Chaney; Craig R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chaney; Craig R..The latest application filed is for "temperature control for insertable target holder for solid dopant materials".
Company Profile
14.43.40
- Chaney; Craig R. - Gloucester MA
- Chaney; Craig R. - Lanesville MA
- Chaney; Craig R. - Rockport MA US
- Chaney; Craig R - Rockport MA
Patent Activity
| Patent | Date |
|---|---|
| Thermally isolated repeller and electrodes Grant 11,239,040 - McLaughlin , et al. February 1, 2 | 2022-02-01 |
| Temperature Control For Insertable Target Holder For Solid Dopant Materials App 20210375585 - Patel; Shreyansh P. ; et al. | 2021-12-02 |
| Temperature control for insertable target holder for solid dopant materials Grant 11,170,973 - Patel , et al. November 9, 2 | 2021-11-09 |
| Temperature Control For Insertable Target Holder For Solid Dopant Materials App 20210110995 - Patel; Shreyansh P. ; et al. | 2021-04-15 |
| Thermally Isolated Repeller And Electrodes App 20210074503 - McLaughlin; Adam M. ; et al. | 2021-03-11 |
| Ion source thermal gas bushing Grant 10,892,136 - Chaney , et al. January 12, 2 | 2021-01-12 |
| Thermally isolated repeller and electrodes Grant 10,854,416 - McLaughlin , et al. December 1, 2 | 2020-12-01 |
| Embedded features for interlocks using additive manufacturing Grant 10,672,634 - Chaney , et al. | 2020-06-02 |
| Ion Source Thermal Gas Bushing App 20200051773 - Chaney; Craig R. ; et al. | 2020-02-13 |
| Varied component density for thermal isolation Grant 10,535,499 - McLaughlin , et al. Ja | 2020-01-14 |
| Foil Sheet Assemblies For Ion Implantation App 20190304738 - Chaney; Craig R. ; et al. | 2019-10-03 |
| Foil sheet assemblies for ion implantation Grant 10,418,223 - Chaney , et al. Sept | 2019-09-17 |
| Embedded Features For Interlocks Using Additive Manufacturing App 20190252226 - Chaney; Craig R. ; et al. | 2019-08-15 |
| Dynamic temperature control of an ion source Grant 10,347,457 - Perel, Sr. , et al. July 9, 2 | 2019-07-09 |
| Dynamic Temperature Control Of An Ion Source App 20190189387 - Perel; Alexander S. ; et al. | 2019-06-20 |
| Varied Component Density For Thermal Isolation App 20190139742 - McLaughlin; Adam M. ; et al. | 2019-05-09 |
| Coating insulating materials for improved life Grant 10,221,476 - Chaney , et al. | 2019-03-05 |
| Embedded features for interlocks using additive manufacturing Grant 10,217,654 - Chaney , et al. Feb | 2019-02-26 |
| Vaporizer for ion source Grant 9,928,983 - Chaney , et al. March 27, 2 | 2018-03-27 |
| Ceramic ion source chamber Grant 9,887,060 - Chaney , et al. February 6, 2 | 2018-02-06 |
| Vaporizer For Ion Source App 20180005793 - Chaney; Craig R. ; et al. | 2018-01-04 |
| Ceramic Ion Source Chamber App 20170309434 - Chaney; Craig R. ; et al. | 2017-10-26 |
| Ceramic ion source chamber Grant 9,741,522 - Chaney , et al. August 22, 2 | 2017-08-22 |
| Ceramic Ion Source Chamber App 20170221669 - Chaney; Craig R. ; et al. | 2017-08-03 |
| Gallium ION source and materials therefore Grant 9,396,902 - Biloiu , et al. July 19, 2 | 2016-07-19 |
| Apparatus for dynamic temperature control of an ion source Grant 9,287,079 - Chaney , et al. March 15, 2 | 2016-03-15 |
| Apparatus For Dynamic Temperature Control Of An Ion Source App 20160005564 - Chaney; Craig R. ; et al. | 2016-01-07 |
| Passive isolation assembly and gas transport system Grant 9,212,785 - Chaney December 15, 2 | 2015-12-15 |
| Ion source and a method for in-situ cleaning thereof Grant 9,142,379 - Koo , et al. September 22, 2 | 2015-09-22 |
| Excited gas injection for ion implant control Grant 9,018,829 - Koo , et al. April 28, 2 | 2015-04-28 |
| Technique for ion implanting a target Grant 8,937,003 - Perel , et al. January 20, 2 | 2015-01-20 |
| Internal RF antenna with dielectric insulation Grant 8,912,976 - Platow , et al. December 16, 2 | 2014-12-16 |
| Coating Insulating Materials For Improved Life App 20140352617 - Chaney; Craig R. ; et al. | 2014-12-04 |
| Ion source and a method for in-situ cleaning thereof App 20140319369 - Koo; Bon-Woong ; et al. | 2014-10-30 |
| Ion source and a method for in-situ cleaning thereof Grant 8,809,800 - Koo , et al. August 19, 2 | 2014-08-19 |
| Gas Transport Across a High Voltage Potential App 20140102563 - Chaney; Craig R. | 2014-04-17 |
| Internal RF Antenna With Dielectric Insulation App 20140070697 - Platow; Wilhelm P. ; et al. | 2014-03-13 |
| Gallium ION Source and Materials Therefore App 20130313971 - Biloiu; Costel ; et al. | 2013-11-28 |
| Excited Gas Injection For Ion Implant Control App 20130313443 - Koo; Bon-Woong ; et al. | 2013-11-28 |
| Titanium diboride coating for plasma processing apparatus Grant 8,592,783 - Hadidi , et al. November 26, 2 | 2013-11-26 |
| Excited gas injection for ion implant control Grant 8,501,624 - Koo , et al. August 6, 2 | 2013-08-06 |
| Techniques for improving extracted ion beam quality using high-transparency electrodes Grant 8,466,431 - Buff , et al. June 18, 2 | 2013-06-18 |
| Cleaning of an extraction aperture of an ion source Grant 8,455,839 - Chaney , et al. June 4, 2 | 2013-06-04 |
| Titanium Diboride Coating For Plasma Processing Apparatus App 20130075253 - Hadidi; Kamal ; et al. | 2013-03-28 |
| Technique For Ion Implanting A Target App 20130072008 - Perel; Alexander S. ; et al. | 2013-03-21 |
| Flexible ion source Grant 8,330,127 - Low , et al. December 11, 2 | 2012-12-11 |
| Indirectly Heated Cathode Cartridge Design App 20120256097 - Chaney; Craig R. ; et al. | 2012-10-11 |
| Directional gas injection for an ion source cathode assembly Grant 8,263,944 - Koo , et al. September 11, 2 | 2012-09-11 |
| Sputter Target Feed System App 20120048723 - Chaney; Craig R. | 2012-03-01 |
| Cleaning of an extraction aperture of an ion source Grant 8,071,956 - Chaney , et al. December 6, 2 | 2011-12-06 |
| Cleaning Of An Extraction Aperture Of An Ion Source App 20110220812 - CHANEY; Craig R. ; et al. | 2011-09-15 |
| Cleaning Of An Extraction Aperture Of An Ion Source App 20110220144 - CHANEY; Craig R. ; et al. | 2011-09-15 |
| Ion source cleaning end point detection Grant 8,003,959 - Platow , et al. August 23, 2 | 2011-08-23 |
| Ethane implantation with a dilution gas Grant 8,003,957 - Chaney , et al. August 23, 2 | 2011-08-23 |
| Techniques For Generating Uniform Ion Beam App 20110143527 - PLATOW; Wilhelm P. ; et al. | 2011-06-16 |
| Ion source cleaning method and apparatus Grant 7,888,662 - Biloiu , et al. February 15, 2 | 2011-02-15 |
| Ion Source Cleaning End Point Detection App 20100327159 - Platow; Wilhelm P. ; et al. | 2010-12-30 |
| Directional Gas Injection For An Ion Source Cathode Assembly App 20100155619 - Koo; John Bon-Woong ; et al. | 2010-06-24 |
| Excited Gas Injection For Ion Implant Control App 20100140077 - Koo; Bon-Woong ; et al. | 2010-06-10 |
| Ion Source and a Method for In-Situ Cleaning Thereof App 20100024841 - Koo; Bon-Woong ; et al. | 2010-02-04 |
| Techniques for providing ion source feed materials Grant 7,655,932 - Hatem , et al. February 2, 2 | 2010-02-02 |
| Ion Source Cleaning Method And Apparatus App 20090314951 - Biloiu; Costel ; et al. | 2009-12-24 |
| Flexible ion source App 20090242793 - Low; Russell J. ; et al. | 2009-10-01 |
| Technique for improving the performance and extending the lifetime of an ion source with gas dilution Grant 7,586,109 - Perel , et al. September 8, 2 | 2009-09-08 |
| Ethane Implantation With A Dilution Gas App 20090200460 - Chaney; Craig R. ; et al. | 2009-08-13 |
| Technique for improving performance and extending lifetime of indirectly heated cathode ion source Grant 7,491,947 - Cobb , et al. February 17, 2 | 2009-02-17 |
| Technique for improving ion implanter productivity Grant 7,446,326 - Chaney , et al. November 4, 2 | 2008-11-04 |
| Technique for Improving the Performance and Extending the Lifetime of an Ion Source with Gas Dilution App 20080179545 - Perel; Alexander S. ; et al. | 2008-07-31 |
| Techniques For Providing Ion Source Feed Materials App 20080169427 - HATEM; Christopher R. ; et al. | 2008-07-17 |
| Technique for improving performance and extending lifetime of inductively heated cathode ion source App 20070085021 - Cobb; Eric R. ; et al. | 2007-04-19 |
| Technique for improving ion implanter productivity App 20070045570 - Chaney; Craig R. ; et al. | 2007-03-01 |
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