loadpatents
Patent applications and USPTO patent grants for Casey, Jr.; J. David.The latest application filed is for "photolithography mask repair".
Patent | Date |
---|---|
Electron beam processing for mask repair Grant 7,727,681 - Stewart , et al. June 1, 2 | 2010-06-01 |
Photolithography mask repair Grant 7,662,524 - Stewart , et al. February 16, 2 | 2010-02-16 |
Photolithography Mask Repair App 20090111036 - Stewart; Diane K. ;   et al. | 2009-04-30 |
Photolithography mask repair Grant 7,504,182 - Stewart , et al. March 17, 2 | 2009-03-17 |
Electron beam processing Grant 6,753,538 - Musil , et al. June 22, 2 | 2004-06-22 |
Method and apparatus for repairing lithography masks using a charged particle beam system Grant 6,709,554 - Ferranti , et al. March 23, 2 | 2004-03-23 |
Apparatus and method for reducing differential sputter rates Grant 6,641,705 - Phaneuf , et al. November 4, 2 | 2003-11-04 |
Method and apparatus for milling copper interconnects in a charged particle beam system Grant 6,322,672 - Shuman , et al. November 27, 2 | 2001-11-27 |
Pattern film repair using a focused particle beam system Grant 6,042,738 - Casey, Jr. , et al. March 28, 2 | 2000-03-28 |
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