| Patent | Date |
|---|
Interferometric Measurement Method And Interferometric Measurement Arrangement
App 20220307822 - WOLF; Alexander | 2022-09-29 |
Method For Avoiding A Degradation Of An Optical Element, Projection System, Illumination System And Projection Exposure Apparatus
App 20220308463 - EHM; Dirk ; et al. | 2022-09-29 |
Method, Device And Computer Program For Repairing A Mask Defect
App 20220308443 - Schoneberg; Johannes ; et al. | 2022-09-29 |
Device For Cleaning A Surface In The Interior Of An Optical System
App 20220308466 - DIESCH; Jovana-Maria ; et al. | 2022-09-29 |
Projection Exposure Apparatus Having A Device For Determining The Concentration Of Atomic Hydrogen
App 20220308457 - EHM; Dirk ; et al. | 2022-09-29 |
Optical Element And Lithography System
App 20220299731 - Eva; Eric | 2022-09-22 |
Optical System, Heating Arrangement, And Method For Heating An Optical Element In An Optical System
App 20220299732 - Berner; Andrea ; et al. | 2022-09-22 |
Projection Exposure Apparatus For Semiconductor Lithography
App 20220299733 - Hartjes; Joachim ; et al. | 2022-09-22 |
Method And Apparatuses For Disposing Of Excess Material Of A Photolithographic Mask
App 20220299864 - Budach; Michael ; et al. | 2022-09-22 |
Beam-forming and illuminating system for a lithography system, lithography system, and method
Grant 11,448,968 - Holderer , et al. September 20, 2 | 2022-09-20 |
Methods And Devices For Extending A Time Period Until Changing A Measuring Tip Of A Scanning Probe Microscope
App 20220291255 - Baralia; Gabriel ; et al. | 2022-09-15 |
Measurement apparatus for measuring a wavefront aberration of an imaging optical system
Grant 11,441,970 - Ehrmann , et al. September 13, 2 | 2022-09-13 |
Method For Mounting An Optical System
App 20220283503 - Dorn; Johann ; et al. | 2022-09-08 |
Support Of An Optical Unit
App 20220283509 - Pnini; Boaz ; et al. | 2022-09-08 |
Method To Detect A Defect On A Lithographic Sample And Metrology System To Perform Such A Method
App 20220283513 - Jabbour; Toufic ; et al. | 2022-09-08 |
Method and devices for determining metrology sites
Grant 11,436,506 - Srikantha , et al. September 6, 2 | 2022-09-06 |
Device And Method For Measuring Substrates For Semiconductor Lithography
App 20220276571 - Seidel; Dirk ; et al. | 2022-09-01 |
Method and assembly for analysing the wavefront effect of an optical system
Grant 11,426,067 - Freimann August 30, 2 | 2022-08-30 |
Method and apparatus for removing a particle from a photolithographic mask
Grant 11,429,020 - Baur , et al. August 30, 2 | 2022-08-30 |
Optical Element For Reflecting Euv Radiation, Euv Lithography System And Method For Sealing A Gap
App 20220269162 - GONCHAR; Anastasia | 2022-08-25 |
Imaging optical unit for EUV microlithography
Grant 11,422,470 - Ruoff , et al. August 23, 2 | 2022-08-23 |
Supporting an optical element
Grant 11,422,469 - Korner , et al. August 23, 2 | 2022-08-23 |
Device For Measuring A Substrate And Method For Correcting Cyclic Error Components Of An Interferometer
App 20220260359 - Zschaeck; Stephan ; et al. | 2022-08-18 |
Projection Exposure Apparatus For Semiconductor Lithography
App 20220260924 - Gruner; Toralf | 2022-08-18 |
System To Inspect, Modify Or Analyze A Region Of Interest Of A Sample By Charged Particles, Set Of Systems To Inspect, Modify Or Analyze A Region Of Interest Of A Sample And Method To Inspect, Modify Or Analyze A Region Of Interest Of A Sample By Charged Particles
App 20220260508 - Notte; John A. ; et al. | 2022-08-18 |
Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus
Grant 11,415,892 - Kaes , et al. August 16, 2 | 2022-08-16 |
Compensation of creep effects in an imaging device
Grant 11,415,895 - Nefzi , et al. August 16, 2 | 2022-08-16 |
Projection exposure system for semiconductor lithography having an optical arrangement
Grant 11,415,894 - Fingerhuth , et al. August 16, 2 | 2022-08-16 |
Optical arrangement and lithography apparatus
Grant 11,402,760 - Horn , et al. August 2, 2 | 2022-08-02 |
Euv Collector Mirror
App 20220236461 - VAN DE KERKHOF; Marcus | 2022-07-28 |
Method And Device For Characterizing The Surface Shape Of An Optical Element
App 20220236139 - SIEGLER; Steffen ; et al. | 2022-07-28 |
Optical System
App 20220236652 - Freimann; Rolf ; et al. | 2022-07-28 |
Method For Measuring A Reflectivity Of An Object For Measurement Light And Metrology System For Carrying Out The Method
App 20220236648 - Capelli; Renzo ; et al. | 2022-07-28 |
Contact Area Size Determination Between 3d Structures In An Integrated Semiconductor Sample
App 20220230899 - Buxbaum; Alex ; et al. | 2022-07-21 |
Method and device for calibrating a diffractive measuring structure
Grant 11,391,643 - Samaniego July 19, 2 | 2022-07-19 |
Measuring Apparatus For Interferometrically Determining A Surface Shape
App 20220221269 - SCHULTE; Stefan ; et al. | 2022-07-14 |
FIB-SEM 3D Tomography for measuring shape deviations of HAR structures
App 20220223445 - Avishai; Amir ; et al. | 2022-07-14 |
Apparatus and method for determining a position of an element on a photolithographic mask
Grant 11,385,540 - Budach , et al. July 12, 2 | 2022-07-12 |
Assembly In An Optical System, In Particular Of A Microlithographic Projection Exposure Apparatus
App 20220214627 - Hartjes; Joachim ; et al. | 2022-07-07 |
Pupil facet mirror, illumination optics and optical system for a projection lithography system
Grant 11,378,887 - Deguenther July 5, 2 | 2022-07-05 |
Inspection system and inspection method to qualify semiconductor structures
Grant 11,378,532 - Lewis , et al. July 5, 2 | 2022-07-05 |
Mirror Assembly Having A Hydrogen Barrier And Optical Assembly
App 20220206401 - PAZIDIS; Alexandra ; et al. | 2022-06-30 |
Facet Mirror For An Illumination Optical Unit Of A Projection Exposure Apparatus
App 20220206398 - Anderl; Willi ; et al. | 2022-06-30 |
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
Grant 11,372,334 - Bauer , et al. June 28, 2 | 2022-06-28 |
Method for temperature control of a component
Grant 11,372,341 - Lof , et al. June 28, 2 | 2022-06-28 |
Optical arrangement for EUV lithography
Grant 11,372,335 - Gonchar June 28, 2 | 2022-06-28 |
Connector Assembly, System And Lithography Installation
App 20220200181 - Wolfsteiner; Thomas | 2022-06-23 |
Mirror, in particular for a microlithographic projection exposure system
Grant 11,366,395 - Hild , et al. June 21, 2 | 2022-06-21 |
Support of an optical element
Grant 11,366,393 - Anselm , et al. June 21, 2 | 2022-06-21 |
Method and apparatus for performing an aerial image simulation of a photolithographic mask
Grant 11,366,382 - Dmitriev , et al. June 21, 2 | 2022-06-21 |
Method For Calibrating A Measuring Apparatus
App 20220187061 - HETZLER; Jochen ; et al. | 2022-06-16 |
Mirror Assembly And Optical Assembly Comprising Same
App 20220187516 - PAZIDIS; Alexandra ; et al. | 2022-06-16 |
Mirror, in particular for a microlithographic projection exposure system
Grant 11,360,393 - Wylie-Van Eerd , et al. June 14, 2 | 2022-06-14 |
Catadioptric projection lens and method for producing same
Grant 11,360,293 - Rocktaeschel , et al. June 14, 2 | 2022-06-14 |
Apparatus And Method For Examining And/or Processing A Sample
App 20220178965 - Baur; Christof ; et al. | 2022-06-09 |
Optical Element And Euv Lithographic System
App 20220179329 - Gonchar; Anastasia ; et al. | 2022-06-09 |
Method and apparatus for determining a wavefront of a massive particle beam
Grant 11,355,311 - Welte , et al. June 7, 2 | 2022-06-07 |
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
Grant 11,353,478 - Baralia , et al. June 7, 2 | 2022-06-07 |
Diffractive Optical Element For A Test Interferometer
App 20220170735 - Winkler; Alexander ; et al. | 2022-06-02 |
Optical Diffraction Component
App 20220171292 - Feldmann; Heiko | 2022-06-02 |
Stop for arrangement in a constriction of an EUV illumination beam
Grant 11,350,513 - Patra May 31, 2 | 2022-05-31 |
Optical Illumination System For Guiding Euv Radiation
App 20220163897 - Patra; Michael | 2022-05-26 |
Modulation Device, Control Device, Optical System, Lithography System And Method
App 20220149950 - Richt; Cornelius ; et al. | 2022-05-12 |
Automated Operational Control Of Micro-tooling Devices
App 20220148850 - Pichumani; Ramani ; et al. | 2022-05-12 |
Apparatus And Method For A Scanning Probe Microscope
App 20220146548 - Matejka; Ulrich ; et al. | 2022-05-12 |
Illumination optical system for projection lithography
Grant 11,327,403 - Gang , et al. May 10, 2 | 2022-05-10 |
Method and device for characterizing the surface shape of an optical element
Grant 11,326,872 - Siegler , et al. May 10, 2 | 2022-05-10 |
Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus
Grant 11,328,831 - Grasse , et al. May 10, 2 | 2022-05-10 |
Cross Section Imaging With Improved 3d Volume Image Reconstruction Accuracy
App 20220138973 - Korb; Thomas ; et al. | 2022-05-05 |
Method and device for determining the heating state of an optical element in an optical system for microlithography
Grant 11,320,314 - Gruner , et al. May 3, 2 | 2022-05-03 |
Actuator device for aligning an element, projection exposure apparatus for semiconductor lithography, and method for aligning an element
Grant 11,320,749 - Pnini May 3, 2 | 2022-05-03 |
Projection exposure apparatus for semiconductor lithography including a magnetic damping arrangement
Grant 11,320,753 - Meinkuss May 3, 2 | 2022-05-03 |
Supporting an optical element
Grant 11,314,177 - Kugler , et al. April 26, 2 | 2022-04-26 |
Method And Device For Producing An Adhesive Bond Between A First Component And A Second Component
App 20220118715 - Bader; Dieter | 2022-04-21 |
Method for operating an optical apparatus, and optical apparatus
Grant 11,307,505 - Becker , et al. April 19, 2 | 2022-04-19 |
Support of an optical unit
Grant 11,307,503 - Vogt , et al. April 19, 2 | 2022-04-19 |
Mirror, In Particular For A Microlithographic Projection Exposure Apparatus
App 20220113634 - STIEPAN; Hans Michael ; et al. | 2022-04-14 |
Field Facet System, Optical Arrangement And Lithography Apparatus
App 20220113633 - Rudolph; Guenter ; et al. | 2022-04-14 |
Radiation source and device for feeding back emitted radiation to a laser source
Grant 11,303,092 - Dinger April 12, 2 | 2022-04-12 |
Projection Optical Unit For Microlithography And Method For Producing A Structured Component
App 20220107570 - Rostalski; Hans-Juergen ; et al. | 2022-04-07 |
Method And Apparatus For Examining A Measuring Tip Of A Scanning Probe Microscope
App 20220107340 - Kornilov; Kinga ; et al. | 2022-04-07 |
Stop, Optical System And Lithography Apparatus
App 20220107567 - Modeste; Benjahman Julius ; et al. | 2022-04-07 |
Method For Determining A Production Aerial Image Of An Object To Be Measured
App 20220101569 - Dietzel; Martin ; et al. | 2022-03-31 |
Projection exposure apparatus for semiconductor lithography
Grant 11,281,114 - Kugler , et al. March 22, 2 | 2022-03-22 |
Device And Method For Operating A Bending Beam In A Closed Control Loop
App 20220082583 - Baur; Christof ; et al. | 2022-03-17 |
Measuring assembly for the frequency-based determination of the position of a component
Grant 11,274,914 - Manger , et al. March 15, 2 | 2022-03-15 |
Method And Apparatus For Characterizing A Microlithographic Mask
App 20220075272 - Matejka; Ulrich ; et al. | 2022-03-10 |
Method and assembly for characterizing a mask or a wafer for microlithography
Grant 11,269,260 - Carl , et al. March 8, 2 | 2022-03-08 |
Method For Generating A Mathematical Model For Positioning Individual Mirrors Of A Facet Mirror In An Optical System
App 20220066196 - KRETZSCHMAR; Norman ; et al. | 2022-03-03 |
Image sensor, position sensor device, lithography system, and method for operating an image sensor
Grant 11,262,660 - Horn , et al. March 1, 2 | 2022-03-01 |
Apparatus and method for examining and/or processing a sample
Grant 11,262,378 - Baur , et al. March 1, 2 | 2022-03-01 |
Method For Approximating Imaging Properties Of An Optical Production System To Those Of An Optical Measurement System, And Metrology System To This End
App 20220057709 - Koch; Markus ; et al. | 2022-02-24 |
Autofocusing Method For An Imaging Device
App 20220057598 - Seidel; Dirk | 2022-02-24 |
Measurement Illumination Optical Unit For Guiding Illumination Light Into An Object Field Of A Projection Exposure System For Euv Lithography
App 20220057717 - Fischer; Thomas ; et al. | 2022-02-24 |
Apparatus and method for repairing a photolithographic mask
Grant 11,256,168 - Budach , et al. February 22, 2 | 2022-02-22 |
Process for cleaning optical elements for the ultraviolet wavelength range
Grant 11,256,182 - Forcht , et al. February 22, 2 | 2022-02-22 |
Microlithographic mask, method for determining edge positions of the images of the structures of such a mask and system for carrying out such a method
Grant 11,256,178 - Hellweg February 22, 2 | 2022-02-22 |
Method, Apparatus And Computer Program For Analyzing And/or Processing Of A Mask For Lithography
App 20220050389 - Jackel; Oliver | 2022-02-17 |
Optical system and method for correcting mask defects using the system
Grant 11,249,294 - Seesselberg , et al. February 15, 2 | 2022-02-15 |
Interactive And Iterative Training Of A Classification Algorithm For Classifying Anomalies In Imaging Datasets
App 20220044949 - Korb; Thomas ; et al. | 2022-02-10 |
Method For Producing Or Setting A Projection Exposure Apparatus
App 20220043358 - Freimann; Rolf | 2022-02-10 |
Method for determining an imaging function of a mask inspection microscope, and mask inspection microscope
Grant 11,243,392 - Seidel February 8, 2 | 2022-02-08 |
Method and apparatus for transforming measurement data of a photolithographic mask for the EUV range from first surroundings into second surroundings
Grant 11,243,464 - Blaesing-Bangert February 8, 2 | 2022-02-08 |
Method and apparatus for examining a measuring tip of a scanning probe microscope
Grant 11,237,187 - Kornilov , et al. February 1, 2 | 2022-02-01 |
Apparatus and method for a scanning probe microscope
Grant 11,237,185 - Matejka , et al. February 1, 2 | 2022-02-01 |
Projection Exposure Method And Projection Lens With Setting Of The Pupil Transmission
App 20220026814 - Gruner; Toralf | 2022-01-27 |
Arrangement for an EUV lithography apparatus
Grant 11,231,658 - Kierey , et al. January 25, 2 | 2022-01-25 |
Sealing Device, Component And Lithography Apparatus
App 20220019150 - Bader; Dieter ; et al. | 2022-01-20 |
Methods and apparatuses for designing optical systems using machine learning with delano diagrams
Grant 11,226,481 - Jabbour , et al. January 18, 2 | 2022-01-18 |
Measurement Method For Interferometrically Determining A Surface Shape
App 20220011095 - STIEPAN; Hans Michael ; et al. | 2022-01-13 |
Apparatus And Method For Removing A Single Particulate From A Substrate
App 20220011682 - Edinger; Klaus ; et al. | 2022-01-13 |
Projection Exposure Apparatus For Semiconductor Lithography Having An Optical Element With Sensor Reference And Method For Aligning The Sensor Reference
App 20220004111 - Nieland; Peter ; et al. | 2022-01-06 |
Optical Arrangement And Lithography Apparatus
App 20220004107 - Horn; Jan ; et al. | 2022-01-06 |
Method for polishing a workpiece in the production of an optical element
Grant 11,213,926 - Wolpert , et al. January 4, 2 | 2022-01-04 |
Compensation Of Creep Effects In An Imaging Device
App 20210405359 - Knauf; Eylem Bektas ; et al. | 2021-12-30 |
Compensation Of Creep Effects In An Imaging Device
App 20210405543 - Nefzi; Marwene ; et al. | 2021-12-30 |
Compensation Of Creep Effects In An Imaging Device
App 20210405358 - Knauf; Eylem Bektas ; et al. | 2021-12-30 |
Compensation Of Creep Effects In An Imaging Device
App 20210405542 - Nefzi; Marwene ; et al. | 2021-12-30 |
Apparatus And Method For Characterizing A Microlithographic Mask
App 20210397099 - Ruoff; Johannes ; et al. | 2021-12-23 |
Actuator Device And Method For Aligning An Optical Element, Optical Assembly And Projection Exposure Apparatus
App 20210389681 - Pnini-Mittler; Boaz | 2021-12-16 |
Method for removing a contamination layer by an atomic layer etching process
Grant 11,199,363 - Roozeboom , et al. December 14, 2 | 2021-12-14 |
Compensation optical system for an interferometric measuring system
Grant 11,199,396 - Hetzler , et al. December 14, 2 | 2021-12-14 |
Reflective optical element for EUV lithography and method for adapting a geometry of a component
Grant 11,199,780 - Dinger December 14, 2 | 2021-12-14 |
Euv Radiation Source, Insert For An Euv Radiation Source And Insert For An Insert For An Euv Radiation Source
App 20210382395 - Pilch; Iris ; et al. | 2021-12-09 |
Optical diffraction component for suppressing at least one target wavelength by destructive interference
Grant 11,194,256 - Feldmann , et al. December 7, 2 | 2021-12-07 |
Optical assembly having a thermally conductive component
Grant 11,194,119 - Kaller , et al. December 7, 2 | 2021-12-07 |
Device And Method For Characterizing The Surface Shape Of A Test Object
App 20210372781 - HETZLER; Jochen ; et al. | 2021-12-02 |
Method for determining properties of an EUV source
Grant 11,187,989 - Laufer , et al. November 30, 2 | 2021-11-30 |
Method and device for characterizing a mask for microlithography
Grant 11,188,000 - Kamp-Froese , et al. November 30, 2 | 2021-11-30 |
Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror
Grant 11,187,990 - Lippert , et al. November 30, 2 | 2021-11-30 |
Device And Method For Determining Placements Of Pattern Elements Of A Reflective Photolithographic Mask In The Operating Environment Thereof
App 20210364908 - Blaesing-Bangert; Carola | 2021-11-25 |
Control System, Optical System And Method
App 20210364926 - Hoffmann; Malte ; et al. | 2021-11-25 |
Optical Element Having A Coating For Influencing Heating Radiation And Optical Arrangement
App 20210364677 - Bittner; Boris ; et al. | 2021-11-25 |
Projection exposure method and projection exposure apparatus for microlithography
Grant 11,181,826 - Wolf November 23, 2 | 2021-11-23 |
Processing Image Data Sets
App 20210358101 - Neumann; Jens Timo ; et al. | 2021-11-18 |
Method for localizing assembly errors
Grant 11,175,595 - Niederhausen , et al. November 16, 2 | 2021-11-16 |
Beam Splitter For Achieving Grazing Incidence Of Light
App 20210349325 - Forcht; Konstantin | 2021-11-11 |
Projection Exposure System For Semiconductor Lithography Having An Optical Arrangement
App 20210349399 - Fingerhuth; Judith ; et al. | 2021-11-11 |
Method for positioning a component of an optical system
Grant 11,169,359 - Marsollek , et al. November 9, 2 | 2021-11-09 |
Methods and devices for examining an electrically charged specimen surface
Grant 11,170,970 - Budach , et al. November 9, 2 | 2021-11-09 |
Pupil facet mirror, optical system and illumination optics for a projection lithography system
Grant 11,169,445 - Bieling , et al. November 9, 2 | 2021-11-09 |
Method For In-situ Dynamic Protection Of A Surface And Optical Assembly
App 20210341848 - SHKLOVER; Vitaliy ; et al. | 2021-11-04 |
Method for determining material removal and device for the beam machining of a workpiece
Grant 11,162,778 - Bezold , et al. November 2, 2 | 2021-11-02 |
Method, measuring system and lithography apparatus
Grant 11,163,239 - Treubel , et al. November 2, 2 | 2021-11-02 |
Protection Device For Lines In A Projection Printing Installation For Semiconductor Lithography
App 20210336429 - Hegele; Tobias | 2021-10-28 |
Positioning system for a lithographic apparatus
Grant 11,156,925 - Kimman , et al. October 26, 2 | 2021-10-26 |
Method and device for determining the heating state of a mirror in an optical system
Grant 11,156,922 - De Rapper , et al. October 26, 2 | 2021-10-26 |
Method And Apparatus For Repairing Defects Of A Photolithographic Mask For The Euv Range
App 20210325775 - Steigerwald; Hendrik ; et al. | 2021-10-21 |
Method and apparatus for analyzing a defective location of a photolithographic mask
Grant 11,150,552 - Budach , et al. October 19, 2 | 2021-10-19 |
Optical Diffraction Component For Suppressing At Least One Target Wavelength By Destructive Interference
App 20210318622 - Feldmann; Heiko ; et al. | 2021-10-14 |
Method and device for inspection of semiconductor samples
Grant 11,145,556 - Zhao October 12, 2 | 2021-10-12 |
Projection exposure method and projection lens with setting of the pupil transmission
Grant 11,143,967 - Gruner October 12, 2 | 2021-10-12 |
Optical system for transferring original structure portions of a lithography mask, projection optical unit for imaging an object field in which at least one original structure portion of the lithography mask is arrangeable, and lithography mask
Grant 11,137,688 - Patra , et al. October 5, 2 | 2021-10-05 |
Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma
Grant 11,137,687 - Liebaug , et al. October 5, 2 | 2021-10-05 |
Method For Forming Nanostructures On A Surface And Optical Element
App 20210293996 - SHKLOVER; Vitaliy ; et al. | 2021-09-23 |
Method Of Recording An Image Using A Particle Microscope
App 20210296089 - Zeidler; Dirk ; et al. | 2021-09-23 |
Method For In Situ Protection Of An Aluminum Layer And Optical Arrangement For The Vuv Wavelength Range
App 20210293998 - SHKLOVER; Vitaliy | 2021-09-23 |
Method For Replacing A Mirror In A Projection Exposure Apparatus, And Position- And Orientation Data Measuring Device For Carrying Out The Method
App 20210294222 - PETRI; Christoph ; et al. | 2021-09-23 |
Component for a mirror array for EUV lithography
Grant 11,126,087 - Eva September 21, 2 | 2021-09-21 |
Method For Temperature Control Of A Component
App 20210286272 - Lof; Joeri ; et al. | 2021-09-16 |
Imaging optical unit for imaging an object field into an image field
Grant 11,119,413 - Ruoff , et al. September 14, 2 | 2021-09-14 |
Method and device for characterizing the surface shape of an optical element
Grant 11,118,900 - Riepenhausen , et al. September 14, 2 | 2021-09-14 |
Method and system for testing an integrated circuit
Grant 11,114,274 - Lundquist , et al. September 7, 2 | 2021-09-07 |
Optical element having a coating for influencing heating radiation and optical arrangement
Grant 11,112,543 - Bittner , et al. September 7, 2 | 2021-09-07 |
Device and method for characterizing a microlithographic mask
Grant 11,112,702 - Martin , et al. September 7, 2 | 2021-09-07 |
Pupil Facet Mirror, Illumination Optics And Optical System For A Projection Lithography System
App 20210263420 - Deguenther; Markus | 2021-08-26 |
Mirror For An Illumination Optical Unit Of A Projection Exposure Apparatus Comprising A Spectral Filter In The Form Of A Grating Structure And Method For Producing A Spectral Filter In The Form Of A Grating Structure On A Mirror
App 20210263423 - Jalics; Christof ; et al. | 2021-08-26 |
Method And Apparatus For Performing An Aerial Image Simulation Of A Photolithographic Mask
App 20210263406 - Dmitriev; Vladimir ; et al. | 2021-08-26 |
Illumination Optical System For Projection Lithography
App 20210263421 - Gang; Tian ; et al. | 2021-08-26 |
Beam propagation camera and method for light beam analysis
Grant 11,099,400 - Manger August 24, 2 | 2021-08-24 |
Reflective optical element
Grant 11,099,308 - Weigl , et al. August 24, 2 | 2021-08-24 |
Method for repairing reflective optical elements for EUV lithography
Grant 11,099,484 - Meier , et al. August 24, 2 | 2021-08-24 |
Module For A Projection Exposure Apparatus For Semiconductor Lithography With A Semi-active Spacer, And Method For Using The Semi-active Spacer
App 20210255554 - Pollak; Thilo ; et al. | 2021-08-19 |
Method For Measuring Photomasks
App 20210255541 - Simakov; Dmitry ; et al. | 2021-08-19 |
Method and device for characterizing the surface shape of an optical element
Grant 11,092,431 - Riepenhausen , et al. August 17, 2 | 2021-08-17 |
Method for producing a mirror as an optical component for an optical system of a projection exposure apparatus for projection lithography
Grant 11,092,897 - Hembacher August 17, 2 | 2021-08-17 |
Device And Method For Analysing A Defect Of A Photolithographic Mask Or Of A Wafer
App 20210247336 - Baralia; Gabriel ; et al. | 2021-08-12 |
Mirror, in particular for a microlithographic projection exposure apparatus or an inspection system
Grant 11,086,055 - Huber August 10, 2 | 2021-08-10 |
Method of operating a particle beam system, particle beam system and computer program product
Grant 11,087,957 - Fischer , et al. August 10, 2 | 2021-08-10 |
Device for determining the exposure energy during the exposure of an element in an optical system, in particular for microlithography
Grant 11,079,604 - Frank August 3, 2 | 2021-08-03 |
Measuring microscope for measuring masks for lithographic methods and measuring method and calibration method therefor
Grant 11,079,586 - Jackel , et al. August 3, 2 | 2021-08-03 |
Method and apparatus for ascertaining a repair shape for processing a defect of a photolithographic mask
Grant 11,079,674 - Oster , et al. August 3, 2 | 2021-08-03 |
Method and apparatus for repairing defects of a photolithographic mask for the EUV range
Grant 11,079,673 - Steigerwald , et al. August 3, 2 | 2021-08-03 |
Method for detecting a structure of a lithography mask and device for carrying out the method
Grant 11,079,338 - Matejka , et al. August 3, 2 | 2021-08-03 |
Method For Adusting A First Element Of A Lithography Apparatus Towards A Second Element Of A Lithography Apparatus By A Tunable Spacer
App 20210232051 - Pnini; Boaz | 2021-07-29 |
Optical System In Particular For Microlithography
App 20210231965 - Kraus; Johannes | 2021-07-29 |
Reflective optical element and optical system for EUV lithography having proportions of substances which differ across a surface
Grant 11,073,766 - Nottbohm July 27, 2 | 2021-07-27 |
Method for producing a reflective optical element and reflective optical element
Grant 11,073,765 - Enkisch July 27, 2 | 2021-07-27 |
Actuator Device For Aligning An Element, Projection Exposure Apparatus For Semiconductor Lithography, And Method For Aligning An Element
App 20210223705 - Pnini; Boaz | 2021-07-22 |
Device And Method For Measuring The Beam Angle Of A Light Beam Guided By A Beam Guiding Optical Unit
App 20210219409 - Baumer; Florian ; et al. | 2021-07-15 |
Method for determining a structure-independent contribution of a lithography mask to a fluctuation of the linewidth
Grant 11,061,331 - Koch , et al. July 13, 2 | 2021-07-13 |
Pupil facet mirror, illumination optics and optical system for a projection lithography system
Grant 11,061,334 - Deguenther July 13, 2 | 2021-07-13 |
Method and device for beam analysis
Grant 11,054,305 - Manger , et al. July 6, 2 | 2021-07-06 |
Optical module with an anticollision device for module components
Grant 11,054,755 - Hartjes , et al. July 6, 2 | 2021-07-06 |
Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode
Grant 11,054,439 - Baur July 6, 2 | 2021-07-06 |
Projection Exposure Apparatus For Semiconductor Lithography Including A Magnetic Damping Arrangement
App 20210200101 - Meinkuss; Philipp | 2021-07-01 |
Method for restoring an illumination system for an EUV apparatus, and detector module
Grant 11,048,173 - Baumer June 29, 2 | 2021-06-29 |
Projection exposure apparatus for semiconductor lithography with improved component adjustment and adjustment method
Grant 11,048,177 - Zweering June 29, 2 | 2021-06-29 |
Metrology System And Method For Measuring An Excitation Laser Beam In An Euv Plasma Source
App 20210190583 - Manger; Matthias ; et al. | 2021-06-24 |
Method And System For Testing An Integrated Circuit
App 20210193431 - Lundquist; Theodore ; et al. | 2021-06-24 |
Supporting An Optical Element
App 20210181644 - Kugler; Jens ; et al. | 2021-06-17 |
Device And Method For Processing A Microstructured Component
App 20210173310 - Auth; Nicole ; et al. | 2021-06-10 |
Radiation Source And Device For Feeding Back Emitted Radiation To A Laser Source
App 20210167569 - Dinger; Udo | 2021-06-03 |
Optical assembly with a protective element and optical arrangement therewith
Grant 11022893 - | 2021-06-01 |
Method for temperature control of a component
Grant 11022903 - | 2021-06-01 |
Method For Producing A Reflecting Optical Element Of A Projection Exposure Apparatus And Reflecting Optical Element For A Projection Exposure Apparatus, Projection Lens And Projection Exposure Apparatus
App 20210157244 - KAES; Matthias ; et al. | 2021-05-27 |
Wafer Inspection Methods And Devices
App 20210158498 - Saraswatula; Jagdish Chandra | 2021-05-27 |
Method And Device For Inspection Of Semiconductor Samples
App 20210159126 - Zhao; Si Ping | 2021-05-27 |
Method And Device For Evaluating A Statistically Distributed Measured Value In The Examination Of An Element Of A Photolithography Process
App 20210158215 - Seidel; Dirk ; et al. | 2021-05-27 |
Method And Assembly For Characterizing A Mask Or A Wafer For Microlithography
App 20210157243 - Carl; Michael ; et al. | 2021-05-27 |
Inspection Device For Masks For Semiconductor Lithography And Method
App 20210156809 - Seitz; Holger ; et al. | 2021-05-27 |
Method For Bending Hydroformed Cooling Devices And Bent Hydroformed Cooling Devices
App 20210154722 - Kara; Fatih ; et al. | 2021-05-27 |
Position Measurement Of Optical Elements In A Lithographic Apparatus
App 20210149309 - Loopstra; Erik ; et al. | 2021-05-20 |
Mirror For A Microlithographic Projection Exposure Apparatus, And Method For Operating A Deformable Mirror
App 20210149310 - LIPPERT; Johannes ; et al. | 2021-05-20 |
Method And Device For Determining The Heating State Of An Optical Element In An Optical System For Microlithography
App 20210148762 - Gruner; Toralf ; et al. | 2021-05-20 |
Substrate For An Euv-lithography Mirror
App 20210149093 - EKSTEIN; Claudia ; et al. | 2021-05-20 |
Method And Device For Characterizing The Surface Shape Of An Optical Element
App 20210140762 - SIEGLER; Steffen ; et al. | 2021-05-13 |
Lithography apparatus comprising a plurality of individually controllable write heads
Grant 11003090 - | 2021-05-11 |
Method and device for the correction of imaging defects
Grant 11003088 - | 2021-05-11 |
Illumination optical device for projection lithography
Grant 11003086 - | 2021-05-11 |
Devices And Methods For Examining And/or Processing An Element For Photolithography
App 20210132594 - Budach; Michael ; et al. | 2021-05-06 |
Reflective Optical Element
App 20210132269 - FORCHT; Konstantin ; et al. | 2021-05-06 |
Appliance for the moiré measurement of an optical test object
Grant 10996566 - | 2021-05-04 |
Optical element for the beam guidance of imaging light in projection lithography
Grant 10989897 - | 2021-04-27 |
Substrate For A Reflective Optical Element
App 20210116616 - EVA; Eric | 2021-04-22 |
Support Of An Optical Unit
App 20210116823 - Vogt; Martin ; et al. | 2021-04-22 |
Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device
Grant 10983443 - | 2021-04-20 |
Device and method for analysing a defect of a photolithographic mask or of a wafer
Grant 10983075 - | 2021-04-20 |
Method And Apparatus For Examining A Beam Of Charged Particles
App 20210110996 - Rhinow; Daniel ; et al. | 2021-04-15 |
Apparatus And Method For Examining And/or Processing A Sample
App 20210109126 - Baur; Christof ; et al. | 2021-04-15 |
Inspection System And Inspection Method To Qualify Semiconductor Structures
App 20210109046 - Lewis; Brett ; et al. | 2021-04-15 |
Optical manipulator, projection lens and projection exposure apparatus
Grant 10976667 - | 2021-04-13 |
Illumination optical unit and optical system for EUV projection lithography
Grant 10976668 - | 2021-04-13 |
Projection lighting system for semiconductor lithography with an improved heat transfer
Grant 10969699 - | 2021-04-06 |
Projection lens, projection exposure apparatus and projection exposure method
Grant 10969694 - | 2021-04-06 |
Optical Assembly For Reducing A Spectral Bandwidth Of An Output Beam Of A Laser
App 20210098958 - Kraus; Johannes ; et al. | 2021-04-01 |
Root Cause Analysis For Fabrication Processes Of Semiconductor Structures
App 20210097673 - Neumann; Jens Timo ; et al. | 2021-04-01 |
Microlithographic projection exposure apparatus
Grant 10955754 - | 2021-03-23 |
Measuring Assembly For The Frequency-based Determination Of The Position Of A Component
App 20210080244 - MANGER; Matthias ; et al. | 2021-03-18 |
Stop For Arrangement In A Constriction Of An Euv Illumination Beam
App 20210084741 - Patra; Michael | 2021-03-18 |
Projection Exposure Apparatus For Semiconductor Lithography
App 20210080841 - Kugler; Jens ; et al. | 2021-03-18 |
Method For Detecting An Object Structure And Apparatus For Carrying Out The Method
App 20210081693 - Mout; Beat Marco ; et al. | 2021-03-18 |
Metrology system having an EUV optical unit
Grant 10948637 - | 2021-03-16 |
Wafer holding device and projection microlithography system
Grant 10948833 - | 2021-03-16 |
Illumination optical element for projection lithography
Grant 10948828 - | 2021-03-16 |
Wafer Inspection Methods And Systems
App 20210073976 - Saraswatula; Jagdish Chandra ; et al. | 2021-03-11 |
Method For Producing A Substrate For An Optical Element, And Reflective Optical Element
App 20210072435 - SCHMEHL; Andreas ; et al. | 2021-03-11 |
Method And Apparatus For Evaluating An Unknown Effect Of Defects Of An Element Of A Photolithography Process
App 20210073969 - Freytag; Alexander ; et al. | 2021-03-11 |
Device And Method For Characterizing A Microlithographic Mask
App 20210063892 - Martin; Sven ; et al. | 2021-03-04 |
Optical system for microlithography
Grant 10935897 - | 2021-03-02 |
Substrate for an EUV-lithography mirror
Grant 10935704 - | 2021-03-02 |
Optical System For Transferring Original Structure Portions Of A Lithography Mask, Projection Optical Unit For Imaging An Object Field In Which At Least One Original Structure Portion Of The Lithography Mask Is Arrangeable, And Lithography Mask
App 20210055661 - PATRA; Michael ; et al. | 2021-02-25 |
Mirror, In Particular For A Microlithographic Projection Exposure System
App 20210055662 - HILD; Kerstin ; et al. | 2021-02-25 |
Inspection device for masks for semiconductor lithography and method
Grant 10928332 - | 2021-02-23 |
Illumination optic for projection lithography
Grant 10928733 - | 2021-02-23 |
Optical assembly for guiding an output beam of a free electron laser
Grant 10928734 - | 2021-02-23 |
Method And Apparatus For Removing A Particle From A Photolithographic Mask
App 20210048744 - Baur; Christof ; et al. | 2021-02-18 |
Positioning System for a Lithographic Apparatus
App 20210041793 - KIMMAN; Maarten Hartger ; et al. | 2021-02-11 |
Method And Device For Determining The Heating State Of A Mirror In An Optical System
App 20210041790 - De Rapper; Willem Michiel ; et al. | 2021-02-11 |
Reflective optical element
Grant 10916356 - | 2021-02-09 |
Electro-optical Circuit Board For Contacting Photonic Integrated Circuits
App 20210033643 - Huebner; Philipp ; et al. | 2021-02-04 |
Position measurement of optical elements in a lithographic apparatus
Grant 10908508 - | 2021-02-02 |
Mirror, in particular for a microlithographic projection exposure apparatus
Grant 10908509 - | 2021-02-02 |
Method, Measuring System And Lithography Apparatus
App 20210026252 - Treubel; Frank ; et al. | 2021-01-28 |
Method And Assembly For Analysing The Wavefront Effect Of An Optical System
App 20210022602 - FREIMANN; Rolf | 2021-01-28 |
Multi-scanning electron microscopy for wafer alignment
Grant 10901391 - | 2021-01-26 |
Optical imaging arrangement with actively adjustable metrology support units
Grant 10890850 - | 2021-01-12 |
Optical Arrangement For Euv Lithography
App 20210003926 - GONCHAR; Anastasia | 2021-01-07 |
Beam-forming And Illuminating System For A Lithography System, Lithography System, And Method
App 20210003925 - Holderer; Hubert ; et al. | 2021-01-07 |
Method And Device For Superimposing At Least Two Images Of A Photolithographic Mask
App 20200409255 - Tabbone; Gilles ; et al. | 2020-12-31 |
Device For Measuring Masks For Microlithography And Autofocusing Method
App 20200412939 - Laengle; Mario | 2020-12-31 |
Method, Computer Program And Apparatus For Determining A Quality Of A Mask Of A Photolithography Apparatus
App 20200410656 - Moebert; Tom ; et al. | 2020-12-31 |
Illumination intensity correction device for specifying an illumination intensity over an illumination field of a lithographic projection exposure apparatus
Grant 10877379 - | 2020-12-29 |
Methods And Systems For Defining A Process Window
App 20200402863 - Saraswatula; Jagdish Chandra ; et al. | 2020-12-24 |
Optical system for a projection exposure apparatus
Grant 10871717 - | 2020-12-22 |
Optical Element, And Method For Correcting The Wavefront Effect Of An Optical Element
App 20200393673 - HILD; Kerstin ; et al. | 2020-12-17 |
Microlithographic Mask, Method For Determining Edge Positions Of The Images Of The Structures Of Such A Mask And System For Carrying Out Such A Method
App 20200393751 - Hellweg; Dirk | 2020-12-17 |
Component for a projection exposure apparatus
Grant 10866528 - | 2020-12-15 |
Optical correction arrangement, projection objective having such an optical correction arrangement and microlithographic apparatus having such a projection objective
Grant 10859815 - | 2020-12-08 |
Method for changing a surface via particle irradiation
Grant 10859819 - | 2020-12-08 |
Method For Polishing A Workpiece In The Production Of An Optical Element
App 20200376623 - WOLPERT; Andreas ; et al. | 2020-12-03 |
Method For Determining An Imaging Function Of A Mask Inspection Microscope, And Mask Inspection Microscope
App 20200379237 - Seidel; Dirk | 2020-12-03 |
Control apparatus and method for controlling a manipulator in respect of a microlithographic projection exposure apparatus
Grant 10852642 - | 2020-12-01 |
Optical system, and method
Grant 10852643 - | 2020-12-01 |
Optical diffraction component for suppressing at least one target wavelength by destructive interference
Grant 10852640 - | 2020-12-01 |
Projection Exposure Method And Projection Exposure Apparatus For Microlithography
App 20200371444 - Wolf; Alexander | 2020-11-26 |
Image Sensor, Position Sensor Device, Lithography System, And Method For Operating An Image Sensor
App 20200363731 - Horn; Jan ; et al. | 2020-11-19 |
Method And Device For Characterizing A Mask For Microlithography
App 20200363737 - Kamp-Froese; Michael ; et al. | 2020-11-19 |
Optical Imaging Arrangement With A Piezoelectric Device
App 20200363628 - Kwan; Yim-Bun Patrick ; et al. | 2020-11-19 |
Optical system, in particular for a microlithographic projection exposure apparatus
Grant 10838306 - | 2020-11-17 |
Apparatus and method for operating an apparatus
Grant 10838307 - | 2020-11-17 |
Supporting An Optical Element
App 20200356010 - Korner; Christian ; et al. | 2020-11-12 |
Lithography apparatus and method
Grant 10831114 - | 2020-11-10 |
Imaging Optical Unit For Euv Microlithography
App 20200348602 - Ruoff; Johannes ; et al. | 2020-11-05 |
Illumination Optic For Projection Lithography
App 20200348600 - Patra; Michael | 2020-11-05 |
Illumination Optical Element For Projection Lithography
App 20200341385 - Bieling; Stig ; et al. | 2020-10-29 |
Illumination Optical Device For Projection Lithography
App 20200341384 - Bieling; Stig ; et al. | 2020-10-29 |
Pupil Facet Mirror, Illumination Optics And Optical System For A Projection Lithography System
App 20200333712 - Deguenther; Markus | 2020-10-22 |
Optical Elment For The Beam Guidance Of Imaging Light In Projection Lithography
App 20200333557 - Hembacher; Stefan ; et al. | 2020-10-22 |
Projection Exposure Apparatus For Semiconductor Lithography With Improved Component Adjustment And Adjustment Method
App 20200333715 - Zweering; Ralf | 2020-10-22 |
Method for correcting a reflective optical element for the wavelength range between 5 nm and 20 nm
Grant 10809630 - | 2020-10-20 |
Intensity adaptation filter for EUV microlithography, method for producing same, and illumination system having a corresponding filter
Grant 10809625 - | 2020-10-20 |
Optical arrangement, in particular lithography system
Grant 10809636 - | 2020-10-20 |
Method for the microlithographic production of microstructured components
Grant 10802403 - | 2020-10-13 |
Objective For A Microscope
App 20200310093 - WARTMANN; Rolf | 2020-10-01 |
Method And Apparatus For Determining A Wavefront Of A Massive Particle Beam
App 20200312613 - Welte; Joachim ; et al. | 2020-10-01 |
Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out
Grant 10788748 - | 2020-09-29 |
Method for examining photolithographic masks and mask metrology apparatus for performing the method
Grant 10775691 - | 2020-09-15 |
Beam reverser module and optical power amplifier having such a beam reverser module
Grant 10777958 - | 2020-09-15 |
Method And Device For Calibrating A Diffractive Measuring Structure
App 20200284689 - SAMANIEGO; Michael | 2020-09-10 |
Arrangement For An Euv Lithography Apparatus
App 20200285142 - KIEREY; Holger ; et al. | 2020-09-10 |
Method For The Qualification Of A Mask For Microlithography
App 20200285158 - Hellweg; Dirk | 2020-09-10 |
Method And Devices For Determining Metrology Sites
App 20200285976 - Srikantha; Abhilash ; et al. | 2020-09-10 |
Microlithographic mask, method for determining edge positions of the images of the structures of such a mask and system for carrying out such a method
Grant 10761420 - | 2020-09-01 |
Device for swiveling a mirror element with two degrees of swiveling freedom
Grant 10761317 - | 2020-09-01 |
Projection exposure method and projection exposure apparatus for microlithography
Grant 10761429 - | 2020-09-01 |
Optical arrangement, in particular lithography system, with a transport lock
Grant 10761436 - | 2020-09-01 |
Pupil Facet Mirror, Optical System And Illumination Optics For A Projection Lithography System
App 20200272058 - Bieling; Stig ; et al. | 2020-08-27 |
Illumination Intensity Correction Device For Specifying An Illumination Intensity Over An Illumination Field Of A Lithographic P
App 20200272060 - Van Gorkom; Ramon ; et al. | 2020-08-27 |
Imaging optical system for microlithography
Grant 10754132 - | 2020-08-25 |
Error Reduction In Images Which Were Generated With Charged Particles And With The Aid Of Machine-learning-based Methods
App 20200258212 - A1 | 2020-08-13 |
Support Of An Optical Element
App 20200249577 - Kind Code | 2020-08-06 |
Apparatus And Method For Repairing A Photolithographic Mask
App 20200249564 - Kind Code | 2020-08-06 |
Method For Restoring An Illumination System For An Euv Apparatus, And Detector Module
App 20200249575 - Kind Code | 2020-08-06 |
Method and device for permanently repairing defects of absent material of a photolithographic mask
Grant 10732501 - | 2020-08-04 |
Optical imaging arrangement with a piezoelectric device
Grant 10732402 - | 2020-08-04 |
Method and device for the simulation of a photolithographic process for generating a wafer structure
Grant 10733337 - | 2020-08-04 |
Microlithographic Projection Exposure Apparatus
App 20200241426 - Klein; Bertram | 2020-07-30 |
Apparatus And Method For Determining A Position Of An Element On A Photolithographic Mask
App 20200233299 - Budach; Michael ; et al. | 2020-07-23 |
Method And Device For The Correction Of Imaging Defects
App 20200233314 - Sorg; Franz ; et al. | 2020-07-23 |
Method for temperature control of a component
App 20200233318 - Lof; Joeri ; et al. | 2020-07-23 |
Method Of Operating A Particle Beam System, Particle Beam System And Computer Program Product
App 20200234913A1 - | 2020-07-23 |
Method And Device For Characterizing The Surface Shape Of An Optical Element
App 20200225029 - RIEPENHAUSEN; Frank ; et al. | 2020-07-16 |
Optical Diffraction Component For Suppressing At Least One Target Wavelength By Destructive Interference
App 20200225586 - Feldmann; Heiko ; et al. | 2020-07-16 |
Compensation Optical System For An Interferometric Measuring System
App 20200225028 - HETZLER; Jochen ; et al. | 2020-07-16 |
Control Apparatus And Method For Controlling A Manipulator In Respect Of A Microlithographic Projection Exposure Apparatus
App 20200225587 - Butscher; Bjoern ; et al. | 2020-07-16 |
Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning
Grant 10712677 - | 2020-07-14 |
Method For Characterising At Least One Optical Component Of A Projection Exposure Apparatus
App 20200218160 - KRUITHOF; Wilbert ; et al. | 2020-07-09 |
Optical System For A Projection Exposure Apparatus
App 20200218164 - Patra; Michael | 2020-07-09 |
Wafer Holding Device And Projection Microlithography System
App 20200218163 - FREIMANN; Rolf | 2020-07-09 |
Method For Determining Properties Of An Euv Source
App 20200218159 - Laufer; Timo ; et al. | 2020-07-09 |
Imaging Optical Unit For Imaging An Object Field Into An Image Field
App 20200218045 - Ruoff; Johannes ; et al. | 2020-07-09 |
Method For Producing A Mirror As An Optical Component For An Optical System Of A Projection Exposure Apparatus For Projection Li
App 20200206855 - Hembacher; Stefan | 2020-07-02 |
Optical Arrangement And Method For Repairing The Optical Arrangement After A Shock Load
App 20200209758 - Hartjes; Joachim | 2020-07-02 |
Lithographic Apparatus, Lithographic Projection Apparatus and Device Manufacturing Method
App 20200209757A1 - | 2020-07-02 |
Measuring method and measuring system for interferometrically measuring the imaging quality
Grant 10697852 - | 2020-06-30 |
Method and device for characterizing a mask for microlithography
Grant 10698318 - | 2020-06-30 |
Method For Machining A Workpiece In The Production Of An Optical Element
App 20200198086 - Matena; Manfred ; et al. | 2020-06-25 |
Optical element and optical system for EUV lithography, and method for treating such an optical element
Grant 10690812 - | 2020-06-23 |
Detection Device For Detecting A Structure On An Area Portion Of A Lithography Mask, And Apparatus Comprising A Detection Device
App 20200191728 - Matejka; Ulrich ; et al. | 2020-06-18 |
Mirror arrangement for lithography exposure apparatus and optical system comprising mirror arrangement
Grant 10684466 - | 2020-06-16 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Grant 10684551 - | 2020-06-16 |
Wavefront correction element for use in an optical system
Grant 10684553 - | 2020-06-16 |
Method For Operating An Optical Apparatus, And Optical Apparatus
App 20200183292 - BECKER; Moritz ; et al. | 2020-06-11 |
Projection exposure method and projection exposure apparatus for microlithography
Grant 10678144 - | 2020-06-09 |
Zoom system with interchangeable optical elements
Grant 10678033 - | 2020-06-09 |
Control device
Grant 10678151 - | 2020-06-09 |
Mirror, In Particular For A Microlithographic Projection Exposure System
App 20200174379 - WYLIE-VAN EERD; Ben ; et al. | 2020-06-04 |
Reflective Optical Element For Euv Lithography And Method For Adapting A Geometry Of A Component
App 20200174378 - DINGER; Udo | 2020-06-04 |
Optical System For Microlithography
App 20200166857 - GROSSMANN; Jan | 2020-05-28 |
Optical Arrangement For Euv Radiation With A Shield For Protection Against The Etching Effect Of A Plasma
App 20200166847 - LIEBAUG; Bjoern ; et al. | 2020-05-28 |
Lithography Apparatus Comprising A Plurality Of Individually Controllable Write Heads
App 20200166852 - Richter; Stefan ; et al. | 2020-05-28 |
Weight-force Compensation Device
App 20200159131 - Erath; Michael | 2020-05-21 |
Optical Element For The Beam Guidance Of Imaging Light In Projection Lithography
App 20200150544 - Prochnau; Jens ; et al. | 2020-05-14 |
Method And Apparatus For Examining A Measuring Tip Of A Scanning Probe Microscope
App 20200141972 - Kornilov; Kinga ; et al. | 2020-05-07 |
Method For Removing A Contamination Layer By An Atomic Layer Etching Process
App 20200142327 - ROOZEBOOM; Fred ; et al. | 2020-05-07 |
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