Chae; Seung-Ki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Chae; Seung-Ki.The latest application filed is for "semiconductor devices and methods of manufacturing the same".

Company Profile

0.28.46

Chae; Seung-Ki - Seoul KR
Chae; Seung-Ki - Suwon N/A KR
Chae; Seung-Ki - Soul KR
Chae, Seung-Ki - Suwon-city KR
Chae, Seung-Ki - Seoul-city KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Semiconductor devices and methods of manufacturing the same Grant 8,455,359 - Kim , et al. June 4, 2	2013-06-04
Etching apparatus and etching method Grant 8,361,274 - Lee , et al. January 29, 2	2013-01-29
Semiconductor Devices And Methods Of Manufacturing The Same App 20120196439 - KIM; Kook-Joo ; et al.	2012-08-02
Plating Method Using Analysis Photoresist Residue In Plating Solution App 20120183696 - Park; Jung-Dae ; et al.	2012-07-19
Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaft Grant 8,083,507 - Park , et al. December 27, 2	2011-12-27
Method of cleaning a quartz part Grant 7,985,297 - Park , et al. July 26, 2	2011-07-26
Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus Grant 7,976,785 - Chae , et al. July 12, 2	2011-07-12
Methods Of Manufacturing A Semiconductor Device Using Compositions For Etching Copper App 20110130000 - PARK; Jung-Dae ; et al.	2011-06-02
Methods of manufacturing a semiconductor device using compositions for etching copper Grant 7,951,653 - Park , et al. May 31, 2	2011-05-31
Composition for etching silicon oxide and method of forming a contact hole using the same App 20110073801 - Hwang; Dong-Won ; et al.	2011-03-31
Composition for etching silicon oxide and method of forming a contact hole using the same Grant 7,879,736 - Hwang , et al. February 1, 2	2011-02-01
Apparatus and method for analyzing contaminants on wafer Grant 7,880,138 - Lee , et al. February 1, 2	2011-02-01
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition Grant 7,687,448 - Park , et al. March 30, 2	2010-03-30
Composition For Removing A Photoresist, Method Of Preparing The Composition, Method Of Removing A Photoresist And Method Of Manufacturing A Semiconductor Device Using The Composition App 20100009885 - PARK; Jung-Dae ; et al.	2010-01-14
Method Of Cleaning A Quartz Part App 20100009883 - PARK; Jung-Dae ; et al.	2010-01-14
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition Grant 7,608,540 - Park , et al. October 27, 2	2009-10-27
Laser cleaning of backside of wafer for photolithographic processing Grant 7,556,712 - Yi , et al. July 7, 2	2009-07-07
Etching method Grant 7,497,963 - Lee , et al. March 3, 2	2009-03-03
Method and apparatus for pump fault prediction App 20080294382 - Lim; Ki-hwan ; et al.	2008-11-27
Rotation Body Cleaning Unit And Vacuum Pump Having The Same App 20080226485 - PARK; Tea-Jin ; et al.	2008-09-18
Method and apparatus for exposing semiconductor substrates Grant 7,417,709 - Lee , et al. August 26, 2	2008-08-26
Apparatus And Method For Analyzing Contaminants On Wafer App 20080149827 - LEE; Jae-Seok ; et al.	2008-06-26
Composition For Etching Silicon Oxide And Method Of Forming A Contact Hole Using The Same App 20080121622 - HWANG; Dong-Won ; et al.	2008-05-29
Method of processing an object and method of controlling processing apparatus to prevent contamination of the object Grant 7,335,601 - Han , et al. February 26, 2	2008-02-26
Compositions For Cleaning A Probe Card And Methods Of Cleaning A Probe Card Using The Same App 20080000502 - PARK; Jung-Dae ; et al.	2008-01-03
Method Of Exposing A Wafer To A Light, And Reticle, Reticle Assembly And Exposing Apparatus For Performing The Same App 20070263194 - Park; Byong-Cheol ; et al.	2007-11-15
Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus App 20070212275 - Chae; Seung-ki ; et al.	2007-09-13
Method of exposing a wafer to a light, and reticle, reticle assembly and exposing apparatus for performing the same Grant 7,265,818 - Park , et al. September 4, 2	2007-09-04
Apparatus And Method For Manufacturing Semiconductor Devices App 20070157414 - YI; Hun-Jung ; et al.	2007-07-12
Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus Grant 7,232,552 - Chae , et al. June 19, 2	2007-06-19
Apparatus for treating substrates with phosphoric acid solution and method for regenerating the phosphoric acid solution employed therein App 20070102023 - Yi; Hun-jung ; et al.	2007-05-10
Ion implanters having an arc chamber that affects ion current density Grant 7,170,070 - Kwon , et al. January 30, 2	2007-01-30
Cleaning composition and related methods App 20070000523 - Kim; Se-Yeon ; et al.	2007-01-04
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition App 20060287207 - Park; Jung-Dae ; et al.	2006-12-21
Ion implanting apparatus and ion implanting method using the same Grant 7,112,810 - Keum , et al. September 26, 2	2006-09-26
Method of forming layers on substrates using microwave energy and apparatus for performing the same App 20060175304 - Hwang; Wan-Goo ; et al.	2006-08-10
Apparatus for supplying gas and apparatus for forming a layer having the same App 20060169201 - Hwang; Wan-Goo ; et al.	2006-08-03
Method of manufacturing a semiconductor device and method of manufacturing a thin layer using the same App 20060121737 - Han; Jae-Hyun ; et al.	2006-06-08
Methods and apparatus for forming a titanium nitride layer App 20060110533 - Hwang; Wan-Goo ; et al.	2006-05-25
Methods and apparatus for forming a titanium nitride layer App 20060110534 - Hwang; Wan-Goo ; et al.	2006-05-25
Method of processing an object and method of controlling processing apparatus to prevent contamination of the object App 20060102588 - Han; Jae-Hyun ; et al.	2006-05-18
Gas delivery system for supplying gas to semiconductor manufacturing equipment Grant 7,040,336 - Kim , et al. May 9, 2	2006-05-09
Ion implanters having an arc chamber that affects ion current density App 20060060797 - Kwon; Ui-hui ; et al.	2006-03-23
Method and apparatus for exposing semiconductor substrates App 20060001852 - Lee; Sang-Ho ; et al.	2006-01-05
Substrate manufacturing apparatus and substrate transfer module used therein App 20050220576 - Kim, Ki-Sang ; et al.	2005-10-06
Robot arm mechanism App 20050217053 - Kim, Ki-Sang ; et al.	2005-10-06
Etching method App 20050153553 - Lee, Kwang-Myung ; et al.	2005-07-14
Etching apparatus and etching method App 20050150861 - Lee, Kwang-Myung ; et al.	2005-07-14
Method of exposing a wafer to a light, and reticle, reticle assembly and exposing apparatus for performing the same App 20050140952 - Park, Byong-Cheol ; et al.	2005-06-30
Method of supplying slurry and a slurry supply apparatus having a mixing unit at a point of use Grant 6,910,954 - Kim , et al. June 28, 2	2005-06-28
Ion implanting apparatus and ion implanting method using the same App 20050133737 - Keum, Gyeong-Su ; et al.	2005-06-23
Endpoint detector for a substrate manufacturing process App 20050127192 - Kang, Hyun-Kyu ; et al.	2005-06-16
Method for processing a wafer and apparatus for performing the same App 20050130451 - Lee, Kwang-Myung ; et al.	2005-06-16
Multi-chamber system App 20050111936 - Kim, Ki-Sang ; et al.	2005-05-26
Plasma chemical vapor deposition apparatus having an improved nozzle configuration App 20050092245 - Moon, Ahn-Sik ; et al.	2005-05-05
Wafer transfer apparatus App 20050095111 - Kim, Ki-Sang ; et al.	2005-05-05
Antenna for use in producing plasma and plasma processing apparatus comprising the same App 20050087139 - Kim, Woo-Seok ; et al.	2005-04-28
Method for processing a wafer and apparatus for performing the same Grant 6,869,500 - Lee , et al. March 22, 2	2005-03-22
Chemical vapor deposition processing equipment for use in fabricating a semiconductor device App 20050022742 - Hong, Hyung-Sik ; et al.	2005-02-03
Method of cleaning a deposition chamber and apparatus for depositing a metal on a substrate App 20040222188 - Kim, Woo-Seok ; et al.	2004-11-11
Apparatus and method for supplying chemicals in chemical mechanical polishing systems Grant 6,814,835 - Kim , et al. November 9, 2	2004-11-09
Apparatus and method for supplying chemicals in chemical mechanical polishing systems App 20040173307 - Kim, Seung-un ; et al.	2004-09-09
Gas delivery system for supplying gas to semiconductor manufacturing equipment App 20040123907 - Kim, Yu-Kweon ; et al.	2004-07-01
Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus App 20030201168 - Chae, Seung-ki ; et al.	2003-10-30
Method and apparatus for reducing PFC emission during semiconductor manufacture Grant 6,602,323 - Chae , et al. August 5, 2	2003-08-05
Method of supplying slurry and a slurry supply apparatus having a mixing unit at a point of use App 20030100247 - Kim, Sue-Ryeon ; et al.	2003-05-29
Apparatus and method for supplying chemicals in chemical mechanical polishing systems App 20030089456 - Kim, Seung-Un ; et al.	2003-05-15
Method for processing a wafer and apparatus for performing the same App 20030060030 - Lee, Kwang-Myung ; et al.	2003-03-27
Method and apparatus for reducing PFC emission during semiconductor manufacture App 20020134233 - Chae, Seung-Ki ; et al.	2002-09-26
Semiconductor device manufacturing apparatus employing vacuum system Grant 6,071,350 - Jeon , et al. June 6, 2	2000-06-06
Semiconductor device manufacturing system having means for reducing a pressure difference between loadlock and processing chambers Grant 6,039,770 - Yang , et al. March 21, 2	2000-03-21
Semiconductor device manufacturing apparatus employing vacuum system Grant 5,833,425 - Jeon , et al. November 10, 1	1998-11-10

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