Patent | Date |
---|
Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system Grant 11,189,503 - Kim , et al. November 30, 2 | 2021-11-30 |
Dry Cleaning Apparatus And Dry Cleaning Method App 20210343552 - SHIN; Seung-Min ;   et al. | 2021-11-04 |
Dry cleaning apparatus and dry cleaning method Grant 11,087,996 - Shin , et al. August 10, 2 | 2021-08-10 |
Wafer Cleaning Apparatus And Wafer Cleaning Method Using The Same App 20210060625 - SHIN; Seung Min ;   et al. | 2021-03-04 |
Multi-chamber Apparatus App 20200343113 - CHOI; Yong Jun ;   et al. | 2020-10-29 |
Wafer Cleaning Equipment App 20200335361 - JANG; Hun Jae ;   et al. | 2020-10-22 |
Semiconductor Device Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device Using The Same App 20200251358 - Kind Code | 2020-08-06 |
Substrate Drying Method, Photoresist Developing Method, Photolithography Method Including The Same, And Substrate Drying System App 20200152486 - KIM; Young-Hoo ;   et al. | 2020-05-14 |
Dry Cleaning Apparatus And Dry Cleaning Method App 20200083063 - SHIN; Seung-Min ;   et al. | 2020-03-12 |
Wet Etching Apparatus App 20200075359 - LEE; JIN WOO ;   et al. | 2020-03-05 |
Methods of fabricating semiconductor devices including fin-shaped active regions Grant 10,424,503 - Youn , et al. Sept | 2019-09-24 |
Liquid Chemical Recycle System, Liquid Chemical Supply System, And Method Of Manufacturing Semiconductor Device Using The Liquid App 20190259641 - KIM; Young-Hoo ;   et al. | 2019-08-22 |
Methods of fabricating semiconductor devices including fin-shaped active regions Grant 10,090,190 - Youn , et al. October 2, 2 | 2018-10-02 |
Methods Of Fabricating Semiconductor Devices Including Fin-shaped Active Regions App 20180174889 - Youn; Young-Sang ;   et al. | 2018-06-21 |
Semiconductor device and method of fabricating the same Grant 9,972,683 - Kim , et al. May 15, 2 | 2018-05-15 |
Semiconductor device having fin and dual liner Grant 9,865,597 - Cha , et al. January 9, 2 | 2018-01-09 |
Methods Of Fabricating Semiconductor Devices Including Fin-shaped Active Regions App 20170301581 - Youn; Young-Sang ;   et al. | 2017-10-19 |
Semiconductor device and a fabricating method thereof Grant 9,735,156 - Cha August 15, 2 | 2017-08-15 |
Methods of fabricating semiconductor devices including fin-shaped active regions Grant 9,728,535 - Youn , et al. August 8, 2 | 2017-08-08 |
Semiconductor Device And A Fabricating Method Thereof App 20170213823 - CHA; JI-HOON | 2017-07-27 |
Semiconductor Device And Method Of Fabricating The Same App 20170117362 - KIM; DONG-KWON ;   et al. | 2017-04-27 |
Semiconductor device and method of fabricating the same Grant 9,627,514 - Kim , et al. April 18, 2 | 2017-04-18 |
Methods of manufacturing semiconductor devices Grant 9,613,811 - Baek , et al. April 4, 2 | 2017-04-04 |
Semiconductor Device Having Fin And Dual Liner App 20170069630 - CHA; Ji-Hoon ;   et al. | 2017-03-09 |
Semiconductor Devices Having Fin Field Effect Transistors With A Single Liner Pattern In A First Region And A Dual Liner Pattern In A Second Region And Methods For Manufacturing The Same App 20170053825 - SEO; KANG-ILL ;   et al. | 2017-02-23 |
Semiconductor device and method of fabricating the same Grant 9,461,148 - Park , et al. October 4, 2 | 2016-10-04 |
Methods Of Fabricating Semiconductor Devices Including Fin-shaped Active Regions App 20160181243 - Youn; Young-sang ;   et al. | 2016-06-23 |
Methods of fabricating semiconductor devices including fin-shaped active regions Grant 9,305,825 - Youn , et al. April 5, 2 | 2016-04-05 |
Method of fabricating semiconductor device Grant 9,136,135 - Baek , et al. September 15, 2 | 2015-09-15 |
Methods Of Manufacturing Semiconductor Devices App 20150162197 - BAEK; Jae-Jik ;   et al. | 2015-06-11 |
Semiconductor device and method of fabricating the same Grant 9,040,415 - Park , et al. May 26, 2 | 2015-05-26 |
Semiconductor Device And Method Of Fabricating The Same App 20150050793 - PARK; Sang-Jine ;   et al. | 2015-02-19 |
Methods of Fabricating Semiconductor Devices Including Fin-Shaped Active Regions App 20140227857 - YOUN; YOUNG-SANG ;   et al. | 2014-08-14 |
Semiconductor Device And Method Of Fabricating The Same App 20140220752 - PARK; Jae-Young ;   et al. | 2014-08-07 |
Methods of Fabricating Semiconductor Device Using Nitridation of Isolation Layers App 20140206169 - Cha; Ji Hoon ;   et al. | 2014-07-24 |
Integrated circuit capacitors having sidewall supports Grant 8,766,343 - Kang , et al. July 1, 2 | 2014-07-01 |
Method Of Fabricating Semiconductor Device App 20140080296 - BAEK; Jae-Jik ;   et al. | 2014-03-20 |
Transistor having a metal nitride layer pattern, etchant and methods of forming the same Grant 8,637,942 - Kim , et al. January 28, 2 | 2014-01-28 |
Method of fine patterning semiconductor device Grant 8,349,200 - Yi , et al. January 8, 2 | 2013-01-08 |
Integrated Circuit Capacitors Having Sidewall Supports App 20120112317 - Kang; Dae-Hyuk ;   et al. | 2012-05-10 |
Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby Grant 8,119,476 - Kang , et al. February 21, 2 | 2012-02-21 |
Method of Fine Patterning Semiconductor Device App 20110312183 - Yi; Shi-Yong ;   et al. | 2011-12-22 |
Method of fine patterning semiconductor device Grant 8,029,688 - Yi , et al. October 4, 2 | 2011-10-04 |
Methods of Forming Integrated Circuit Capacitors Having Sidewall Supports and Capacitors Formed Thereby App 20110159660 - Kang; Dae-Hyuk ;   et al. | 2011-06-30 |
Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same Grant 7,745,338 - Cha , et al. June 29, 2 | 2010-06-29 |
Transistor having a metal nitride layer pattern, etchant and methods of forming the same Grant 7,700,496 - Kim , et al. April 20, 2 | 2010-04-20 |
Transistor having a metal nitride layer pattern, etchant and methods of forming the same App 20100019292 - Kim; Sang-Yong ;   et al. | 2010-01-28 |
Method of manufacturing nonvolatile semiconductor memory device Grant 7,560,386 - Cha , et al. July 14, 2 | 2009-07-14 |
Method of fine patterning semiconductor device App 20090176376 - Yi; Shi-Yong ;   et al. | 2009-07-09 |
Methods of Manufacturing Non-Volatile Memory Devices Including Charge-Trapping Layers App 20080188049 - Shim; Woo Gwan ;   et al. | 2008-08-07 |
Method of Forming Fine Pitch Hardmask Patterns and Method of Forming Fine Patterns of Semiconductor Device Using the Same App 20080014752 - Cha; Ji-hoon ;   et al. | 2008-01-17 |
Method of manufacturing nonvolatile semiconductor memory device App 20070218619 - Cha; Ji-hoon ;   et al. | 2007-09-20 |
Transistor having a metal nitride layer pattern, etchant and methods of forming the same App 20060189148 - Kim; Sang-Yong ;   et al. | 2006-08-24 |
Microelectronic cleaning agent(s) and method(s) of fabricating semiconductor device(s) using the same App 20060172907 - Kim; Sang-Yong ;   et al. | 2006-08-03 |