Chan; Lana Hiului

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chan; Lana Hiului.The latest application filed is for "method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics".

Company Profile

0.14.10

Chan; Lana Hiului - Northborough MA US
Chan; Lana Hiului - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics Grant 8,409,987 - Chandrashekar , et al. April 2, 2	2013-04-02
Methods for growing low-resistivity tungsten for high aspect ratio and small features Grant 8,409,985 - Chan , et al. April 2, 2	2013-04-02
Method for improving uniformity and adhesion of low resistivity tungsten film Grant 8,329,576 - Chan , et al. December 11, 2	2012-12-11
Methods for improving uniformity and resistivity of thin tungsten films Grant 8,101,521 - Gao , et al. January 24, 2	2012-01-24
Method For Depositing Thin Tungsten Film With Low Resistivity And Robust Micro-adhesion Characteristics App 20120015518 - Chandrashekar; Anand ; et al.	2012-01-19
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics Grant 8,058,170 - Chandrashekar , et al. November 15, 2	2011-11-15
Methods for growing low-resistivity tungsten film Grant 8,048,805 - Chan , et al. November 1, 2	2011-11-01
Methods For Growing Low-resistivity Tungsten For High Aspect Ratio And Small Features App 20110223763 - Chan; Lana Hiului ; et al.	2011-09-15
Methods for growing low-resistivity tungsten for high aspect ratio and small features Grant 7,955,972 - Chan , et al. June 7, 2	2011-06-07
Method For Improving Uniformity And Adhesion Of Low Resistivity Tungsten Film App 20100273327 - Chan; Lana Hiului ; et al.	2010-10-28
Method for improving uniformity and adhesion of low resistivity tungsten film Grant 7,772,114 - Chan , et al. August 10, 2	2010-08-10
Method For Depositing Thin Tungsten Film With Low Resistivity And Robust Micro-adhesion Characteristics App 20100159694 - Chandrashekar; Anand ; et al.	2010-06-24
Methods For Growing Low-resistivity Tungsten Film App 20100035427 - Chan; Lana Hiului ; et al.	2010-02-11
Methods for improving uniformity and resistivity of thin tungsten films Grant 7,655,567 - Gao , et al. February 2, 2	2010-02-02
Methods for growing low-resistivity tungsten film Grant 7,589,017 - Chan , et al. September 15, 2	2009-09-15
Method For Improving Uniformity And Adhesion Of Low Resistivity Tungsten Film App 20090149022 - Chan; Lana Hiului ; et al.	2009-06-11
Methods For Growing Low-resistivity Tungsten For High Aspect Ratio And Small Features App 20080254623 - Chan; Lana Hiului ; et al.	2008-10-16
Methods for growing low-resistivity tungsten film App 20080124926 - Chan; Lana Hiului ; et al.	2008-05-29
Method of forming low-resistivity tungsten interconnects Grant 7,262,125 - Wongsenakhum , et al. August 28, 2	2007-08-28
Method for reducing tungsten film roughness and improving step coverage Grant 7,141,494 - Lee , et al. November 28, 2	2006-11-28
Method for reducing tungsten film roughness and improving step coverage App 20050031786 - Lee, Sang-Hyeob ; et al.	2005-02-10
Method of forming low-resistivity tungsten interconnects App 20040202786 - Wongsenakhum, Panya ; et al.	2004-10-14

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