Chan; Elvis M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chan; Elvis M..The latest application filed is for "cmp wafer contamination reduced by insitu clean".
- Chan; Elvis M. - Rocklin CA
| Patent | Date |
|---|---|
| Metal capping of damascene structures to improve reliability using hyper selective chemical-mechanical deposition Grant 7,795,150 - Chan , et al. September 14, 2 | 2010-09-14 |
| CMP wafer contamination reduced by insitu clean Grant 7,344,989 - Withers , et al. March 18, 2 | 2008-03-18 |
| CMP wafer contamination reduced by insitu clean App 20070039927 - Withers; Bradley S. ; et al. | 2007-02-22 |
| Metal capping of damascene structures to improve reliability using hyper selective chemical-mechanical deposition App 20060115976 - Chan; Elvis M. ; et al. | 2006-06-01 |
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