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Patent applications and USPTO patent grants for Carl Zeiss SMT Inc..The latest application filed is for "method for imaging a region of interest of a sample using a tomographic x-ray microscope, microscope, system and computer program".
Patent | Date |
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Method and devices for determining metrology sites Grant 11,436,506 - Srikantha , et al. September 6, 2 | 2022-09-06 |
Sample Holder, System And Method App 20210404977 - Case; Thomas Anthony ;   et al. | 2021-12-30 |
Method For Imaging A Region Of Interest Of A Sample Using A Tomographic X-ray Microscope, Microscope, System And Computer Program App 20210407127 - Case; Thomas Anthony ;   et al. | 2021-12-30 |
Method And Devices For Determining Metrology Sites App 20200285976 - Srikantha; Abhilash ;   et al. | 2020-09-10 |
Reducing Particle Implantation App 20110049364 - Knippelmeyer; Rainer ;   et al. | 2011-03-03 |
Gas Field Ion Source With Coated Tip App 20110001058 - Notte, IV; John A. | 2011-01-06 |
Ice Layers In Charged Particle Systems And Methods App 20100136255 - Notte, IV; John A. ;   et al. | 2010-06-03 |
Ion Beam Stabilization App 20100051805 - Rahman; FHM-Faridur ;   et al. | 2010-03-04 |
Repairing Defects App 20100052697 - Knippelmeyer; Rainer ;   et al. | 2010-03-04 |
Increasing Current In Charged Particle Sources And Systems App 20100012839 - Notte, IV; John A. ;   et al. | 2010-01-21 |
Multiple Current Charged Particle Methods App 20100012837 - Notte, IV; John A. ;   et al. | 2010-01-21 |
Sample Decontamination App 20090314939 - Stern; Lewis A. ;   et al. | 2009-12-24 |
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