| Patent | Date |
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Tungsten feature fill with nucleation inhibition
Grant 11,437,269 - Yang , et al. September 6, 2 | 2022-09-06 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20220275504 - SHANBHAG; Damodar Rajaram ; et al. | 2022-09-01 |
Tungsten feature fill with nucleation inhibition
Grant 11,410,883 - Chandrashekar , et al. August 9, 2 | 2022-08-09 |
Ex situ coating of chamber components for semiconductor processing
Grant 11,365,479 - Shanbhag , et al. June 21, 2 | 2022-06-21 |
High Step Coverage Tungsten Deposition
App 20220181158 - Bowes; Michael ; et al. | 2022-06-09 |
Tungsten Feature Fill With Inhibition Control
App 20220172987 - Yang; Tsung-Han ; et al. | 2022-06-02 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill
App 20220115244 - LAI; Chiukin Steven ; et al. | 2022-04-14 |
Feature Fill With Nucleation Inhibition
App 20220102208 - Chandrashekar; Anand ; et al. | 2022-03-31 |
Void Free Low Stress Fill
App 20220020641 - Chandrashekar; Anand ; et al. | 2022-01-20 |
Edge Exclusion Control
App 20210375591 - Chandrashekar; Anand ; et al. | 2021-12-02 |
Tungsten Feature Fill
App 20210327754 - Chandrashekar; Anand ; et al. | 2021-10-21 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill
App 20210305059 - Lai; Chiukin Steven ; et al. | 2021-09-30 |
Cleaning System For Removing Deposits From Pump In An Exhaust Of A Substrate Processing System
App 20210257194 - BIRRU; Krishna ; et al. | 2021-08-19 |
Tungsten feature fill
Grant 11,075,115 - Chandrashekar , et al. July 27, 2 | 2021-07-27 |
Atomic layer etch of tungsten for enhanced tungsten deposition fill
Grant 11,069,535 - Lai , et al. July 20, 2 | 2021-07-20 |
Fill process optimization using feature scale modeling
Grant 10,977,405 - Bowes , et al. April 13, 2 | 2021-04-13 |
Feature fill with multi-stage nucleation inhibition
Grant 10,916,434 - Wang , et al. February 9, 2 | 2021-02-09 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20200347497 - Shanbhag; Damodar ; et al. | 2020-11-05 |
Atomic Layer Etch Of Tungsten For Enhanced Tungsten Deposition Fill
App 20200286743 - Lai; Chiukin Steven ; et al. | 2020-09-10 |
Ex situ coating of chamber components for semiconductor processing
Grant 10,760,158 - Shanbhag , et al. Sep | 2020-09-01 |
Fill Process Optimization Using Feature Scale Modeling
App 20200242209 - Bowes; Michael ; et al. | 2020-07-30 |
Feature Fill With Multi-stage Nucleation Inhibition
App 20200185225 - Wang; Deqi ; et al. | 2020-06-11 |
Feature Fill With Nucleation Inhibition
App 20200185273 - Chandrashekar; Anand ; et al. | 2020-06-11 |
Feature fill with multi-stage nucleation inhibition
Grant 10,580,654 - Wang , et al. | 2020-03-03 |
Feature fill with nucleation inhibition
Grant 10,580,695 - Chandrashekar , et al. | 2020-03-03 |
Continuous and pulsed RF plasma for etching metals
Grant 10,566,211 - Chandrashekar , et al. Feb | 2020-02-18 |
Tungsten Feature Fill With Nucleation Inhibition
App 20190326168 - Yang; Tsung-Han ; et al. | 2019-10-24 |
Pulsing RF power in etch process to enhance tungsten gapfill performance
Grant 10,395,944 - Fung , et al. A | 2019-08-27 |
Tungsten feature fill with nucleation inhibition
Grant 10,381,266 - Yang , et al. A | 2019-08-13 |
Tungsten Feature Fill With Nucleation Inhibition
App 20190206731 - Chandrashekar; Anand ; et al. | 2019-07-04 |
Ex Situ Coating Of Chamber Components For Semiconductor Processing
App 20190185999 - Shanbhag; Damodar ; et al. | 2019-06-20 |
Tungsten feature fill with nucleation inhibition
Grant 10,256,142 - Chandrashekar , et al. | 2019-04-09 |
Feature Fill With Multi-stage Nucleation Inhibition
App 20190080914 - Wang; Deqi ; et al. | 2019-03-14 |
Chamber conditioning for remote plasma process
Grant 10,211,099 - Wang , et al. Feb | 2019-02-19 |
Tungsten nitride barrier layer deposition
Grant 10,199,267 - Khare , et al. Fe | 2019-02-05 |
Tungsten Feature Fill
App 20190019725 - Chandrashekar; Anand ; et al. | 2019-01-17 |
Tungsten Nitride Barrier Layer Deposition
App 20190006226 - Khare; Rohit ; et al. | 2019-01-03 |
Feature fill with multi-stage nucleation inhibition
Grant 10,170,320 - Wang , et al. J | 2019-01-01 |
Tungsten feature fill
Grant 10,103,058 - Chandrashekar , et al. October 16, 2 | 2018-10-16 |
Feature Fill With Nucleation Inhibition
App 20180277431 - Chandrashekar; Anand ; et al. | 2018-09-27 |
Pulsing Rf Power In Etch Process To Enhance Tungsten Gapfill Performance
App 20180254195 - Fung; Waikit ; et al. | 2018-09-06 |
Atomic Layer Etch Of Tungsten For Enhanced Tungsten Deposition Fill
App 20180240682 - Lai; Chiukin Steven ; et al. | 2018-08-23 |
Chamber Conditioning For Remote Plasma Process
App 20180174901 - Wang; Deqi ; et al. | 2018-06-21 |
Feature fill with nucleation inhibition
Grant 9,997,405 - Chandrashekar , et al. June 12, 2 | 2018-06-12 |
Pulsing RF power in etch process to enhance tungsten gapfill performance
Grant 9,978,610 - Fung , et al. May 22, 2 | 2018-05-22 |
Atomic layer etching of tungsten for enhanced tungsten deposition fill
Grant 9,972,504 - Lai , et al. May 15, 2 | 2018-05-15 |
Continuous And Pulsed Rf Plasma For Etching Metals
App 20180061663 - Chandrashekar; Anand ; et al. | 2018-03-01 |
Tungsten Feature Fill With Nucleation Inhibition
App 20170365513 - Yang; Tsung-Han ; et al. | 2017-12-21 |
Tungsten Feature Fill
App 20170278749 - Chandrashekar; Anand ; et al. | 2017-09-28 |
Low temperature tungsten film deposition for small critical dimension contacts and interconnects
Grant 9,673,146 - Chen , et al. June 6, 2 | 2017-06-06 |
Tungsten feature fill
Grant 9,653,353 - Chandrashekar , et al. May 16, 2 | 2017-05-16 |
Method for forming tungsten film having low resistivity, low roughness and high reflectivity
Grant 9,589,835 - Chandrashekar , et al. March 7, 2 | 2017-03-07 |
Pulsing Rf Power In Etch Process To Enhance Tungsten Gapfill Performance
App 20170053811 - Fung; Waikit ; et al. | 2017-02-23 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill
App 20170040214 - Lai; Chiukin Steven ; et al. | 2017-02-09 |
Void free tungsten fill in different sized features
Grant 9,548,228 - Chandrashekar , et al. January 17, 2 | 2017-01-17 |
Feature Fill With Multi-stage Nucleation Inhibition
App 20160343612 - Wang; Deqi ; et al. | 2016-11-24 |
Tungsten Feature Fill
App 20160190008 - Chandrashekar; Anand ; et al. | 2016-06-30 |
Low Tempature Tungsten Film Deposition For Small Critical Dimension Contacts And Interconnects
App 20160118345 - Chen; Feng ; et al. | 2016-04-28 |
Feature Fill With Nucleation Inhibition
App 20160093528 - Chandrashekar; Anand ; et al. | 2016-03-31 |
Tungsten Feature Fill With Nucleation Inhibition
App 20160071764 - Chandrashekar; Anand ; et al. | 2016-03-10 |
Tungsten feature fill
Grant 9,240,347 - Chandrashekar , et al. January 19, 2 | 2016-01-19 |
Low tempature tungsten film deposition for small critical dimension contacts and interconnects
Grant 9,236,297 - Chen , et al. January 12, 2 | 2016-01-12 |
Methods and apparatuses for void-free tungsten fill in three-dimensional semiconductor features
Grant 9,082,826 - Chandrashekar , et al. July 14, 2 | 2015-07-14 |
Depositing tungsten into high aspect ratio features
Grant 9,034,768 - Chandrashekar , et al. May 19, 2 | 2015-05-19 |
Tungsten Feature Fill
App 20150056803 - Chandrashekar; Anand ; et al. | 2015-02-26 |
Void Free Tungsten Fill In Different Sized Features
App 20150024592 - Chandrashekar; Anand ; et al. | 2015-01-22 |
Methods And Apparatuses For Void-free Tungsten Fill In Three-dimensional Semiconductor Features
App 20140349477 - Chandrashekar; Anand ; et al. | 2014-11-27 |
Systems and methods for controlling etch selectivity of various materials
Grant 8,883,637 - Jeng , et al. November 11, 2 | 2014-11-11 |
Depositing tungsten into high aspect ratio features
Grant 8,835,317 - Chandrashekar , et al. September 16, 2 | 2014-09-16 |
Methods For Depositing Ultra Thin Low Resistivity Tungsten Film For Small Critical Dimension Contacts And Interconnects
App 20140162451 - Chen; Feng ; et al. | 2014-06-12 |
Method For Depositing Tungsten Film Having Low Resistivity, Low Roughness And High Reflectivity
App 20140017891 - Chandrashekar; Anand ; et al. | 2014-01-16 |
Methods for depositing ultra thin low resistivity tungsten film for small critical dimension contacts and interconnects
Grant 8,623,733 - Chen , et al. January 7, 2 | 2014-01-07 |
Depositing Tungsten Into High Aspect Ratio Features
App 20130330926 - Chandrashekar; Anand ; et al. | 2013-12-12 |
Tungsten Feature Fill
App 20130302980 - Chandrashekar; Anand ; et al. | 2013-11-14 |
Method for depositing tungsten film having low resistivity, low roughness and high reflectivity
Grant 8,501,620 - Chandrashekar , et al. August 6, 2 | 2013-08-06 |
Tungsten Feature Fill With Nucleation Inhibition
App 20130171822 - Chandrashekar; Anand ; et al. | 2013-07-04 |
Depositing tungsten into high aspect ratio features
Grant 8,435,894 - Chandrashekar , et al. May 7, 2 | 2013-05-07 |
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics
Grant 8,409,987 - Chandrashekar , et al. April 2, 2 | 2013-04-02 |
Systems And Methods For Controlling Etch Selectivity Of Various Materials
App 20130005140 - Jeng; Esther ; et al. | 2013-01-03 |
Method For Depositing Tungsten Film Having Low Resistivity, Low Roughness And High Reflectivity
App 20120164832 - CHANDRASHEKAR; Anand ; et al. | 2012-06-28 |
Depositing Tungsten Into High Aspect Ratio Features
App 20120115329 - Chandrashekar; Anand ; et al. | 2012-05-10 |
Thinning tungsten layer after through silicon via filling
Grant 8,153,520 - Chandrashekar , et al. April 10, 2 | 2012-04-10 |
Method for depositing tungsten film having low resistivity, low roughness and high reflectivity
Grant 8,129,270 - Chandrashekar , et al. March 6, 2 | 2012-03-06 |
Depositing tungsten into high aspect ratio features
Grant 8,124,531 - Chandrashekar , et al. February 28, 2 | 2012-02-28 |
Method For Depositing Thin Tungsten Film With Low Resistivity And Robust Micro-adhesion Characteristics
App 20120015518 - Chandrashekar; Anand ; et al. | 2012-01-19 |
Depositing Tungsten Into High Aspect Ratio Features
App 20120009785 - Chandrashekar; Anand ; et al. | 2012-01-12 |
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics
Grant 8,058,170 - Chandrashekar , et al. November 15, 2 | 2011-11-15 |
Depositing Tungsten Into High Aspect Ratio Features
App 20110159690 - Chandrashekar; Anand ; et al. | 2011-06-30 |
Method For Forming Tungsten Contacts And Interconnects With Small Critical Dimensions
App 20100267230 - Chandrashekar; Anand ; et al. | 2010-10-21 |
Methods For Depositing Ultra Thin Low Resistivity Tungsten Film For Small Critical Dimension Contacts And Interconnects
App 20100267235 - Chen; Feng ; et al. | 2010-10-21 |
Method For Depositing Thin Tungsten Film With Low Resistivity And Robust Micro-adhesion Characteristics
App 20100159694 - Chandrashekar; Anand ; et al. | 2010-06-24 |
Methods For Depositing Tungsten Films Having Low Resistivity For Gapfill Applications
App 20100144140 - Chandrashekar; Anand ; et al. | 2010-06-10 |
Filling structures of high aspect ratio elements for growth amplification and device fabrication
App 20100119708 - Overzet; Lawrence J. ; et al. | 2010-05-13 |
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