Chang; Yung Shan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chang; Yung Shan.The latest application filed is for "sloped photoresist edges for defect reduction for metal dry etch processes".
- Chang; Yung Shan - Plano TX
| Patent | Date |
|---|---|
| Sloped photoresist edges for defect reduction for metal dry etch processes Grant 9,716,013 - Stewart , et al. July 25, 2 | 2017-07-25 |
| Sloped Photoresist Edges For Defect Reduction For Metal Dry Etch Processes App 20150221524 - STEWART; ELIZABETH COSTNER ; et al. | 2015-08-06 |
| Method to test shallow trench isolation fill capability App 20060284173 - Quevedo-Lopez; Manuel A. ; et al. | 2006-12-21 |
| Design to prevent tungsten oxidation at contact alignment in FeRAM Grant 6,660,612 - Chang , et al. December 9, 2 | 2003-12-09 |
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