Patent | Date |
---|
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean Grant 8,053,252 - Udayakumar , et al. November 8, 2 | 2011-11-08 |
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean Grant 7,799,582 - Udayakumar , et al. September 21, 2 | 2010-09-21 |
Mitigation Of Edge Degradation In Ferroelectric Memory Devices Through Plasma Etch Clean App 20090275148 - UDAYAKUMAR; Kezhakkedath R. ;   et al. | 2009-11-05 |
Mitigation Of Edge Degradation In Ferroelectric Memory Devices Through Plasma Etch Clean App 20090275147 - UDAYAKUMAR; Kezhakkedath R. ;   et al. | 2009-11-05 |
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean Grant 7,572,698 - Udayakumar , et al. August 11, 2 | 2009-08-11 |
Etching systems and processing gas specie modulation Grant 7,560,385 - Celii , et al. July 14, 2 | 2009-07-14 |
Method For Etching A Substrate And A Device Formed Using The Method App 20080303141 - Udayakumar; K.R. ;   et al. | 2008-12-11 |
Method for etching a substrate and a device formed using the method Grant 7,425,512 - Udayakumar , et al. September 16, 2 | 2008-09-16 |
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean App 20070281422 - Udayakumar; Kezhakkedath R. ;   et al. | 2007-12-06 |
Method for patterning sub-lithographic features in semiconductor manufacturing Grant 7,300,883 - Celii , et al. November 27, 2 | 2007-11-27 |
Method for Forming Ferroelectric Memory Capacitor App 20070221974 - Celii; Francis G. ;   et al. | 2007-09-27 |
Method for forming ferroelectric memory capacitor Grant 7,250,349 - Celii , et al. July 31, 2 | 2007-07-31 |
FeRAM capacitor stack etch Grant 7,029,925 - Celii , et al. April 18, 2 | 2006-04-18 |
Method for patterning sub-lithographic features in semiconductor manufacturing App 20060046498 - Celii; Francis G. ;   et al. | 2006-03-02 |
Method for etching a substrate and a device formed using the method App 20050112898 - Udayakumar, K.R. ;   et al. | 2005-05-26 |
Process flow for dual damescene interconnect structures Grant 6,872,665 - Celii , et al. March 29, 2 | 2005-03-29 |
FeRAM capacitor stack etch App 20050054122 - Celii, Francis G. ;   et al. | 2005-03-10 |
Boron trichloride-based plasma etch App 20040217087 - Celii, Francis G. ;   et al. | 2004-11-04 |
Method for forming ferroelectric memory capacitor App 20040175954 - Celii, Francis G. ;   et al. | 2004-09-09 |
FeRAM sidewall diffusion barrier etch Grant 6,713,342 - Celii , et al. March 30, 2 | 2004-03-30 |
Process for monitoring the thickness of layers in a microelectronic device Grant 6,605,482 - Celii , et al. August 12, 2 | 2003-08-12 |
FeRAM capacitor stack etch App 20030143853 - Celii, Francis G. ;   et al. | 2003-07-31 |
FeRAM sidewall diffusion barrier etch App 20030129847 - Celii, Francis G. ;   et al. | 2003-07-10 |
Etching systems and processing gas specie modulation App 20030073312 - Celii, Francis G. ;   et al. | 2003-04-17 |
Optocouplers having integrated organic light-emitting diodes Grant 6,509,574 - Yuan , et al. January 21, 2 | 2003-01-21 |
Gas switching during an etch process to modulate the characteristics of the etch App 20020139771 - Jiang, Ping ;   et al. | 2002-10-03 |
Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics Grant 6,455,411 - Jiang , et al. September 24, 2 | 2002-09-24 |
Solid-state relay having integrated organic light-emitting diodes App 20020066904 - Yuan, Han-Tzong ;   et al. | 2002-06-06 |
Process for monitoring the thickness of layers in a microelectronic device App 20020055197 - Celii, Francis G. ;   et al. | 2002-05-09 |
Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics App 20020031906 - Jiang, Ping ;   et al. | 2002-03-14 |
Optocouplers having integrated organic light-emitting diodes App 20020027206 - Yuan, Han-Tzong ;   et al. | 2002-03-07 |
Semiconductor surface measurement system and method Grant 5,956,148 - Celii September 21, 1 | 1999-09-21 |
Semiconductor growth method with thickness control Grant 5,756,375 - Celii , et al. May 26, 1 | 1998-05-26 |
Growth method by repeatedly measuring flux in MBE chamber Grant 5,556,462 - Celii , et al. September 17, 1 | 1996-09-17 |
Temperature sensor and method Grant 5,501,637 - Duncan , et al. March 26, 1 | 1996-03-26 |
Compound semiconductors and a method for thin film growth Grant 5,490,880 - Kao , et al. February 13, 1 | 1996-02-13 |
Method for forming patterned diamond thin films Grant 5,082,522 - Purdes , et al. January 21, 1 | 1992-01-21 |