loadpatents
Patent applications and USPTO patent grants for Chandrachood; Madhavi.The latest application filed is for "method and apparatus for photomask plasma etching".
Patent | Date |
---|---|
Method for etching EUV material layers utilized to form a photomask Grant 8,778,574 - Yu , et al. July 15, 2 | 2014-07-15 |
Method And Apparatus For Photomask Plasma Etching App 20140190632 - KUMAR; Ajay ;   et al. | 2014-07-10 |
Method For Etching A Molybdenum Layer Suitable For Photomask Fabrication App 20130040231 - Chandrachood; Madhavi ;   et al. | 2013-02-14 |
Method for etching a molybdenum layer suitable for photomask fabrication Grant 8,293,430 - Chandrachood , et al. October 23, 2 | 2012-10-23 |
Method for plasma etching a chromium layer suitable for photomask fabrication Grant 7,829,243 - Chen , et al. November 9, 2 | 2010-11-09 |
Method for photomask plasma etching using a protected mask Grant 7,790,334 - Chandrachood , et al. September 7, 2 | 2010-09-07 |
Method And Apparatus For Photomask Plasma Etching App 20070017898 - Kumar; Ajay ;   et al. | 2007-01-25 |
Planarized copper cleaning for reduced defects Grant 7,104,267 - Emami , et al. September 12, 2 | 2006-09-12 |
Method for photomask plasma etching using a protected mask App 20060166106 - Chandrachood; Madhavi ;   et al. | 2006-07-27 |
Method for etching a molybdenum layer suitable for photomask fabrication App 20060166108 - Chandrachood; Madhavi ;   et al. | 2006-07-27 |
Method for plasma etching a chromium layer suitable for photomask fabrication App 20060166107 - Chen; Xiaoyi ;   et al. | 2006-07-27 |
Method and apparatus for photomask plasma etching App 20060000802 - Kumar; Ajay ;   et al. | 2006-01-05 |
Backside etching in a scrubber Grant 6,921,494 - Brown , et al. July 26, 2 | 2005-07-26 |
Backside etching in a scrubber App 20030209255 - Brown, Brian J. ;   et al. | 2003-11-13 |
Multi-fluid polishing process Grant 6,572,453 - Wijekoon , et al. June 3, 2 | 2003-06-03 |
Groove cleaning device for chemical-mechanical polishing Grant 6,371,836 - Brown , et al. April 16, 2 | 2002-04-16 |
Method For Cleaning Semiconductor Wafer Having Copper Structure Formed Thereon App 20010052351 - BROWN, BRIAN J. ;   et al. | 2001-12-20 |
Scrubber operation App 20010035197 - Brown, Brian J. ;   et al. | 2001-11-01 |
Planarized copper cleaning for reduced defects App 20010015345 - Emami, Ramin ;   et al. | 2001-08-23 |
Method and apparatus for reducing particle contamination during wafer transport Grant 6,192,601 - Ghanayem , et al. February 27, 2 | 2001-02-27 |
Methods and apparatus for reducing particle contamination during wafer transport Grant 6,106,634 - Ghanayem , et al. August 22, 2 | 2000-08-22 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.