Patent | Date |
---|
Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloy Grant 7,102,234 - Cabral, Jr. , et al. September 5, 2 | 2006-09-05 |
Multilayer interconnect structure containing air gaps and method for making Grant 7,098,476 - Babich , et al. August 29, 2 | 2006-08-29 |
Structure for controlling the interface roughness of cobalt disilicide Grant 7,081,676 - Agnello , et al. July 25, 2 | 2006-07-25 |
Multilayer interconnect structure containing air gaps and method for making App 20050037604 - Babich, Katherina E. ;   et al. | 2005-02-17 |
Multilayer interconnect structure containing air gaps and method for making Grant 6,815,329 - Babich , et al. November 9, 2 | 2004-11-09 |
Method and structure for controlling the interface roughness of cobalt disilicide Grant 6,809,030 - Agnello , et al. October 26, 2 | 2004-10-26 |
Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloy App 20040195695 - Cabral,, Cyril JR. ;   et al. | 2004-10-07 |
Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloy Grant 6,753,606 - Cabral, Jr. , et al. June 22, 2 | 2004-06-22 |
Method and structure for controlling the interface roughness of cobalt disilicide App 20040087160 - Agnello, Paul David ;   et al. | 2004-05-06 |
Apparatus and method for forming uniformly thick anodized films on large substrates App 20040077140 - Andricacos, Panayotis C. ;   et al. | 2004-04-22 |
Self-aligned silicide (salicide) process for strained silicon MOSFET on SiGe and structure formed thereby App 20030068883 - Ajmera, Atul Champaklal ;   et al. | 2003-04-10 |
Self-aligned silicide (salicide) process for strained silicon MOSFET ON SiGe and structure formed thereby Grant 6,503,833 - Ajmera , et al. January 7, 2 | 2003-01-07 |
Method and structure for controlling the interface roughness of cobalt disilicide App 20020182836 - Agnello, Paul David ;   et al. | 2002-12-05 |
Multilayer interconnect structure containing air gaps and method for making App 20020158337 - Babich, Katherina E. ;   et al. | 2002-10-31 |
Method and structure for retarding high temperature agglomeration of silicides using alloys App 20020151158 - Cabral, Cyril JR. ;   et al. | 2002-10-17 |
Self-aligned silicide process for reduction of Si consumption in shallow junction and thin SOI electronic devices Grant 6,444,578 - Cabral, Jr. , et al. September 3, 2 | 2002-09-03 |
Method and structure for controlling the interface roughness of cobalt disilicide Grant 6,440,851 - Agnello , et al. August 27, 2 | 2002-08-27 |
Self-aligned silicide process for reduction of Si consumption in shallow junction and thin SOI electronic devices App 20020115262 - Cabral, Cyril JR. ;   et al. | 2002-08-22 |
Interconnects with Ti-containing liners App 20020076574 - Cabral, Cyril JR. ;   et al. | 2002-06-20 |
Method And Structure For Retarding High Temperature Agglomeration Of Silicides Using Alloys App 20020061636 - Cabral, Cyril JR. ;   et al. | 2002-05-23 |
Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloy App 20020042197 - Cabral,, Cyril JR. ;   et al. | 2002-04-11 |
Method and structure for reduction of contact resistance of metal silicides using a metal-germanium alloy Grant 6,331,486 - Cabral, Jr. , et al. December 18, 2 | 2001-12-18 |
Method for self-aligned formation of silicide contacts using metal silicon alloys for limited silicon consumption and for reduction of bridging Grant 6,323,130 - Brodsky , et al. November 27, 2 | 2001-11-27 |