Chang; Chih-Kuo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chang; Chih-Kuo.The latest application filed is for "techniques for detecting micro-arcing occurring inside a semiconductor processing chamber".

Company Profile

6.5.5

Chang; Chih-Kuo - Baoshan Township TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber Grant 10,734,206 - Wu , et al.	2020-08-04
Techniques For Detecting Micro-arcing Occurring Inside A Semiconductor Processing Chamber App 20200111652 - Wu; Feng-Kuang ; et al.	2020-04-09
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber Grant 10,559,453 - Wu , et al. Feb	2020-02-11
Arcing Protection Method And Processing Tool App 20190139746 - TSAI; Wun-Kai ; et al.	2019-05-09
Techniques For Detecting Micro-arcing Occurring Inside A Semiconductor Processing Chamber App 20190131116 - Wu; Feng-Kuang ; et al.	2019-05-02
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber Grant 10,170,287 - Wu , et al. J	2019-01-01
Semiconductor apparatus with transportable edge ring for substrate transport Grant 9,741,600 - Hsieh , et al. August 22, 2	2017-08-22
Semiconductor Apparatus With Transportable Edge Ring For Substrate Transport App 20160284584 - Chih-Chang; Hsieh ; et al.	2016-09-29
Semiconductor apparatus with transportable edge ring for substrate transport Grant 9,425,077 - Hsieh , et al. August 23, 2	2016-08-23
Semiconductor Apparatus With Transportable Edge Ring For Substrate Transport App 20140273505 - HSIEH; Chih-Chang ; et al.	2014-09-18

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