| Patent | Date |
|---|
Modeling resolution enhancement processes in integrated circuit fabrication
Grant 7,653,890 - Tsai , et al. January 26, 2 | 2010-01-26 |
System and method for providing defect printability analysis of photolithographic masks with job-based automation
Grant 7,617,474 - Pang , et al. November 10, 2 | 2009-11-10 |
Visual inspection and verification system
Grant 7,523,027 - Chang , et al. April 21, 2 | 2009-04-21 |
Method and apparatus for deblurring mask images
Grant 7,483,559 - Luk-Pat , et al. January 27, 2 | 2009-01-27 |
Automated creation of metrology recipes
Grant 7,457,736 - Chang November 25, 2 | 2008-11-25 |
Delta information design closure integrated circuit fabrication
Grant 7,360,191 - Chang , et al. April 15, 2 | 2008-04-15 |
Method and apparatus for data hierarchy maintenance in a system for mask description
Grant 7,356,788 - Chang , et al. April 8, 2 | 2008-04-08 |
Delta-geometry timing prediction in integrated circuit fabrication
Grant 7,216,320 - Chang , et al. May 8, 2 | 2007-05-08 |
System And Method For Providing Defect Printability Analysis Of Photolithographic Masks With Job-Based Automation
App 20060242619 - Pang; Linyong ; et al. | 2006-10-26 |
Lithographic simulations using graphical processing units
App 20060242618 - Wang; Yao-Ting ; et al. | 2006-10-26 |
Visual analysis and verification system using advanced tools
Grant 7,107,571 - Chang , et al. September 12, 2 | 2006-09-12 |
System and method for providing defect printability analysis of photolithographic masks with job-based automation
Grant 7,093,229 - Pang , et al. August 15, 2 | 2006-08-15 |
Monitoring method, process and system for photoresist regeneration
Grant 7,052,826 - Lai , et al. May 30, 2 | 2006-05-30 |
System and method for indentifying dummy features on a mask layer
Grant 7,014,955 - Chang , et al. March 21, 2 | 2006-03-21 |
Method and apparatus for deblurring mask images
App 20060034505 - Luk-Pat; Gerard Terrence ; et al. | 2006-02-16 |
System and method for generating a two-dimensional yield map for a full layout
Grant 6,996,790 - Chang February 7, 2 | 2006-02-07 |
Method and apparatus for mixed-mode optical proximity correction
Grant 6,988,259 - Pierrat , et al. January 17, 2 | 2006-01-17 |
Simulation using design geometry information
Grant 6,976,240 - Chang December 13, 2 | 2005-12-13 |
Modeling resolution enhancement processes in integrated circuit fabrication
App 20050268256 - Tsai, Chi-Ming ; et al. | 2005-12-01 |
Monitoring method, process and system for photoresist regeneration
App 20050244761 - Lai, Ching-Chin ; et al. | 2005-11-03 |
Delta-geometry timing prediction in integrated circuit fabrication
App 20050172251 - Chang, Li-Fu ; et al. | 2005-08-04 |
Delta information design closure in integrated circuit fabrication
App 20050108666 - Chang, Li-Fu ; et al. | 2005-05-19 |
Method of incorporating lens aberration information into various process flows
Grant 6,880,135 - Chang , et al. April 12, 2 | 2005-04-12 |
Visual inspection and verification system
App 20040243320 - Chang, Fang-Cheng ; et al. | 2004-12-02 |
Programmable aperture for lithographic imaging systems
App 20040197672 - Weed, J. Tracy ; et al. | 2004-10-07 |
Method and apparatus for exposing a wafer using multiple masks during an integrated circuit manufacturing process
Grant 6,795,168 - Wang , et al. September 21, 2 | 2004-09-21 |
System and method for generating a two-dimensional yield map for a full layout
App 20040153979 - Chang, Fang-Cheng | 2004-08-05 |
Visual inspection and verification system
Grant 6,757,645 - Chang , et al. June 29, 2 | 2004-06-29 |
Automated creation of metrology recipes
App 20040102934 - Chang, Fang-Cheng | 2004-05-27 |
Verification utilizing instance-based hierarchy management
Grant 6,721,928 - Pierrat , et al. April 13, 2 | 2004-04-13 |
System and method for providing defect printability analysis of photolithographic masks with job-based automation
App 20040015808 - Pang, Linyong ; et al. | 2004-01-22 |
Method and apparatus for exposing a wafer using multiple masks during an integrated circuit manufacturing process
App 20030190762 - Wang, Yao-Ting ; et al. | 2003-10-09 |
Method and apparatus for mixed-mode optical proximity correction
Grant 6,584,609 - Pierrat , et al. June 24, 2 | 2003-06-24 |
Method and apparatus for mixed-mode optical proximity correction
App 20030097647 - Pierrat, Christophe ; et al. | 2003-05-22 |
Simulation using design geometry information
App 20030093251 - Chang, Fang-Cheng | 2003-05-15 |
Method of incorporating lens aberration information into various process flows
App 20030088847 - Chang, Fang-Cheng ; et al. | 2003-05-08 |
Verification utilizing instance-based hierarchy management
App 20030088837 - Pierrat, Christophe ; et al. | 2003-05-08 |
Method and apparatus for analyzing a layout using an instance-based representation
Grant 6,560,766 - Pierrat , et al. May 6, 2 | 2003-05-06 |
General purpose shape-based layout processing scheme for IC layout modifications
App 20030061592 - Agrawal, Deepak ; et al. | 2003-03-27 |
System and method for indentifying dummy features on a mask layer
App 20030044059 - Chang, Fang-Cheng ; et al. | 2003-03-06 |
Method And Apparatus For Analyzing A Layout Using An Instance-based Representation
App 20030023939 - Pierrat, Christophe ; et al. | 2003-01-30 |
Method and apparatus for data hierarchy maintenance in a system for mask description
App 20030018948 - Chang, Fang-Cheng ; et al. | 2003-01-23 |
Design rule checking system and method
Grant 6,470,489 - Chang , et al. October 22, 2 | 2002-10-22 |
Method and apparatus for data hierarchy maintenance in a system for mask description
Grant 6,453,452 - Chang , et al. September 17, 2 | 2002-09-17 |
Data hierarchy layout correction and verification method and apparatus
Grant 6,370,679 - Chang , et al. April 9, 2 | 2002-04-09 |
Visual analysis and verification system using advanced tools
App 20020035461 - Chang, Fang-Cheng ; et al. | 2002-03-21 |
Visual Inspection And Verification System
App 20020019729 - CHANG, FANG-CHENG ; et al. | 2002-02-14 |
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