loadpatents
Patent applications and USPTO patent grants for Chang; Yang-Hung.The latest application filed is for "noise reduction for overlay control".
Patent | Date |
---|---|
Forecasting wafer defects using frequency domain analysis Grant 10,867,116 - Chang , et al. December 15, 2 | 2020-12-15 |
Method and system for overlay control Grant 10,866,524 - Chang , et al. December 15, 2 | 2020-12-15 |
Noise Reduction for Overlay Control App 20200310255 - Hu; Weimin ;   et al. | 2020-10-01 |
Noise reduction for overlay control Grant 10,684,556 - Hu , et al. | 2020-06-16 |
Method and System for Overlay Control App 20200124984 - Chang; Yang-Hung ;   et al. | 2020-04-23 |
Forecasting Wafer Defects Using Frequency Domain Analysis App 20200125785 - Chang; Yang-Hung ;   et al. | 2020-04-23 |
Forecasting wafer defects using frequency domain analysis Grant 10,521,548 - Chang , et al. Dec | 2019-12-31 |
Method and system for overlay control Grant 10,514,612 - Chang , et al. Dec | 2019-12-24 |
Noise Reduction for Overlay Control App 20190258179 - Hu; Weimin ;   et al. | 2019-08-22 |
Noise reduction for overlay control Grant 10,281,827 - Hu , et al. | 2019-05-07 |
Method and System for Overlay Control App 20180329313 - Chang; Yang-Hung ;   et al. | 2018-11-15 |
Forecasting Wafer Defects Using Frequency Domain Analysis App 20180330040 - Chang; Yang-Hung ;   et al. | 2018-11-15 |
Forecasting wafer defects using frequency domain analysis Grant 10,031,997 - Chang , et al. July 24, 2 | 2018-07-24 |
Method and system for overlay control Grant 10,031,426 - Chang , et al. July 24, 2 | 2018-07-24 |
Forecasting Wafer Defects Using Frequency Domain Analysis App 20180196911 - Chang; Yang-Hung ;   et al. | 2018-07-12 |
Noise Reduction for Overlay Control App 20180173110 - Hu; Weimin ;   et al. | 2018-06-21 |
Method and System For Overlay Control App 20150268564 - Chang; Yang-Hung ;   et al. | 2015-09-24 |
Systems and methods for similarity-based semiconductor process control Grant 9,070,622 - Ke , et al. June 30, 2 | 2015-06-30 |
Method and system for overlay control Grant 9,053,284 - Chang , et al. June 9, 2 | 2015-06-09 |
Systems And Methods For Similarity-based Semiconductor Process Control App 20150079700 - Ke; Chih-Ming ;   et al. | 2015-03-19 |
Method and System for Overlay Control App 20150067617 - Chang; Yang-Hung ;   et al. | 2015-03-05 |
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