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Patent applications and USPTO patent grants for Chacin; Juan M..The latest application filed is for "modular cvd epi 300mm reactor".
Patent | Date |
---|---|
High temperature anneal with improved substrate support Grant 7,704,327 - Waldhauer , et al. April 27, 2 | 2010-04-27 |
Modular Cvd Epi 300mm Reactor App 20080072820 - Burrows; Brian H. ;   et al. | 2008-03-27 |
High temperature anneal with improved substrate support App 20040060512 - Waldhauer, Ann P. ;   et al. | 2004-04-01 |
Substrate support assembly and processing apparatus Grant 6,344,631 - Chacin February 5, 2 | 2002-02-05 |
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