Chang; Shengwu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chang; Shengwu.The latest application filed is for "apparatus and method for controlling ion beam using electostatic filter".

Company Profile

11.35.35

Chang; Shengwu - Hamilton MA
Chang; Shengwu - South Hamilton MA
Chang; Shengwu - Newburyport MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System and method for improved beam current from an ion source Grant 11,232,925 - Chang , et al. January 25, 2	2022-01-25
System and method for improved beam current from an ion source Grant 11,120,966 - Chang , et al. September 14, 2	2021-09-14
Apparatus And Method For Controlling Ion Beam Using Electostatic Filter App 20210159043 - Likhanskii; Alexandre ; et al.	2021-05-27
High-current ion implanter and method for controlling ion beam using high-current ion implanter Grant 11,011,343 - Likhanskii , et al. May 18, 2	2021-05-18
System And Method For Improved Beam Current From An Ion Source App 20210066019 - Chang; Shengwu ; et al.	2021-03-04
System And Method For Improved Beam Current From An Ion Source App 20210066017 - Chang; Shengwu ; et al.	2021-03-04
Apparatus and method for controlling ion beam using electrostatic filter Grant 10,937,624 - Likhanskii , et al. March 2, 2	2021-03-02
High-current Ion Implanter And Method For Controlling Ion Beam Using High-current Ion Implanter App 20210020399 - Likhanskii; Alexandre ; et al.	2021-01-21
Electrostatic filter and ion implanter having asymmetric electrostatic configuration Grant 10,886,098 - Likhanskii , et al. January 5, 2	2021-01-05
Electostatic filter and method for controlling ion beam properties using electrostatic filter Grant 10,804,068 - Likhanskii , et al. October 13, 2	2020-10-13
Electostatic filter and method for controlling ion beam using electostatic filter Grant 10,790,116 - Likhanskii , et al. September 29, 2	2020-09-29
Conductive beam optics for reducing particles in ion implanter Grant 10,714,301 - Chang , et al.	2020-07-14
Apparatus and method for controlling ion beam properties using electrostatic filter Grant 10,665,415 - Likhanskii , et al.	2020-05-26
Electostatic Filter And Method For Controlling Ion Beam Using Electostatic Filter App 20200161089 - Likhanskii; Alexandre ; et al.	2020-05-21
Electrostatic Filter And Ion Implanter Having Asymmetric Electrostatic Configuration App 20200161077 - Likhanskii; Alexandre ; et al.	2020-05-21
Apparatus And Method For Controlling Ion Beam Using Electostatic Filter App 20200161078 - Likhanskii; Alexandre ; et al.	2020-05-21
Electostatic Filter And Method For Controlling Ion Beam Properties Using Electrostatic Filter App 20200161076 - Likhanskii; Alexandre ; et al.	2020-05-21
Apparatus And Method For Controlling Ion Beam Properties Using Electrostatic Filter App 20200144017 - Likhanskii; Alexandre ; et al.	2020-05-07
Conductive beam optic containing internal heating element Grant 10,504,682 - Chang , et al. Dec	2019-12-10
Apparatus and method for controlling ion beam properties using energy filter Grant 10,468,224 - Radovanov , et al. No	2019-11-05
Conductive Beam Optic Containing Internal Heating Element App 20190259560 - Chang; Shengwu ; et al.	2019-08-22
Apparatus And Method For Controlling Ion Beam Properties Using Energy Filter App 20190198283 - Radovanov; Svetlana ; et al.	2019-06-27
Apparatus and method for improved ion beam current Grant 10,074,514 - Chang , et al. September 11, 2	2018-09-11
Source housing assembly for controlling ion beam extraction stability and ion beam current Grant 9,934,928 - Chang , et al. April 3, 2	2018-04-03
Controlling an ion beam in a wide beam current operation range Grant 9,679,745 - Chang , et al. June 13, 2	2017-06-13
Controlling An Ion Beam In A Wide Beam Current Operation Range App 20170110286 - Chang; Shengwu ; et al.	2017-04-20
Cold stripper for high energy ion implanter with tandem accelerator Grant 9,520,204 - Chang December 13, 2	2016-12-13
Source Housing Assembly For Controlling Ion Beam Extraction Stability And Ion Beam Current App 20160336138 - Chang; Shengwu ; et al.	2016-11-17
Method and apparatus for generating high current negative hydrogen ion beam Grant 9,437,341 - Chang September 6, 2	2016-09-06
Apparatus And Method To Control Ion Beam Current App 20160233048 - Chang; Shengwu ; et al.	2016-08-11
Apparatus and method to control ion beam current Grant 9,396,903 - Chang , et al. July 19, 2	2016-07-19
Bias electrodes for tandem accelerator Grant 9,281,165 - Chang , et al. March 8, 2	2016-03-08
Bias Electrodes For Tandem Accelerator App 20160064186 - Chang; Shengwu ; et al.	2016-03-03
Moveable current sensor for increasing ion beam utilization during ion implantation Grant 9,263,231 - Chang February 16, 2	2016-02-16
Apparatus for treating ion beam Grant 9,165,744 - Chang October 20, 2	2015-10-20
Method And Apparatus For Three Dimensional Ion Implantation App 20150228445 - Chang; Shengwu	2015-08-13
Cold Stripper For High Energy Ion Implanter With Tandem Accelerator App 20150187450 - Chang; Shengwu	2015-07-02
Platen control Grant 9,012,337 - Chang , et al. April 21, 2	2015-04-21
Moveable Current Sensor For Increasing Ion Beam Utilization During Ion Implantation App 20150104885 - CHANG; SHENGWU	2015-04-16
Apparatus and techniques for controlling ion implantation uniformity Grant 9,006,692 - Todorov , et al. April 14, 2	2015-04-14
Apparatus And Techniques For Controlling Ion Implantation Uniformity App 20140326179 - Todorov; Stanislav S. ; et al.	2014-11-06
Apparatus and techniques for controlling ion implantation uniformity Grant 8,853,653 - Todorov , et al. October 7, 2	2014-10-07
Apparatus For Treating Ion Beam App 20140110596 - Chang; Shengwu	2014-04-24
Hybrid electrostatic lens for improved beam transmission Grant 8,664,619 - Chang March 4, 2	2014-03-04
Hybrid Electrostatic Lens For Improved Beam Transmission App 20130256527 - Chang; Shengwu	2013-10-03
Method and Apparatus for Generating High Current Negative Hydrogen ION Beam App 20130255577 - Chang; Shengwu	2013-10-03
Hybrid Electrostatic Lens For Improved Beam Transmission App 20130256526 - Chang; Shengwu	2013-10-03
Ion beam tuning Grant 8,330,125 - Chang , et al. December 11, 2	2012-12-11
Platen Control App 20120088035 - Chang; Shengwu ; et al.	2012-04-12
Ion Beam Tuning App 20120068081 - Chang; Shengwu ; et al.	2012-03-22
High voltage insulator for preventing instability in an ion implanter due to triple-junction breakdown Grant 7,622,724 - Chang , et al. November 24, 2	2009-11-24
High Voltage Insulator For Preventing Instability In An Ion Implanter Due To Triple-junction Breakdown App 20080315114 - Chang; Shengwu ; et al.	2008-12-25
Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation Grant 7,462,844 - Chang , et al. December 9, 2	2008-12-09
Electron confinement inside magnet of ion implanter Grant 7,459,692 - Renau , et al. December 2, 2	2008-12-02
Ion beam implant current, spot width and position tuning Grant 7,442,944 - Chang , et al. October 28, 2	2008-10-28
Technique for tuning an ion implanter system Grant 7,397,047 - Chang , et al. July 8, 2	2008-07-08
Technique for uniformity tuning in an ion implanter system Grant 7,355,188 - Olson , et al. April 8, 2	2008-04-08
Technique for uniformity tuning in an ion implanter system Grant 7,253,423 - Chang , et al. August 7, 2	2007-08-07
Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation App 20070085037 - Chang; Shengwu ; et al.	2007-04-19
Technique for uniformity tuning in an ion implanter system App 20060284114 - Olson; Joseph C. ; et al.	2006-12-21
Technique for uniformity tuning in an ion implanter system App 20060266957 - Chang; Shengwu ; et al.	2006-11-30
Indirectly heated cathode ion source Grant 7,138,768 - Maciejowski , et al. November 21, 2	2006-11-21
Technique for tuning an ion implanter system App 20060249696 - Chang; Shengwu ; et al.	2006-11-09
Ion implant ion beam parallelism and direction integrity determination and adjusting App 20060169922 - Chang; Shengwu ; et al.	2006-08-03
Electron confinement inside magent of ion implanter App 20060169911 - Renau; Anthony ; et al.	2006-08-03
Weakening Focusing Effect Of Acceleration-deceleration Column Of Ion Implanter App 20060108543 - Chang; Shengwu ; et al.	2006-05-25
Weakening focusing effect of acceleration-deceleration column of ion implanter Grant 7,045,799 - Chang , et al. May 16, 2	2006-05-16
Ion beam implant current, spot width and position tuning App 20060076510 - Chang; Shengwu ; et al.	2006-04-13
Indirectly heated cathode ion source App 20030218428 - Maciejowski, Peter E. ; et al.	2003-11-27

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