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Chang; Keh-Wen Patent Filings

Chang; Keh-Wen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chang; Keh-Wen.The latest application filed is for "treatment to interface between metal film and barc or photoresist".

Company Profile
1.5.4
  • Chang; Keh-Wen - Miaoli County TW
  • Chang; Keh-Wen - Zaociao Township Miaoli County TW
  • Chang; Keh-Wen - Zaociao Township, Maioli County N/A TW
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Treatment to interface between metal film and BARC or photoresist
Grant 11,081,365 - Chang , et al. August 3, 2
2021-08-03
Treatment To Interface Between Metal Film And Barc Or Photoresist
App 20200020546 - CHANG; Chung-Hao ;   et al.
2020-01-16
Method and system for feed-forward advanced process control
Grant 8,683,395 - Yu , et al. March 25, 2
2014-03-25
Method And System For Feed-forward Advanced Process Control
App 20130239073 - Yu; Chih-Jen ;   et al.
2013-09-12
Method and system for feed-forward advanced process control
Grant 8,429,569 - Yu , et al. April 23, 2
2013-04-23
Method And System For Feed-forward Advanced Process Control
App 20120264063 - Yu; Chih-Jen ;   et al.
2012-10-18
Method and apparatus for lens contamination control
Grant 7,564,556 - Chang , et al. July 21, 2
2009-07-21
Method And Apparatus For Lens Contamination Control
App 20080241714 - Chang; Keh-Wen ;   et al.
2008-10-02

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