Patent | Date |
---|
Method and Systems Useful for Producing Aluminum Ions App 20220108863 - TANG; Ying ;   et al. | 2022-04-07 |
Fluorinated Compositions For Ion Source Performance Improvements In Nitrogen Ion Implantation App 20220044908 - CHAMBERS; Barry Lewis ;   et al. | 2022-02-10 |
Carbon dopant gas and co-flow for implant beam and source life performance improvement Grant 10,354,877 - Byl , et al. July 16, 2 | 2019-07-16 |
Phosphorus Or Arsenic Ion Implantation Utilizing Enhanced Source Techniques App 20190103275 - Byl; Oleg ;   et al. | 2019-04-04 |
Ion implanter comprising integrated ventilation system Grant 10,229,840 - Olander , et al. | 2019-03-12 |
Phosphorus or arsenic ion implantation utilizing enhanced source techniques Grant 10,109,488 - Byl , et al. October 23, 2 | 2018-10-23 |
Carbon Dopant Gas And Co-flow For Implant Beam And Source Life Performance Improvement App 20180211839 - Byl; Oleg ;   et al. | 2018-07-26 |
Anti-spike Pressure Management Of Pressure-regulated Fluid Storage And Delivery Vessels App 20180180225 - Despres; Joseph R. ;   et al. | 2018-06-28 |
Gas Cabinets App 20180149315 - DESPRES; Joseph R. ;   et al. | 2018-05-31 |
Valve Assemblies And Fluid Storage And Dispensing Packages Comprising Same App 20180119888 - ELZER; Daneil ;   et al. | 2018-05-03 |
Carbon dopant gas and co-flow for implant beam and source life performance improvement Grant 9,960,042 - Byl , et al. May 1, 2 | 2018-05-01 |
Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels Grant 9,897,257 - Despres , et al. February 20, 2 | 2018-02-20 |
Ion Implanter Comprising Integrated Ventilation System App 20170338130 - OLANDER; Karl W. ;   et al. | 2017-11-23 |
Fluorinated compositions for ion source performance improvements in nitrogen ion implantation App 20170330726 - Chambers; Barry Lewis ;   et al. | 2017-11-16 |
Phosphorus Or Arsenic Ion Implantation Utilizing Enhanced Source Techniques App 20170250084 - Byl; Oleg ;   et al. | 2017-08-31 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 9,685,304 - Kaim , et al. June 20, 2 | 2017-06-20 |
Carbon Dopant Gas And Co-flow For Implant Beam And Source Life Performance Improvement App 20160020102 - Byl; Oleg ;   et al. | 2016-01-21 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20160013018 - Kaim; Robert ;   et al. | 2016-01-14 |
Ion Implantation System And Method App 20150357152 - Jones; Edward E. ;   et al. | 2015-12-10 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 9,142,387 - Kaim , et al. September 22, 2 | 2015-09-22 |
Anti-spike Pressure Management Of Pressure-regulated Fluid Storage And Delivery Vessels App 20150247605 - Despres; Joseph R. ;   et al. | 2015-09-03 |
Ion implantation system and method Grant 9,111,860 - Jones , et al. August 18, 2 | 2015-08-18 |
Ion Implantation System And Method App 20140342538 - Jones; Edward E. ;   et al. | 2014-11-20 |
Ion implantation system and method Grant 8,796,131 - Jones , et al. August 5, 2 | 2014-08-05 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20140090598 - Kaim; Robert ;   et al. | 2014-04-03 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 8,598,022 - Kaim , et al. December 3, 2 | 2013-12-03 |
Ion Implantation System And Method App 20120252195 - Jones; Edward E. ;   et al. | 2012-10-04 |
Ion Implantation Tool Cleaning Apparatus And Method App 20120111374 - Despres; Joseph R. ;   et al. | 2012-05-10 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20120108044 - Kaim; Robert ;   et al. | 2012-05-03 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 8,138,071 - Kaim , et al. March 20, 2 | 2012-03-20 |
Isotopically-enriched boron-containing compounds, and methods of making and using same Grant 8,062,965 - Kaim , et al. November 22, 2 | 2011-11-22 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20110159671 - KAIM; Robert ;   et al. | 2011-06-30 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same App 20110097882 - Kaim; Robert ;   et al. | 2011-04-28 |