Patent applications and USPTO patent grants for Carl Zeiss.The latest application filed is for "microlithographic exposure method as well as a projection exposure system for carrying out the method".
Patent | Date |
---|---|
Microlithographic Exposure Method As Well As A Projection Exposure System For Carrying Out The Method App 20090040496 - GRUNER; Toralf ;   et al. | 2009-02-12 |
Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus App 20060193052 - Kleemann; Bernd | 2006-08-31 |
Optical system of a microlithographic projection exposure apparatus App 20060023179 - Tschischgale; Joerg ;   et al. | 2006-02-02 |
Projection lens, in particular for microlithography App 20020008861 - Singer, Wolfgang ;   et al. | 2002-01-24 |
Optical device with an illuminating grid and detector grid arranged confocally to an object Grant 5,239,178 - Derndinger , et al. August 24, 1 | 1993-08-24 |
Coordinate-measuring machine Grant 5,068,972 - Herzog , et al. December 3, 1 | 1991-12-03 |
NCAGE Code | FAHQ8 | CARL ZEISS |
CAGE Code | FAHQ8 | CARL ZEISS |
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