| Patent | Date |
|---|
Linear Motors With Embedded Encoder
App 20220263439 - Chang; Christopher C. | 2022-08-18 |
Multi-dimensional motion performance modeling and real-time monitoring of a motion system
Grant 11,237,212 - Chang February 1, 2 | 2022-02-01 |
Motion System Health Management Using Multidimensional Modeling Using Motor Operational Parameters
App 20210183184 - Chang; Christopher C. | 2021-06-17 |
Motion system health management using existing servo drive variables
Grant 10,935,954 - Chang March 2, 2 | 2021-03-02 |
Motor with internal encoder unit
Grant 10,910,970 - Chang February 2, 2 | 2021-02-02 |
Motor With Internal Encoder Unit
App 20190393814 - Chang; Christopher C. | 2019-12-26 |
Motion System Health Management Using Existing Servo Drive Variables
App 20190354077 - Chang; Christopher C. | 2019-11-21 |
Multi-camera time slice system and method of generating integrated subject, foreground and background time slice images
Grant 10,244,220 - Chang , et al. | 2019-03-26 |
Multi-dimensional Motion Performance Modeling And Real-time Monitoring Of A Motion System
App 20180196104 - Chang; Christopher C. | 2018-07-12 |
Multi-camera Time Slice System And Method Of Generating Integrated Subject, Foreground And Background Time Slice Images
App 20170230631 - Chang; Christopher C. ; et al. | 2017-08-10 |
Multi-camera system and method of calibrating the multi-camera system
Grant 9,066,024 - Chang , et al. June 23, 2 | 2015-06-23 |
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
Grant 8,486,841 - O'Donnell , et al. July 16, 2 | 2013-07-16 |
Optical encoder and method for measuring displacement information using multiple optical tracks of diffractive optical regions having different periodicities
Grant 8,436,293 - Chang May 7, 2 | 2013-05-07 |
Integrated linear brushless DC motor
Grant 8,368,257 - Chang February 5, 2 | 2013-02-05 |
Multi-camera System And Method Of Calibrating The Multi-camera System
App 20120314089 - Chang; Christopher C. ; et al. | 2012-12-13 |
Intensity-based optical encoder using digital diffractive optic regions
Grant 8,044,339 - Chang , et al. October 25, 2 | 2011-10-25 |
Stepper motor device with compensating non-sinusoidal driving values and method of producing the driving values
Grant 8,030,876 - Chang , et al. October 4, 2 | 2011-10-04 |
Optical Encoder And Method For Measuring Displacement Information Using Multiple Optical Tracks Of Diffractive Optical Regions Having Different Periodicities
App 20100213358 - Chang; Christopher C. | 2010-08-26 |
Integrated Linear Brushless Dc Motor
App 20100102644 - Chang; Christopher C. | 2010-04-29 |
Corrosion Resistant Component Of Semiconductor Processing Equipment And Method Of Manufacture Thereof
App 20100003826 - O'DONNELL; ROBERT J. ; et al. | 2010-01-07 |
Apparatus and method for processing substrates using one or more vacuum transfer chamber units
Grant 7,628,574 - Pak , et al. December 8, 2 | 2009-12-08 |
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
Grant 7,605,086 - O'Donnell , et al. October 20, 2 | 2009-10-20 |
Optical encoder with diffractive encoder member
Grant 7,566,863 - Chang , et al. July 28, 2 | 2009-07-28 |
Intensity-based Optical Encoder Using Digital Diffractive Optic Regions
App 20090166519 - Chang; Christopher C. ; et al. | 2009-07-02 |
Stepper Motor Device With Compensating Non-sinusoidal Driving Values And Method Of Producing The Driving Values
App 20090085509 - Chang; Christopher C. ; et al. | 2009-04-02 |
Integrated motor device and method of setting and reading driver configuration parameters using driver configuration data embedded in driver control signals
Grant 7,417,399 - Chang August 26, 2 | 2008-08-26 |
Microstepper motor device and method of controlling the device
Grant 7,405,532 - Chang July 29, 2 | 2008-07-29 |
Optical Encoder With Diffractive Encoder Member
App 20080100849 - Chang; Christopher C. ; et al. | 2008-05-01 |
Microstepper motor device and method of controlling the device
App 20080084176 - Chang; Christopher C. | 2008-04-10 |
Integrated motor device and method of setting and reading driver configuration parameters using driver configuration data embedded in driver control signals
App 20080075438 - Chang; Christopher C. | 2008-03-27 |
Apparatus And Method For Processing Substrates Using One Or More Vacuum Transfer Chamber Units
App 20070231109 - Pak; Samuel S. ; et al. | 2007-10-04 |
Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
Grant 7,255,898 - O'Donnell , et al. August 14, 2 | 2007-08-14 |
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
App 20070012657 - O'Donnell; Robert J. ; et al. | 2007-01-18 |
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
Grant 7,128,804 - O'Donnell , et al. October 31, 2 | 2006-10-31 |
Low contamination plasma chamber components and methods for making the same
App 20040224128 - Chang, Christopher C. ; et al. | 2004-11-11 |
Low contamination plasma chamber components and methods for making the same
Grant 6,805,952 - Chang , et al. October 19, 2 | 2004-10-19 |
Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof
Grant 6,790,242 - O'Donnell , et al. September 14, 2 | 2004-09-14 |
Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof
Grant 6,773,751 - O'Donnell , et al. August 10, 2 | 2004-08-10 |
Boron Nitride/yttria Composite Components Of Semiconductor Processing Equipment And Method Of Manufacturing Thereof
App 20040137147 - O'Donnell, Robert J. ; et al. | 2004-07-15 |
Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
App 20040023047 - O'Donnell, Robert J. ; et al. | 2004-02-05 |
Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
Grant 6,620,520 - O'Donnell , et al. September 16, 2 | 2003-09-16 |
Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof
Grant 6,613,442 - O'Donnell , et al. September 2, 2 | 2003-09-02 |
Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof
Grant 6,533,910 - O'Donnell , et al. March 18, 2 | 2003-03-18 |
Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof
App 20020094378 - O'Donnell, Robert J. ; et al. | 2002-07-18 |
Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof
App 20020086554 - O'Donnell, Robert J. ; et al. | 2002-07-04 |
Low contamination plasma chamber components and methods for making the same
App 20020086118 - Chang, Christopher C. ; et al. | 2002-07-04 |
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
App 20020086545 - O'Donnell, Robert J. ; et al. | 2002-07-04 |
Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
App 20020086153 - O'Donnell, Robert J. ; et al. | 2002-07-04 |
Diamond coatings on reactor wall and method of manufacturing thereof
App 20020086501 - O'Donnell, Robert J. ; et al. | 2002-07-04 |
Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof
App 20020086553 - O'Donnell, Robert J. ; et al. | 2002-07-04 |
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