Chacko; Andrea M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Chacko; Andrea M..The latest application filed is for "chemically homogeneous silicon hardmasks for lithography".
- Chacko; Andrea M. - Rolla MO
| Patent | Date |
|---|---|
| Chemically Homogeneous Silicon Hardmasks For Lithography App 20220195238 - Chacko; Reuben T. ; et al. | 2022-06-23 |
| Underlayers for EUV lithography Grant 11,361,967 - Liang , et al. June 14, 2 | 2022-06-14 |
| Underlayers For Euv Lithography App 20210057219 - Liang; Yichen ; et al. | 2021-02-25 |
| Adhesion Layers For Euv Lithography App 20190385837 - Chacko; Andrea M. ; et al. | 2019-12-19 |
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