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Methods For Making Silicon Containing Films That Have High Carbon Content App 20220145453 - Lei; Xinjian ;   et al. | 2022-05-12 |
Compositions And Processes For Depositing Carbon-doped Silicon-containing Films App 20220041870 - XIAO; MANCHAO ;   et al. | 2022-02-10 |
Composition And Methods Using Same For Carbon Doped Silicon Containing Films App 20220037151 - CHANDRA; HARIPIN ;   et al. | 2022-02-03 |
Organoaminosilane Precursors And Methods For Depositing Films Comprising Same App 20210407793 - O'NEILL; MARK LEONARD ;   et al. | 2021-12-30 |
Compositions and methods using same for carbon doped silicon containing films Grant 11,152,206 - Chandra , et al. October 19, 2 | 2021-10-19 |
Organoaminosilane precursors and methods for depositing films comprising same Grant 11,139,162 - O'Neill , et al. October 5, 2 | 2021-10-05 |
High temperature atomic layer deposition of silicon oxide thin films Grant 10,991,571 - Chandra , et al. April 27, 2 | 2021-04-27 |
Methods for making silicon and nitrogen containing films Grant 10,985,010 - Chandra , et al. April 20, 2 | 2021-04-20 |
Deposition Of Carbon Doped Silicon Oxide App 20200248309 - Kind Code | 2020-08-06 |
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films App 20200203155 - Chandra; Haripin ;   et al. | 2020-06-25 |
Methods For Making Silicon Containing Films That Have High Carbon Content App 20200071819 - Lei; Xinjian ;   et al. | 2020-03-05 |
Methods For Making Silicon And Nitrogen Containing Films App 20200075312 - Chandra; Haripin ;   et al. | 2020-03-05 |
Organoaminosilane Precursors And Methods For Depositing Films Comprising Same App 20200051811 - O'Neill; Mark Leonard ;   et al. | 2020-02-13 |
Organoaminosilane precursors and methods for depositing films comprising same Grant 10,460,929 - O'Neill , et al. Oc | 2019-10-29 |
Organoaminosilane precursors and methods for depositing films comprising same Grant 10,453,675 - O'Neill , et al. Oc | 2019-10-22 |
Compositions and Processes for Depositing Carbon-Doped Silicon-Containing Films App 20190287798 - Xiao; Manchao ;   et al. | 2019-09-19 |
High Temperature Atomic Layer Deposition of Silicon Oxide Thin Films App 20190189431 - Chandra; Haripin ;   et al. | 2019-06-20 |
Compositions and processes for depositing carbon-doped silicon-containing films Grant 10,319,584 - Xiao , et al. | 2019-06-11 |
Methods for depositing films with organoaminodisilane precursors Grant 10,283,350 - Xiao , et al. | 2019-05-07 |
High temperature atomic layer deposition of silicon-containing films Grant 10,283,348 - Wang , et al. | 2019-05-07 |
High temperature atomic layer deposition of silicon oxide thin films Grant 10,242,864 - Chandra , et al. | 2019-03-26 |
Compositions and methods using same for carbon doped silicon containing films Grant 10,145,008 - Chandra , et al. De | 2018-12-04 |
Methods for Depositing Films with Organoaminodisilane Precursors App 20180294152 - Xiao; Manchao ;   et al. | 2018-10-11 |
Organoaminodisilane precursors and methods for depositing films comprising same Grant 10,077,364 - Mayorga , et al. September 18, 2 | 2018-09-18 |
Methods for depositing films with organoaminodisilane precursors Grant 9,997,350 - Xiao , et al. June 12, 2 | 2018-06-12 |
Organoaminodisilane precursors and methods for depositing films comprising same Grant 9,978,585 - Xiao , et al. May 22, 2 | 2018-05-22 |
Methods for depositing silicon nitride films Grant 9,905,415 - Chandra , et al. February 27, 2 | 2018-02-27 |
Compositions and Methods Using Same for Carbon Doped Silicon Containing Films App 20180033614 - Chandra; Haripin ;   et al. | 2018-02-01 |
Compositions And Methods Using Same For Carbon Doped Silicon Containing Films App 20180023192 - Chandra; Haripin ;   et al. | 2018-01-25 |
High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films App 20170256399 - Chandra; Haripin ;   et al. | 2017-09-07 |
High Temperature Atomic Layer Deposition of Silicon-Containing Films App 20170207082 - Wang; Meiliang ;   et al. | 2017-07-20 |
Organoaminosilane Precursors and Methods for Depositing Films Comprising Same App 20170207084 - O'Neill; Mark Leonard ;   et al. | 2017-07-20 |
Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same App 20170183502 - Mayorga; Steven Gerard ;   et al. | 2017-06-29 |
Methods for Depositing Films with Organoaminodisilane Precursors App 20170186605 - Xiao; Manchao ;   et al. | 2017-06-29 |
Organoaminodisilane precursors and methods for depositing films comprising same Grant 9,627,193 - Mayorga , et al. April 18, 2 | 2017-04-18 |
Methods for depositing films with organoaminodisilane precursors Grant 9,613,799 - Xiao , et al. April 4, 2 | 2017-04-04 |
High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films App 20160365244 - Chandra; Haripin ;   et al. | 2016-12-15 |
Compositions and Processes for Depositing Carbon-Doped Silicon-Containing Films App 20160351389 - Xiao; Manchao ;   et al. | 2016-12-01 |
High temperature atomic layer deposition of silicon oxide thin films Grant 9,460,912 - Chandra , et al. October 4, 2 | 2016-10-04 |
Compositions and processes for depositing carbon-doped silicon-containing films Grant 9,447,287 - Xiao , et al. September 20, 2 | 2016-09-20 |
Methods For Depositing Films With Organoaminodisilane Precursors App 20160203975 - Xiao; Manchao ;   et al. | 2016-07-14 |
Methods for depositing films with organoaminodisilane precursors Grant 9,337,018 - Xiao , et al. May 10, 2 | 2016-05-10 |
Alkoxyaminosilane compounds and applications thereof Grant 9,200,167 - Spence , et al. December 1, 2 | 2015-12-01 |
Compositions And Methods For The Deposition Of Silicon Oxide Films App 20150275355 - Mallikarjunan; Anupama ;   et al. | 2015-10-01 |
Organoaminosilane precursors and methods for making and using same Grant 9,005,719 - Xiao , et al. April 14, 2 | 2015-04-14 |
Halogenated organoaminosilane precursors and methods for depositing films comprising same Grant 8,993,072 - Xiao , et al. March 31, 2 | 2015-03-31 |
Organoaminosilane Precursors And Methods For Depositing Films Comprising Same App 20150087139 - O'Neill; Mark Leonard ;   et al. | 2015-03-26 |
Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same App 20150024608 - Mayorga; Steven Gerard ;   et al. | 2015-01-22 |
Compositions And Processes For Depositing Carbon-doped Silicon-containing Films App 20140287164 - Xiao; Manchao ;   et al. | 2014-09-25 |
Organoaminosilane Precursors And Methods For Making And Using Same App 20140272194 - Xiao; Manchao ;   et al. | 2014-09-18 |
Organoaminosilane precursors and methods for making and using same Grant 8,771,807 - Xiao , et al. July 8, 2 | 2014-07-08 |
Organoaminodisilane Precursors And Methods For Depositing Films Comprising Same App 20130319290 - Xiao; Manchao ;   et al. | 2013-12-05 |
Organoaminodisilane Precursors And Methods For Depositing Films Comprising Same App 20130323435 - Xiao; Manchao ;   et al. | 2013-12-05 |
High Temperature Atomic Layer Deposition Of Silicon Oxide Thin Films App 20130295779 - Chandra; Haripin ;   et al. | 2013-11-07 |
Alkoxyaminosilane Compounds And Applications Thereof App 20130196082 - Spence; Daniel P. ;   et al. | 2013-08-01 |
Organoaminosilane Precursors And Methods For Making And Using Same App 20130129940 - Xiao; Manchao ;   et al. | 2013-05-23 |
Halogenated Organoaminosilane Precursors And Methods For Depositing Films Comprising Same App 20130078392 - Xiao; Manchao ;   et al. | 2013-03-28 |