| Patent | Date |
|---|
Supplemental Energy For Low Temperature Processes
App 20220162756 - CARLSON; David K. ; et al. | 2022-05-26 |
Susceptor support
Grant 10,837,121 - Collins , et al. November 17, 2 | 2020-11-17 |
Method for optimizing dry absorber efficiency and lifetime in epitaxial applications
Grant 10,586,744 - Carlson | 2020-03-10 |
Temperature control system and process for gaseous precursor delivery
Grant 10,557,203 - Carlson Feb | 2020-02-11 |
Temperature controlled remote plasma clean for exhaust deposit removal
Grant 10,500,614 - Hilkene , et al. Dec | 2019-12-10 |
Upper dome with injection assembly
Grant 10,458,040 - Brillhart , et al. Oc | 2019-10-29 |
Indexed gas jet injector for substrate processing system
Grant 10,119,194 - Carlson November 6, 2 | 2018-11-06 |
EPI base ring
Grant 10,119,192 - Aboagye , et al. November 6, 2 | 2018-11-06 |
Method For Optimizing Dry Absorber Efficiency And Lifetime In Epitaxial Applications
App 20180277455 - CARLSON; David K. | 2018-09-27 |
Method and structure to improve film stack with sensitive and reactive layers
Grant 10,043,870 - Ye , et al. August 7, 2 | 2018-08-07 |
Epitaxial Chamber With Customizable Flow Injection
App 20180209043 - LAU; SHU-KWAN ; et al. | 2018-07-26 |
Precursor Control System And Process
App 20180163307 - CARLSON; David K. | 2018-06-14 |
Upper Dome With Injection Assembly
App 20180066382 - BRILLHART; Paul ; et al. | 2018-03-08 |
Method And Material For Cmos Contact And Barrier Layer
App 20180019121 - BAO; Xinyu ; et al. | 2018-01-18 |
Quartz Upper And Lower Domes
App 20180005856 - CHANG; Anzhong ; et al. | 2018-01-04 |
Chamber pressure control apparatus for chemical vapor deposition systems
Grant 9,857,028 - Carlson January 2, 2 | 2018-01-02 |
Upper dome with injection assembly
Grant 9,845,550 - Brillhart , et al. December 19, 2 | 2017-12-19 |
Temperature Controlled Remote Plasma Clean For Exhaust Deposit Removal
App 20170304877 - HILKENE; Martin A. ; et al. | 2017-10-26 |
Method for forming group III/V conformal layers on silicon substrates
Grant 9,799,737 - Bao , et al. October 24, 2 | 2017-10-24 |
Susceptor Support
App 20170275777 - COLLINS; Richard O. ; et al. | 2017-09-28 |
Quartz upper and lower domes
Grant 9,768,043 - Chang , et al. September 19, 2 | 2017-09-19 |
High Speed Epitaxy System And Methods
App 20170221751 - BURROWS; Brian H. ; et al. | 2017-08-03 |
Liner assembly for chemical vapor deposition chamber
Grant 9,695,508 - Carlson , et al. July 4, 2 | 2017-07-04 |
Chamber Pressure Control Apparatus For Chemical Vapor Deposition Systems
App 20170108171 - CARLSON; David K. | 2017-04-20 |
Method And Apparatus For The Selective Deposition Of Epitaxial Germanium Stressor Alloys
App 20170037536 - SANCHEZ; Errol Antonio C. ; et al. | 2017-02-09 |
Chamber pressure control apparatus for chemical vapor deposition systems
Grant 9,534,295 - Carlson January 3, 2 | 2017-01-03 |
MOCVD growth of highly mismatched III-V CMOS channel materials on silicon substrates
Grant 9,530,888 - Ban , et al. December 27, 2 | 2016-12-27 |
Semiconductor substrate processing system
Grant 9,512,520 - Sanchez , et al. December 6, 2 | 2016-12-06 |
Method For Forming Group Iii/v Conformal Layers On Silicon Substrates
App 20160343811 - BAO; Xinyu ; et al. | 2016-11-24 |
Method and apparatus for the selective deposition of epitaxial germanium stressor alloys
Grant 9,476,144 - Sanchez , et al. October 25, 2 | 2016-10-25 |
Mocvd Growth Of Highly Mismatched Iii-v Cmos Channel Materials On Silicon Substrates
App 20160293764 - BAN; Keun-Yong ; et al. | 2016-10-06 |
Accelerated relaxation of strain-relaxed epitaxial buffers by use of integrated or stand-alone thermal processing
Grant 9,443,728 - Srinivasan , et al. September 13, 2 | 2016-09-13 |
Epi Base Ring
App 20160230276 - ABOAGYE; Steve ; et al. | 2016-08-11 |
Indexed inline substrate processing tool
Grant 9,406,538 - Carlson August 2, 2 | 2016-08-02 |
Gas dispersion apparatus
Grant 9,396,909 - Carlson July 19, 2 | 2016-07-19 |
Compact ampoule thermal management system
Grant 9,347,696 - Carlson , et al. May 24, 2 | 2016-05-24 |
Method And Structure To Improve Film Stack With Sensitive And Reactive Layers
App 20160126322 - YE; Zhiyuan ; et al. | 2016-05-05 |
EPI base ring
Grant 9,322,097 - Aboagye , et al. April 26, 2 | 2016-04-26 |
Honeycomb Multi-zone Gas Distribution Plate
App 20160068955 - BRILLHART; Paul ; et al. | 2016-03-10 |
Compact ampoule thermal management system
Grant 9,279,604 - Carlson , et al. March 8, 2 | 2016-03-08 |
Recursive Pumping Member
App 20160033070 - BRILLHART; Paul ; et al. | 2016-02-04 |
Indexed Gas Jet Injector For Substrate Processing System
App 20150376793 - CARLSON; DAVID K. | 2015-12-31 |
Window Assembly For Substrate Processing System
App 20150361581 - CARLSON; DAVID K. | 2015-12-17 |
Upper Dome With Injection Assembly
App 20150233016 - BRILLHART; Paul ; et al. | 2015-08-20 |
Gas exhaust for high volume, low cost system for epitaxial silicon deposition
Grant 9,111,980 - Carlson , et al. August 18, 2 | 2015-08-18 |
Liner Assembly For Chemical Vapor Deposition Chamber
App 20150176123 - CARLSON; DAVID K. ; et al. | 2015-06-25 |
Chemical delivery system
Grant 9,032,990 - Josephson , et al. May 19, 2 | 2015-05-19 |
Gas Dispersion Apparatus
App 20150122357 - CARLSON; DAVID K. | 2015-05-07 |
Apparatus to control semiconductor film deposition characteristics
Grant 8,991,332 - Kuppurao , et al. March 31, 2 | 2015-03-31 |
Window assembly for use in substrate processing systems
Grant 8,986,454 - Carlson March 24, 2 | 2015-03-24 |
Liner assembly for chemical vapor deposition chamber
Grant 8,980,005 - Carlson , et al. March 17, 2 | 2015-03-17 |
Gas dispersion apparatus
Grant 8,960,235 - Carlson February 24, 2 | 2015-02-24 |
Accelerated Relaxation Of Strain-relaxed Epitaxial Buffers By Use Of Integrated Or Stand-alone Thermal Processing
App 20150050753 - SRINIVASAN; Swaminathan T. ; et al. | 2015-02-19 |
Chamber Pressure Control Apparatus For Chemical Vapor Deposition Systems
App 20150020891 - CARLSON; David K. | 2015-01-22 |
Epi Base Ring
App 20140261185 - ABOAGYE; STEVE ; et al. | 2014-09-18 |
Methods and apparatus for insitu analysis of gases in electronic device fabrication systems
Grant 8,813,538 - Carlson , et al. August 26, 2 | 2014-08-26 |
Quartz Upper And Lower Domes
App 20140199056 - CHANG; Anzhong ; et al. | 2014-07-17 |
Method For Forming Group Iii/v Conformal Layers On Silicon Substrates
App 20140159112 - BAO; Xinyu ; et al. | 2014-06-12 |
Epitaxial Chamber With Customizable Flow Injection
App 20140137801 - LAU; SHU-KWAN ; et al. | 2014-05-22 |
Semiconductor process chamber vision and monitoring system
Grant 8,726,837 - Patalay , et al. May 20, 2 | 2014-05-20 |
Indexed Inline Substrate Processing Tool
App 20140099778 - CARLSON; DAVID K. | 2014-04-10 |
Gas Injector For High Volume, Low Cost System For Epitaxial Silicon Depositon
App 20140060434 - CARLSON; DAVID K. ; et al. | 2014-03-06 |
Gas Exhaust For High Volume, Low Cost System For Epitaxial Silicon Deposition
App 20140060433 - CARLSON; DAVID K. ; et al. | 2014-03-06 |
Doors For High Volume, Low Cost System For Epitaxial Silicon Deposition
App 20140060435 - CARLSON; DAVID K. ; et al. | 2014-03-06 |
Methods for low temperature conditioning of process chambers
Grant 8,658,540 - Huang , et al. February 25, 2 | 2014-02-25 |
Method for forming group III/V conformal layers on silicon substrates
Grant 8,603,898 - Bao , et al. December 10, 2 | 2013-12-10 |
Compact Ampoule Thermal Management System
App 20130319013 - CARLSON; DAVID K. ; et al. | 2013-12-05 |
Compact Ampoule Thermal Management System
App 20130319015 - CARLSON; DAVID K. ; et al. | 2013-12-05 |
Gas Reclamation And Abatement System For High Volume Epitaxial Silicon Deposition System
App 20130276702 - CARLSON; David K. | 2013-10-24 |
Methods And Apparatus For Generating And Delivering A Process Gas For Processing A Substrate
App 20130269613 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-10-17 |
Method For Forming Group Iii/v Conformal Layers On Silicon Substrates
App 20130256760 - Bao; Xinyu ; et al. | 2013-10-03 |
Susceptor with backside area of constant emissivity
Grant 8,524,555 - Sanchez , et al. September 3, 2 | 2013-09-03 |
Method And Apparatus For Precursor Delivery
App 20130220221 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2013-08-29 |
Methods for depositing germanium-containing layers
Grant 8,501,600 - Sanchez , et al. August 6, 2 | 2013-08-06 |
Gas Dispersion Apparatus
App 20130109159 - CARLSON; DAVID K. | 2013-05-02 |
Apparatus For Sublimating Solid State Precursors
App 20130105483 - CARLSON; David K. ; et al. | 2013-05-02 |
Method And Apparatus For Cleaning A Substrate Surface
App 20130068390 - SANCHEZ; Errol Antonio C. ; et al. | 2013-03-21 |
In situ cleaning of CVD System exhaust
Grant 8,343,317 - Carlson January 1, 2 | 2013-01-01 |
Polymeric coating of substrate processing system components for contamination control
Grant 8,337,619 - Carlson , et al. December 25, 2 | 2012-12-25 |
Apparatus and methods for chemical vapor deposition
Grant 8,313,804 - Carlson , et al. November 20, 2 | 2012-11-20 |
Method and apparatus for cleaning a substrate surface
Grant 8,309,440 - Sanchez , et al. November 13, 2 | 2012-11-13 |
Susceptor With Backside Area Of Constant Emissivity
App 20120282714 - Sanchez; Errol ; et al. | 2012-11-08 |
Chemical Delivery System
App 20120266984 - JOSEPHSON; MARCEL E. ; et al. | 2012-10-25 |
Semiconductor Substrate Processing System
App 20120266819 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2012-10-25 |
Apparatus For Deposition Of Materials On A Substrate
App 20120270384 - SANCHEZ; ERROL ANTONIO C. ; et al. | 2012-10-25 |
Method And Apparatus For The Selective Deposition Of Epitaxial Germanium Stressor Alloys
App 20120247386 - Sanchez; Errol Antonio C. ; et al. | 2012-10-04 |
Liner Assembly For Chemical Vapor Deposition Chamber
App 20120240853 - Carlson; David K. ; et al. | 2012-09-27 |
Susceptor with backside area of constant emissivity
Grant 8,226,770 - Sanchez , et al. July 24, 2 | 2012-07-24 |
Methods For Depositing Germanium-containing Layers
App 20120077335 - SANCHEZ; ERROL ; et al. | 2012-03-29 |
Methods And Apparatus For Insitu Analysis Of Gases In Electronic Device Fabrication Systems
App 20120006092 - Carlson; David K. ; et al. | 2012-01-12 |
Methods For Low Temperature Conditioning Of Process Chambers
App 20110306186 - HUANG; YI-CHIAU ; et al. | 2011-12-15 |
Window Assembly For Use In Substrate Processing Systems
App 20110299282 - CARLSON; DAVID K. | 2011-12-08 |
Method And Apparatus For Cleaning A Substrate Surface
App 20110263103 - SANCHEZ; Errol Antonio C. ; et al. | 2011-10-27 |
Methods and apparatus for insitu analysis of gases in electronic device fabrication systems
Grant 8,020,427 - Carlson , et al. September 20, 2 | 2011-09-20 |
Apparatus And Methods For Chemical Vapor Deposition
App 20110217466 - Carlson; David K. ; et al. | 2011-09-08 |
Method and apparatus for cleaning a substrate surface
Grant 8,008,166 - Sanchez , et al. August 30, 2 | 2011-08-30 |
Substrate Processing Apparatus Having A Radiant Cavity
App 20110155058 - Carlson; David K. ; et al. | 2011-06-30 |
Apparatus and methods for chemical vapor deposition
Grant 7,967,911 - Carlson , et al. June 28, 2 | 2011-06-28 |
Parallel System For Epitaxial Chemical Vapor Deposition
App 20110100554 - CARLSON; DAVID K. ; et al. | 2011-05-05 |
Methods And Apparatus For Insitu Analysis Of Gases In Electronic Device Fabrication Systems
App 20100275674 - Carlson; David K. ; et al. | 2010-11-04 |
Methods and apparatus for insitu analysis of gases in electronic device fabrication systems
Grant 7,770,431 - Carlson , et al. August 10, 2 | 2010-08-10 |
Silicon-containing layer deposition with silicon compounds
Grant 7,758,697 - Comita , et al. July 20, 2 | 2010-07-20 |
Method to control semiconductor film deposition characteristics
Grant 7,718,225 - Kuppurao , et al. May 18, 2 | 2010-05-18 |
Methods for in-situ generation of reactive etch and growth specie in film formation processes
Grant 7,709,391 - Kuppurao , et al. May 4, 2 | 2010-05-04 |
Polymeric Coating Of Substrate Processing System Components For Contamination Control
App 20100071622 - CARLSON; DAVID K. ; et al. | 2010-03-25 |
Silicon-containing layer deposition with silicon compounds
Grant 7,645,339 - Singh , et al. January 12, 2 | 2010-01-12 |
Semiconductor Process Chamber Vision And Monitoring System
App 20090314205 - Patalay; Kailash K. ; et al. | 2009-12-24 |
Apparatus to Control Semiconductor Film Deposition Characteristics
App 20090211523 - Kuppurao; Satheesh ; et al. | 2009-08-27 |
Selective deposition
Grant 7,560,352 - Carlson , et al. July 14, 2 | 2009-07-14 |
Silicon-containing layer deposition with silicon compounds
Grant 7,540,920 - Singh , et al. June 2, 2 | 2009-06-02 |
In Situ Cleaning of CVD System Exhaust
App 20090044699 - Carlson; David K. | 2009-02-19 |
Method And Apparatus For Cleaning A Substrate Surface
App 20090029528 - SANCHEZ; Errol Antonio C. ; et al. | 2009-01-29 |
Silicon-containing Layer Deposition With Silicon Compounds
App 20080102218 - Comita; Paul B. ; et al. | 2008-05-01 |
Modular Cvd Epi 300mm Reactor
App 20080072820 - Burrows; Brian H. ; et al. | 2008-03-27 |
Methods And Apparatus For Insitu Analysis Of Gases In Electronic Device Fabrication Systems
App 20080022751 - Carlson; David K. ; et al. | 2008-01-31 |
Apparatus and Methods for Chemical Vapor Deposition
App 20080014350 - Carlson; David K. ; et al. | 2008-01-17 |
In situ cleaning of CVD system exhaust
App 20070267143 - Carlson; David K. | 2007-11-22 |
Silicon-containing layer deposition with silicon compounds
App 20070240632 - Singh; Kaushal K. ; et al. | 2007-10-18 |
Methods for in-situ generation of reactive etch and growth specie in film formation processes
App 20070170148 - Kuppurao; Satheesh ; et al. | 2007-07-26 |
Method and apparatus to control semiconductor film deposition characteristics
App 20070042117 - Kuppurao; Satheesh ; et al. | 2007-02-22 |
Selective deposition
App 20060166414 - Carlson; David K. ; et al. | 2006-07-27 |
Method of calibrating and using a semiconductor processing system
Grant 6,876,442 - Vatus , et al. April 5, 2 | 2005-04-05 |
Silicon-containing layer deposition with silicon compounds
App 20040224089 - Singh, Kaushal K. ; et al. | 2004-11-11 |
Method and a system for sealing an epitaxial silicon layer on a substrate
Grant 6,685,779 - Carlson , et al. February 3, 2 | 2004-02-03 |
System and method for tire pressure monitoring using vehicle radio
App 20030164760 - Nantz, John S. ; et al. | 2003-09-04 |
Method of calibrating and using a semiconductor processing system
App 20030151733 - Vatus, Jean R. ; et al. | 2003-08-14 |
Gas inlets for wafer processing chamber
App 20030092266 - Anderson, Roger N. ; et al. | 2003-05-15 |
Gas inlets for wafer processing chamber
Grant 6,500,734 - Anderson , et al. December 31, 2 | 2002-12-31 |
Method and a system for sealing an epitaxial silicon layer on a substrate
App 20020148563 - Carlson, David K. ; et al. | 2002-10-17 |
Backside heating chamber for emissivity independent thermal processes
Grant 6,455,814 - Samoilov , et al. September 24, 2 | 2002-09-24 |
Method and a system for sealing an epitaxial silicon layer on a substrate
App 20020127826 - Carlson, David K. ; et al. | 2002-09-12 |
Method And A System For Sealing An Epitaxial Silicon Layer On A Substrate
App 20020115266 - Carlson, David K. ; et al. | 2002-08-22 |
Method of sealing an epitaxial silicon layer on a substrate
Grant 6,376,387 - Carlson , et al. April 23, 2 | 2002-04-23 |
Wafer Processing In A Chamber With Novel Gas Inlets
App 20020025657 - ANDERSON, ROGER N. ; et al. | 2002-02-28 |
Method Of Sealing An Epitaxial Silicon Layer On A Substrate
App 20010014541 - CARLSON, DAVID K. ; et al. | 2001-08-16 |
Point-of-use Exhaust By-product Reactor
App 20010008618 - COMITA, PAUL B. ; et al. | 2001-07-19 |
Method for heating exhaust gas in a substrate reactor
Grant 6,153,260 - Comita , et al. November 28, 2 | 2000-11-28 |
Method for controlling the temperature of the walls of a reaction chamber during processing
Grant 6,083,323 - Carlson , et al. July 4, 2 | 2000-07-04 |
Method and apparatus for controlling the radial temperature gradient of a wafer while ramping the wafer temperature
Grant 6,064,799 - Anderson , et al. May 16, 2 | 2000-05-16 |
Permanently mounted reference sample for a substrate measurement tool
Grant 5,924,058 - Waldhauer , et al. July 13, 1 | 1999-07-13 |
Gas inlets for wafer processing chamber
Grant 5,916,369 - Anderson , et al. June 29, 1 | 1999-06-29 |
Purged lower liner
Grant 5,914,050 - Comita , et al. June 22, 1 | 1999-06-22 |
Low temperature high pressure silicon deposition method
Grant 5,876,797 - Beinglass , et al. March 2, 1 | 1999-03-02 |
Method and apparatus for controlling the temperature of reaction chamber walls
Grant 5,855,677 - Carlson , et al. January 5, 1 | 1999-01-05 |
Low temperature, high pressure silicon deposition method
Grant 5,700,520 - Beinglass , et al. December 23, 1 | 1997-12-23 |
Low temperature high pressure silicon deposition method
Grant 5,607,724 - Beinglass , et al. March 4, 1 | 1997-03-04 |
Robotically loaded epitaxial deposition apparatus
Grant 5,476,359 - Severns , et al. December 19, 1 | 1995-12-19 |
Low temperature etching in cold-wall CVD systems
Grant 5,421,957 - Carlson , et al. June 6, 1 | 1995-06-06 |
In-situ measurement of a thin film deposited on a wafer
Grant 5,258,824 - Carlson , et al. November 2, 1 | 1993-11-02 |
Apparatus and method for substrate heating utilizing various infrared means to achieve uniform intensity
Grant 5,179,677 - Anderson , et al. January 12, 1 | 1993-01-12 |
Robotically loaded epitaxial deposition apparatus
Grant 5,104,276 - Severns , et al. April 14, 1 | 1992-04-14 |
Entry system
Grant 4,206,491 - Ligman , et al. June 3, 1 | 1980-06-03 |
| 