Chang; Yi-Shiang
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chang; Yi-Shiang.The latest application filed is for "method of detecting photolithographic hotspots".
- Chang; Yi-Shiang - Changhua County TW
| Patent | Date |
|---|---|
| Method of detecting photolithographic hotspots Grant 9,508,138 - Chang , et al. November 29, 2 | 2016-11-29 |
| Method Of Detecting Photolithographic Hotspots App 20160321793 - Chang; Yi-Shiang ; et al. | 2016-11-03 |
| Semiconductor Circuit Structure App 20160035733 - Lin; Shu-Cheng ; et al. | 2016-02-04 |
| Semiconductor circuit structure and process of making the same Grant 9,196,623 - Lin , et al. November 24, 2 | 2015-11-24 |
| Mask For Dual Tone Development App 20140255829 - Chang; Yi-Shiang ; et al. | 2014-09-11 |
| Method for forming contact hole Grant 8,709,946 - Tsai , et al. April 29, 2 | 2014-04-29 |
| Semiconductor Circuit Structure And Process Of Making The Same App 20130264622 - Lin; Shu-Cheng ; et al. | 2013-10-10 |
| Method For Forming Contact Hole App 20130137270 - Tsai; Meng-Feng ; et al. | 2013-05-30 |
| Off-axis Light Source, Light Screen Plate, And Method Of Defining Different Types Of Patterns With Single Exposure App 20100060871 - Chang; Yi-Shiang | 2010-03-11 |
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