Patent | Date |
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Attachment of nano-objects to beam-deposited structures Grant 10,501,851 - Kianinia , et al. Dec | 2019-12-10 |
Charged particle beam-induced etching Grant 10,103,008 - Chandler October 16, 2 | 2018-10-16 |
Attachment Of Nano-objects To Beam-deposited Structures App 20170327951 - Kianinia; Mehran ;   et al. | 2017-11-16 |
Gas injection system with precursor for planar deprocessing of semiconductor devices using a focused ion beam Grant 9,761,467 - Rue , et al. September 12, 2 | 2017-09-12 |
Lamella creation method and device using fixed-angle beam and rotating sample stage Grant 9,733,164 - Wells , et al. August 15, 2 | 2017-08-15 |
Charged Particle Beam-induced Etching App 20170200589 - Chandler; Clive D. | 2017-07-13 |
Adaptive Control For Charged Particle Beam Processing App 20170002467 - Straw; Marcus ;   et al. | 2017-01-05 |
Multi-source plasma focused ion beam system Grant 9,401,262 - Smith , et al. July 26, 2 | 2016-07-26 |
Beam-induced deposition of low-resistivity material Grant 9,334,568 - Randolph , et al. May 10, 2 | 2016-05-10 |
Beam-induced Deposition Of Low-resistivity Material App 20160010211 - Randolph; Steven ;   et al. | 2016-01-14 |
Multi-Source Plasma Focused Ion Beam System App 20150318140 - Smith; Noel ;   et al. | 2015-11-05 |
Gas Injection System With Precursor For Planar Deprocessing Of Semiconductor Devices Using A Focused Ion Beam App 20150294885 - Rue; Chad ;   et al. | 2015-10-15 |
Gas delivery for beam processing systems Grant 9,150,961 - Chandler , et al. October 6, 2 | 2015-10-06 |
Beam-induced deposition of low-resistivity material Grant 9,090,973 - Randolph , et al. July 28, 2 | 2015-07-28 |
Environmental scanning electron microscope (ESEM/SEM) gas injection apparatus with anode integrated with gas concentrating structure Grant 9,070,533 - Castagna , et al. June 30, 2 | 2015-06-30 |
Precursor for planar deprocessing of semiconductor devices using a focused ion beam Grant 9,064,811 - Rue , et al. June 23, 2 | 2015-06-23 |
Multi-source plasma focused ion beam system Grant 9,029,812 - Smith , et al. May 12, 2 | 2015-05-12 |
Charged-Particle-Beam Processing Using a Cluster Source App 20150079796 - Chandler; Clive D. ;   et al. | 2015-03-19 |
Precursor for Planar Deprocessing of Semiconductor Devices using a Focused Ion Beam App 20140357088 - Rue; Chad ;   et al. | 2014-12-04 |
Multi-source Plasma Focused Ion Beam System App 20140312245 - Smith; Noel ;   et al. | 2014-10-23 |
High selectivity, low damage electron-beam delineation etch Grant 8,778,804 - Randolph , et al. July 15, 2 | 2014-07-15 |
Multi-source plasma focused ion beam system Grant 8,692,217 - Smith , et al. April 8, 2 | 2014-04-08 |
Environmental SEM Gas Injection System App 20140034830 - Castagna; Marc ;   et al. | 2014-02-06 |
Lamella creation method and device using fixed-angle beam and rotating sample stage App 20130328246 - Wells; Andrew B. ;   et al. | 2013-12-12 |
Multi-source Plasma Focused Ion Beam System App 20130309421 - Smith; Noel ;   et al. | 2013-11-21 |
Localized plasma processing Grant 8,530,006 - Chandler , et al. September 10, 2 | 2013-09-10 |
Multi-source plasma focused ion beam system Grant 8,405,054 - Smith , et al. March 26, 2 | 2013-03-26 |
Forming conductive features of electronic devices Grant 8,333,820 - Hampden-Smith , et al. December 18, 2 | 2012-12-18 |
Beam-Induced Deposition of Low-Resistivity Material App 20120308740 - Randolph; Steven ;   et al. | 2012-12-06 |
Multi-Source Plasma Focused Ion Beam System App 20120080407 - Smith; Noel ;   et al. | 2012-04-05 |
Localized plasma processing Grant 8,087,379 - Chandler , et al. January 3, 2 | 2012-01-03 |
Multi-source plasma focused ion beam system Grant 8,076,650 - Smith , et al. December 13, 2 | 2011-12-13 |
Forming Conductive Features Of Electronic Devices App 20110162873 - Hampden-Smith; Mark J. ;   et al. | 2011-07-07 |
Gas Delivery For Beam Processing Systems App 20110114665 - CHANDLER; CLIVE D. ;   et al. | 2011-05-19 |
Localized Plasma Processing App 20110117748 - Chandler; Clive D. ;   et al. | 2011-05-19 |
Aerosol Method And Apparatus, Particulate Products, And Electronic Devices Made Therefrom App 20100230841 - Hampden-Smith; Mark J. ;   et al. | 2010-09-16 |
High Selectivity, Low Damage Electron-beam Delineation Etch App 20100197142 - RANDOLPH; STEVEN ;   et al. | 2010-08-05 |
Coated nickel-containing powders Grant 7,727,630 - Kodas , et al. June 1, 2 | 2010-06-01 |
Multi-source Plasma Focused Ion Beam System App 20090309018 - Smith; Noel ;   et al. | 2009-12-17 |
Aerosol method and apparatus, particulate products, and electronic devices made therefrom Grant 7,632,331 - Hampden-Smith , et al. December 15, 2 | 2009-12-15 |
Copper powders methods for producing powders and devices fabricated from same Grant 7,625,420 - Kodas , et al. December 1, 2 | 2009-12-01 |
Palladium-containing particles, method and apparatus of manufacturing palladium-containing devices made therefrom Grant 7,599,165 - Hampden-Smith , et al. October 6, 2 | 2009-10-06 |
Aerosol method and apparatus, particulate products, and electronic devices made therefrom Grant 7,582,134 - Hampden-Smith , et al. September 1, 2 | 2009-09-01 |
Aerosol method and apparatus, particulate products, and electronic devices made therefrom Grant 7,553,433 - Hampden-Smith , et al. June 30, 2 | 2009-06-30 |
Coated Nickel-containing Powders App 20080233422 - Kodas; Toivo T. ;   et al. | 2008-09-25 |
Coated nickel-containing powders, methods and apparatus for producing such powders and devices fabricated from same Grant 7,384,447 - Kodas , et al. June 10, 2 | 2008-06-10 |
Coated silver-containing particles, method and apparatus of manufacture, and silver-containing devices made therefrom Grant 7,354,471 - Hampden-Smith , et al. April 8, 2 | 2008-04-08 |
Copper powders methods for producing powders and devices fabricated from same Grant 7,316,725 - Kodas , et al. January 8, 2 | 2008-01-08 |
Palladium-containing Particles, Method And Apparatus Of Manufacturing Palladium-containing Devices Made Therefrom App 20070275260 - Hampden-Smith; Mark J. ;   et al. | 2007-11-29 |
Aerosol Method And Apparatus, Particulate Products, And Electronic Devices Made Therefrom App 20070256517 - Hampden-Smith; Mark J. ;   et al. | 2007-11-08 |
Aerosol Method And Apparatus, Particulate Products, And Electronic Devices Made Therefrom App 20070257388 - Hampden-Smith; Mark J. ;   et al. | 2007-11-08 |
Aerosol Method And Apparatus, Particulate Products, And Electronic Devices Made Therefrom App 20070204724 - Hampden-Smith; Mark J. ;   et al. | 2007-09-06 |
Silver-containing particles, method and apparatus of manufacture, silver-containing devices made therefrom App 20070122549 - Hampden-Smith; Mark J. ;   et al. | 2007-05-31 |
Silver-containing particles, method and apparatus of manufacture, silver-containing devices made therefrom App 20070104605 - Hampden-Smith; Mark J. ;   et al. | 2007-05-10 |
Palladium-containing particles, method and apparatus of manufacture, palladium-containing devices made therefrom Grant 7,172,663 - Hampden-Smith , et al. February 6, 2 | 2007-02-06 |
Aerosol method and apparatus, particulate products, and electronic devices made therefrom Grant 7,128,852 - Hampden-Smith , et al. October 31, 2 | 2006-10-31 |
Nickel powders, methods for producing powders and devices fabricated from same Grant 7,097,686 - Chandler , et al. August 29, 2 | 2006-08-29 |
Aerosol method and apparatus, particulate products, and electronic devices made therefrom Grant 7,087,198 - Hampden-Smith , et al. August 8, 2 | 2006-08-08 |
Aerosol method and apparatus, coated particulate products, and electronic devices made therefrom Grant 7,083,747 - Hampden-Smith , et al. August 1, 2 | 2006-08-01 |
Gold powders, methods for producing powders and devices fabricated from same Grant 7,077,882 - Kodas , et al. July 18, 2 | 2006-07-18 |
Localized plasma processing App 20060045987 - Chandler; Clive D. ;   et al. | 2006-03-02 |
Method for making a film from silver-containing particles Grant 7,004,994 - Hampden-Smith , et al. February 28, 2 | 2006-02-28 |
Nickel Powders, Methods For Producing Powders And Devices Fabricated From Same App 20050262966 - Chandler, Clive D. ;   et al. | 2005-12-01 |
Shaped and low density focused ion beams Grant 6,949,756 - Gerlach , et al. September 27, 2 | 2005-09-27 |
Aerosol Method And Apparatus, Particulate Products, And Electronic Devices Made Therefrom App 20050116369 - Hampden-Smith, Mark J. ;   et al. | 2005-06-02 |
Coated Copper-containing Powders, Methods And Apparatus For Producing Such Powders, And Copper-containing Devices Fabricated From Same App 20050097987 - Kodas, Toivo T. ;   et al. | 2005-05-12 |
Coated Nickel-containing Powders, Methods And Apparatus For Producing Such Powders And Devices Fabricated From Same App 20050097988 - Kodas, Toivo T. ;   et al. | 2005-05-12 |
Aerosol Method And Apparatus, Coated Particulate Products, And Electronic Devices Made Therefrom App 20050100666 - Hampden-Smith, Mark J. ;   et al. | 2005-05-12 |
Aerosol method and apparatus, particulate products, and electronic devices made therefrom App 20050079349 - Hampden-Smith, Mark J. ;   et al. | 2005-04-14 |
Coated silver-containing particles, method and apparatus of manufacture, and silver-containing devices made therefrom App 20050061107 - Hampden-Smith, Mark J. ;   et al. | 2005-03-24 |
Gold powders,methods for producing powders and devices fabricated from same App 20040265615 - Kodas, Toivo T. ;   et al. | 2004-12-30 |
Gold powders, methods for producing powders and devices fabricated from same Grant 6,830,823 - Kodas , et al. December 14, 2 | 2004-12-14 |
Palladium-containing particles, method and apparatus of manufacture, palladium-containing devices made therefrom App 20040247782 - Hampden-Smith, Mark J. ;   et al. | 2004-12-09 |
Silver-containing particles, method and apparatus of manufacture, silver-containing devices made therefrom App 20040231758 - Hampden-Smith, Mark J. ;   et al. | 2004-11-25 |
Copper powders methods for producing powders and devices fabricated from same App 20040139820 - Kodas, Toivo T. ;   et al. | 2004-07-22 |
Palladium-containing particles, method and apparatus of manufacture, palladium-containing devices made therefrom Grant 6,699,304 - Hampden-Smith , et al. March 2, 2 | 2004-03-02 |
Silver-containing particles, method and apparatus of manufacture, silver-containing devices made therefrom Grant 6,689,186 - Hampden-Smith , et al. February 10, 2 | 2004-02-10 |
Copper powders methods for producing powders and devices fabricated from same Grant 6,679,937 - Kodas , et al. January 20, 2 | 2004-01-20 |
Aerosol method and apparatus, particulate products, and electronic devices made therefrom Grant 6,635,348 - Hampden-Smith , et al. October 21, 2 | 2003-10-21 |
Aerosol method and apparatus, particulate products, and electronic devices made therefrom Grant 6,338,809 - Hampden-Smith , et al. January 15, 2 | 2002-01-15 |
Shaped and low density focused ion beams App 20010045525 - Gerlach, Robert L. ;   et al. | 2001-11-29 |
Nickel powders, methods for producing powders and devices fabricated from same Grant 6,316,100 - Kodas , et al. November 13, 2 | 2001-11-13 |
Method for making silver-containing particles Grant 6,277,169 - Hampden-Smith , et al. August 21, 2 | 2001-08-21 |
Method and apparatus for selective in-situ etching of inter dielectric layers Grant 6,268,608 - Chandler July 31, 2 | 2001-07-31 |