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Patent applications and USPTO patent grants for Chang; Seobong.The latest application filed is for "precursors and methods for preparing silicon-containing films".
Patent | Date |
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Method for forming carbon rich silicon-containing films Grant 11,414,750 - Cho , et al. August 16, 2 | 2022-08-16 |
Precursors And Methods For Preparing Silicon-containing Films App 20210301400 - LEE; SangJin ;   et al. | 2021-09-30 |
Haloalkynyl Dicobalt Hexacarbonyl Precursors For Chemical Vapor Deposition Of Cobalt App 20210082708 - HAN; Sangbum ;   et al. | 2021-03-18 |
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt Grant 10,872,770 - Han , et al. December 22, 2 | 2020-12-22 |
Method For Forming Carbon Rich Silicon-containing Films App 20200354830 - CHO; Sungsil ;   et al. | 2020-11-12 |
Haloalkynyl Dicobalt Hexacarbonyl Precursors For Chemical Vapor Deposition Of Cobalt App 20180158687 - Han; Sangbum ;   et al. | 2018-06-07 |
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