Patent | Date |
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Delamination resistant semiconductor film and method for forming the same Grant 8,846,149 - Chang , et al. September 30, 2 | 2014-09-30 |
Schottky diodes having low-voltage and high-concentration rings Grant 8,324,705 - Tang , et al. December 4, 2 | 2012-12-04 |
Method for planarization Grant 7,838,427 - Chang November 23, 2 | 2010-11-23 |
Schottky Diodes Having Low-Voltage and High-Concentration Rings App 20090294865 - Tang; Chien-Shao ;   et al. | 2009-12-03 |
Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices Grant 7,384,799 - Chen , et al. June 10, 2 | 2008-06-10 |
Delamination resistant semiconductor film and method for forming the same App 20070197005 - Chang; Yuh-Hwa ;   et al. | 2007-08-23 |
Method for planarization App 20070167018 - Chang; Yuh-Hwa | 2007-07-19 |
Surface MEMS mirrors with oxide spacers Grant 7,205,176 - Chen , et al. April 17, 2 | 2007-04-17 |
Backside coating for MEMS wafer Grant 7,153,768 - Chen , et al. December 26, 2 | 2006-12-26 |
Micromirror and products using the same Grant 7,095,544 - Yeh , et al. August 22, 2 | 2006-08-22 |
Backside coating for MEMS wafer App 20060177992 - Chen; Fei-Yuh ;   et al. | 2006-08-10 |
Method to avoid alpha-Si damage during wet stripping processes in the manufacture of MEMS devices App 20060166509 - Chen; Fei-Yun ;   et al. | 2006-07-27 |
Micromirror for MEMS device Grant 7,057,794 - Wang , et al. June 6, 2 | 2006-06-06 |
Method and apparatus for preventing metal/silicon spiking in MEMS devices App 20060110842 - Chang; Yuh-Hwa ;   et al. | 2006-05-25 |
System and method of forming a split-gate flash memory cell App 20050287740 - Wu, Michael ;   et al. | 2005-12-29 |
Surface MEMS mirrors with oxide spacers App 20050260784 - Chen, Fei-Yun ;   et al. | 2005-11-24 |
Micromirror for MEMS divice App 20050259311 - Wang, Shen-Ping ;   et al. | 2005-11-24 |
Method to monitor process charging effect Grant 6,958,249 - Tzeng , et al. October 25, 2 | 2005-10-25 |
Trench-embedded mirror structure for double substrate spatial light modulator Grant 6,947,196 - Chen , et al. September 20, 2 | 2005-09-20 |
Reflective spatial light modulator mirror device manufacturing process and layout method Grant 6,929,969 - Tzeng , et al. August 16, 2 | 2005-08-16 |
Method of forming a micromechanical structure App 20050057792 - Wang, Shen-Ping ;   et al. | 2005-03-17 |
Method for manufacturing reflective spatial light modulator mirror devices Grant 6,841,081 - Chang , et al. January 11, 2 | 2005-01-11 |
Method For Manufacturing Reflective Spatial Light Modulator Mirror Devices App 20040245215 - Chang, Yuh-Hwa ;   et al. | 2004-12-09 |
Reflective spatial light modulator mirror device manufacturing process and layout method App 20040226909 - Tzeng, Jiann-Tyng ;   et al. | 2004-11-18 |
Trench-embeded mirror structure for double substrate spatial light modulator App 20040212868 - Chen, Jiun Nan ;   et al. | 2004-10-28 |
Micromirror and products using the same App 20040190108 - Yeh, Chih-Chieh ;   et al. | 2004-09-30 |