShan ; et al.	2015-12-31
Piezoelectric Optical MEMS Device With Embedded Moisture Layers App 20150378064 - Chang; YungShan ; et al.	2015-12-31
METHODS TO IMPROVE THE CRYSTALLINITY OF PbZrTiO3 AND Pt FILMS FOR MEMS APPLICATIONS App 20150380635 - Srinivasan; Bhaskar ; et al.	2015-12-31
Method For Reducing Discharge Defects And Electrode Delamination In Piezoelectric Optical Mems Devices App 20150376000 - Chang; YungShan ; et al.	2015-12-31
Piezoeletric Wet Etch Process With Reduced Resist Lifting And Controlled Undercut App 20150380637 - Jiang; Neng ; et al.	2015-12-31
High-temperature Isotropic Plasma Etching Process To Prevent Electrical Shorts App 20150340245 - Jiang; Neng ; et al.	2015-11-26

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