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Patent applications and USPTO patent grants for Chang; Ho Seung.The latest application filed is for "method of depositing thin film and method of manufacturing semiconductor using the same".
Patent | Date |
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Method of depositing thin film and method of manufacturing semiconductor using the same Grant 7,842,606 - Lee , et al. November 30, 2 | 2010-11-30 |
Method of Depositing Thin Film and Method of Manufacturing Semiconductor Using the Same App 20080166887 - Lee; Ki Hoon ;   et al. | 2008-07-10 |
Method of depositing thin film on wafer App 20070026144 - Park; Young Hoon ;   et al. | 2007-02-01 |
Apparatus for depositing thin film on wafer App 20060096534 - Lim; Hong Joo ;   et al. | 2006-05-11 |
Thin film deposition reactor Grant 6,884,297 - Park , et al. April 26, 2 | 2005-04-26 |
Method of depositing thin film on wafer App 20050003088 - Park, Young Hoon ;   et al. | 2005-01-06 |
Thin film deposition reactor App 20040187780 - Park, Young Hoon ;   et al. | 2004-09-30 |
Wafer cassette and cleaning system adopting the same Grant 5,715,851 - Jung , et al. February 10, 1 | 1998-02-10 |
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