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Radiation source and lithographic apparatus Grant 10,394,141 - Riepen , et al. A | 2019-08-27 |
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation Grant 9,983,489 - Berendsen , et al. May 29, 2 | 2018-05-29 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,971,255 - Cortie , et al. May 15, 2 | 2018-05-15 |
Radiation Source and Lithographic Apparatus App 20170322499 - RIEPEN; Michel ;   et al. | 2017-11-09 |
Radiation source and lithographic apparatus Grant 9,753,383 - Riepen , et al. September 5, 2 | 2017-09-05 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20170176875 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2017-06-22 |
Method For Compensating for an Exposure Error, a Device Manufacturing Method, a Substrate Table, a Lithographic Apparatus, a Control System, a Method for Measuring Reflectivity and a Method for Measuring a Dose of EUV Radiation App 20170115578 - BERENDSEN; Christianus Wilhelmus Johannes ;   et al. | 2017-04-27 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,588,437 - Cortie , et al. March 7, 2 | 2017-03-07 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20160103398 - CORTIE; Rogier Hendrikus Magdalena ;   et al. | 2016-04-14 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,235,138 - Cortie , et al. January 12, 2 | 2016-01-12 |
Radiation Source and Lithographic Apparatus App 20150338753 - RIEPEN; Michel ;   et al. | 2015-11-26 |
Lithographic apparatus, method of manufacturing an article for a lithographic apparatus and device manufacturing method Grant 8,891,053 - Dziomkina , et al. November 18, 2 | 2014-11-18 |
Lithographic apparatus and a device manufacturing method Grant 8,755,026 - Gosen , et al. June 17, 2 | 2014-06-17 |
Gas-liquid Phase Transition Method And Apparatus For Cleaning Of Surfaces In Semiconductor Manufacturing App 20140014138 - Spiegelman; Jeffrey J. ;   et al. | 2014-01-16 |
Lithographic apparatus, coverplate and device manufacturing method Grant 8,553,206 - Lafarre , et al. October 8, 2 | 2013-10-08 |
Immersion lithographic apparatus and device manufacturing method Grant 8,405,819 - Van Bokhoven , et al. March 26, 2 | 2013-03-26 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20130016332 - Cortie; Rogier Hendrikus Magdalena ;   et al. | 2013-01-17 |
Lithographic Apparatus And A Device Manufacturing Method App 20110149258 - Gosen; Jeroen Gerard ;   et al. | 2011-06-23 |
Lithographic Apparatus, Coverplate And Device Manufacturing Method App 20110069289 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2011-03-24 |
Lithographic Apparatus, Coverplate And Device Manufacturing Method App 20110069297 - Lafarre; Raymond Wilhelmus Louis ;   et al. | 2011-03-24 |
Immersion Lithographic Apparatus And Device Manufacturing Method App 20100283981 - Van Bokhoven; Laurentius Johannes Adrianus ;   et al. | 2010-11-11 |
Lithographic Apparatus, Method Of Manufacturing An Article For A Lithographic Apparatus And Device Manufacturing Method App 20100060870 - DZIOMKINA; Nina Vladimirovna ;   et al. | 2010-03-11 |
Substrate Table, Lithographic Apparatus And Device Manufacturing Method App 20090296068 - CASTELIJNS; Henricus Jozef ;   et al. | 2009-12-03 |