Ceglio; Natale M.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ceglio; Natale M..The latest application filed is for "sn vapor euv llp source system for euv lithography".

Company Profile

1.19.13

Ceglio; Natale M. - Pleasanton CA
Ceglio; Natale M. - Livermore CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Sn vapor EUV LLP source system for EUV lithography Grant 9,585,236 - Ceglio , et al. February 28, 2	2017-02-28
Source-collector module with GIC mirror and LPP EUV light source Grant 9,057,962 - Ceglio , et al. June 16, 2	2015-06-16
Source-collector modules for EUV lithography employing a GIC mirror and a LPP source Grant 8,895,946 - Ceglio , et al. November 25, 2	2014-11-25
Sn vapor EUV LLP source system for EUV lithography App 20140326904 - Ceglio; Natale M. ; et al.	2014-11-06
EUV collector system with enhanced EUV radiation collection Grant 8,873,025 - Ceglio , et al. October 28, 2	2014-10-28
Source-collector module wth GIC mirror and LPP EUV light source App 20140152967 - Ceglio; Natale M. ; et al.	2014-06-05
Evaporative thermal management of grazing incidence collectors for EUV lithography Grant 8,731,139 - Grek , et al. May 20, 2	2014-05-20
Source-collector module with GIC mirror and tin vapor LPP target system Grant 8,686,381 - Levesque , et al. April 1, 2	2014-04-01
EUV collector system with enhanced EUV radiation collection App 20140043595 - Ceglio; Natale M. ; et al.	2014-02-13
EUV collector system with enhanced EUV radiation collection Grant 8,587,768 - Ceglio , et al. November 19, 2	2013-11-19
Source-collector modules for EUV lithography employing a GIC mirror and a LPP source App 20130207004 - Ceglio; Natale M. ; et al.	2013-08-15
Source-collector module with GIC mirror and tin rod EUV LPP target system Grant 8,344,339 - Levesque , et al. January 1, 2	2013-01-01
Source-collector module with GIC mirror and LPP EUV light source Grant 8,330,131 - Ceglio , et al. December 11, 2	2012-12-11
Evaporative thermal management of grazing incidence collectors for EUV lithography App 20120281189 - Grek; Boris ; et al.	2012-11-08
Source-collector module with GIC mirror and xenon liquid EUV LPP target system Grant 8,258,485 - Levesque , et al. September 4, 2	2012-09-04
Source-collector module with GIC mirror and tin wire EUV LPP target system App 20120050707 - Levesque; Richard A. ; et al.	2012-03-01
Source-collector module with GIC mirror and xenon liquid EUV LPP target system App 20120050704 - Levesque; Richard A. ; et al.	2012-03-01
Source-collector module with GIC mirror and tin rod EUV LPP target system App 20120050708 - Levesque; Richard A. ; et al.	2012-03-01
Source-collector module with GIC mirror and xenon ice EUV LPP target system App 20120050706 - Levesque; Richard A. ; et al.	2012-03-01
Source-collector module with GIC mirror and tin vapor LPP target system App 20110318694 - Levesque; Richard ; et al.	2011-12-29
EUV collector system with enhanced EUV radiation collection App 20110242515 - Ceglio; Natale M. ; et al.	2011-10-06
Source-collector module with GIC mirror and LPP EUV light source App 20110168925 - Ceglio; Natale M. ; et al.	2011-07-14
Scalable wafer inspection Grant 6,770,862 - Maciuca , et al. August 3, 2	2004-08-03
Maskless, reticle-free, lithography Grant 5,691,541 - Ceglio , et al. November 25, 1	1997-11-25
Broadband diffractive lens or imaging element Grant 5,257,132 - Ceglio , et al. * October 26, 1	1993-10-26
Broadband diffractive lens or imaging element Grant 5,071,207 - Ceglio , et al. December 10, 1	1991-12-10
X-ray beamsplitter Grant 4,870,648 - Ceglio , et al. September 26, 1	1989-09-26

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