Carl Zeiss SMS GmbH

Patent Applications and Registrations

Patent applications and USPTO patent grants for Carl Zeiss SMS GmbH.The latest application filed is for "scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope".

Company Profile

0.66.48

Carl Zeiss SMS GmbH - Jena N/A DE
Carl Zeiss SMS GmbH. - Jena DE
Carl Zeiss SMS GmbH -

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for calibrating a position-measuring system and position-measuring system Grant 9,528,825 - Blaesing-Bangert , et al. December 27, 2	2016-12-27
Method and apparatus for correcting errors on a wafer processed by a photolithographic mask Grant 9,436,080 - Beyer , et al. September 6, 2	2016-09-06
Method for determining the performance of a photolithographic mask Grant 9,431,212 - Waiblinger , et al. August 30, 2	2016-08-30
Method for establishing distortion properties of an optical system in a microlithographic measurement system Grant 9,366,637 - Laengle June 14, 2	2016-06-14
Method for measuring a lithography mask or a mask blank Grant 9,354,048 - Blaesing-Bangert May 31, 2	2016-05-31
Method for determining the registration of a structure on a photomask and apparatus to perform the method Grant 9,303,975 - Arnz , et al. April 5, 2	2016-04-05
Grating-assisted autofocus device and autofocusing method for an imaging device Grant 9,297,994 - Perlitz , et al. March 29, 2	2016-03-29
Microscope and method for characterizing structures on an object Grant 9,268,124 - Seitz , et al. February 23, 2	2016-02-23
Method for analyzing a photomask Grant 9,261,775 - Garetto , et al. February 16, 2	2016-02-16
Temperature sensor and method for measuring a temperature change Grant 9,255,876 - Schnier February 9, 2	2016-02-09
Scanning Particle Microscope And Method For Determining A Position Change Of A Particle Beam Of The Scanning Particle Microscope App 20150380210 - Budach; Michael ; et al.	2015-12-31
Method for characterizing a structure on a mask and device for carrying out said method Grant 9,213,003 - Perlitz December 15, 2	2015-12-15
Method for simulating an aerial image Grant 9,207,544 - Matejka December 8, 2	2015-12-08
Method For Measuring A Lithography Mask Or A Mask Blank App 20150330777 - Blaesing-Bangert; Carola	2015-11-19
Microscope and microscopy method for space-resolved measurement of a predetermined structure, in particular a structure of a lithographic mask Grant 9,134,626 - Mann , et al. September 15, 2	2015-09-15
Apparatus and method for investigating an object Grant 9,115,981 - Baur , et al. August 25, 2	2015-08-25
Microscope for reticle inspection with variable illumination settings Grant 9,116,447 - Stroessner August 25, 2	2015-08-25
Microscope illumination Grant 9,097,911 - Langle , et al. August 4, 2	2015-08-04
Emulation Of Reproduction Of Masks Corrected By Local Density Variations App 20150198798 - Seitz; Holger ; et al.	2015-07-16
Method and device for examining a mask App 20150198541 - Trautzsch; Thomas ; et al.	2015-07-16
Apparatus And Method For Correlating Images Of A Photolithographic Mask App 20150169997 - Weber; Dieter ; et al.	2015-06-18
Controllable transmission and phase compensation of transparent material Grant 9,034,539 - Oshemkov , et al. May 19, 2	2015-05-19
Method for electron beam induced etching Grant 9,023,666 - Auth , et al. May 5, 2	2015-05-05
Mask inspection microscope with variable illumination setting Grant 8,970,951 - Matejka , et al. March 3, 2	2015-03-03
Method For Calibrating A Position-measuring System And Position-measuring System App 20150013427 - Blaesing-Bangert; Carola ; et al.	2015-01-15
Method for emulation of a photolithographic process and mask inspection microscope for performing the method Grant 8,913,120 - Poortinga , et al. December 16, 2	2014-12-16
Optically Transparent And Electrically Conductive Coatings And Method For Their Deposition On A Substrate App 20140295330 - Pruneri; Valerio ; et al.	2014-10-02
Method For Analyzing A Photomask App 20140254915 - Garetto; Anthony ; et al.	2014-09-11
Method And Apparatus For Protecting A Substrate During Processing By A Particle Beam App 20140255831 - Hofmann; Thorsten ; et al.	2014-09-11
Apparatus and method for analyzing and modifying a specimen surface Grant 8,769,709 - Baur , et al. July 1, 2	2014-07-01
Method And Apparatus For Analyzing And For Removing A Defect Of An Euv Photomask App 20140165236 - Budach; Michael ; et al.	2014-06-12
Method and apparatus for measuring structures on photolithography masks Grant 8,736,849 - Stroessner , et al. May 27, 2	2014-05-27
Method and apparatus for modifying a substrate surface of a photolithographic mask Grant 8,735,030 - Oshemkov , et al. May 27, 2	2014-05-27
Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section Grant 8,731,273 - Arnz , et al. May 20, 2	2014-05-20
Method and apparatus for measuring of masks for the photo-lithography Grant 8,730,474 - Scheruebl , et al. May 20, 2	2014-05-20
Method for analyzing masks for photolithography Grant 8,718,354 - Stroessner , et al. May 6, 2	2014-05-06
Method for determining the position of a structure within an image and position measuring device for carrying out the method Grant 8,717,581 - Laengle May 6, 2	2014-05-06
Method for mask inspection for mask design and mask production Grant 8,705,838 - Boehm , et al. April 22, 2	2014-04-22
Method and apparatus for the position determination of structures on a mask for microlithography Grant 8,694,929 - Seidel , et al. April 8, 2	2014-04-08
Determination of the relative position of two structures Grant 8,693,805 - Arnz , et al. April 8, 2	2014-04-08
Method and apparatus for analyzing and/or repairing of an EUV mask defect Grant 8,674,329 - Budach , et al. March 18, 2	2014-03-18
Method for electron beam induced etching of layers contaminated with gallium Grant 8,632,687 - Auth , et al. January 21, 2	2014-01-21
Methods and systems for removing a material from a sample Grant 8,623,230 - Auth , et al. January 7, 2	2014-01-07
Apparatus And Method For Analyzing And Modifying A Specimen Surface App 20140007306 - Baur; Christof ; et al.	2014-01-02
Method and calibration mask for calibrating a position measuring apparatus Grant 8,617,774 - Kerwien , et al. December 31, 2	2013-12-31
Microscope And Method For Characterizing Structures On An Object App 20130321609 - Seitz; Holger ; et al.	2013-12-05
Method For Characterizing A Structure On A Mask And Device For Carrying Out Said Method App 20130308125 - Perlitz; Sascha	2013-11-21
Irradiation Module For A Measuring Apparatus App 20130293962 - Schnier; Dietmar	2013-11-07
Temperature Sensor And Method For Measuring A Temperature Change App 20130258342 - Schnier; Dietmar	2013-10-03
Verification method for repairs on photolithography masks Grant 8,515,154 - Scherubl , et al. August 20, 2	2013-08-20
Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage Grant 8,473,237 - Huebel , et al. June 25, 2	2013-06-25
Method and device for determining the position of an edge of a marker structure with subpixel accuracy in an image, having a plurality of pixels, of the marker structure Grant 8,457,411 - Arnz June 4, 2	2013-06-04
Method For Determining The Performance Of A Photolithographic Mask App 20130126728 - Waiblinger; Markus ; et al.	2013-05-23
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection Grant RE44,216 - Totzeck , et al. May 14, 2	2013-05-14
Method for determination of residual errors Grant 8,416,412 - Schellhorn , et al. April 9, 2	2013-04-09
Charged particle beam exposure system and beam manipulating arrangement Grant 8,368,030 - Platzgummer , et al. February 5, 2	2013-02-05
Particle-optical system Grant 8,368,015 - Platzgummer , et al. February 5, 2	2013-02-05
Method for electron beam induced deposition of conductive material Grant 8,318,593 - Auth , et al. November 27, 2	2012-11-27
Method for repairing phase shift masks Grant 8,268,516 - Zibold , et al. September 18, 2	2012-09-18
Method and apparatus for analyzing a group of photolithographic masks Grant 8,264,535 - Kienzle , et al. September 11, 2	2012-09-11
Method and apparatus for determining the relative overlay shift of stacked layers Grant 8,260,033 - Arnz , et al. September 4, 2	2012-09-04
Device and method for measuring lithography masks Grant 8,253,947 - Hof , et al. August 28, 2	2012-08-28
Apparatus and method for investigating and/or modifying a sample Grant 8,247,782 - Edinger , et al. August 21, 2	2012-08-21
Mask Inspection Microscope With Variable Illumination Setting App 20120162755 - Stroessner; Ulrich ; et al.	2012-06-28
Method And Calibration Mask For Calibrating A Position Measuring Apparatus App 20120160007 - Kerwien; Norbert ; et al.	2012-06-28
Method And Apparatus For Correcting Errors On A Wafer Processed By A Photolithographic Mask App 20120154773 - Beyer; Dirk	2012-06-21
Determination Of The Relative Position Of Two Structures App 20120121205 - Arnz; Michael ; et al.	2012-05-17
Method for Determining the Position of a Structure Within an Image and Position Measuring Device for Carrying Out the Method App 20120081712 - Laengle; Mario	2012-04-05
Method For Characterizing A Feature On A Mask And Device For Carrying Out The Method App 20120075456 - Seitz; Holger	2012-03-29
Charged particle system Grant 8,049,189 - Buschbeck , et al. November 1, 2	2011-11-01
Method And Apparatus For Measuring Structures On Photolithography Masks App 20110242544 - Stroessner; Ulrich ; et al.	2011-10-06
Charged particle beam exposure system Grant 8,026,495 - Platzgummer September 27, 2	2011-09-27
Method And Device For Measuring The Relative Local Position Error Of One Of The Sections Of An Object That Is Exposed Section By Section App 20110229010 - Arnz; Michael ; et al.	2011-09-22
Apparatus And Method For Investigating And/or Modifying A Sample App 20110210181 - Edinger; Klaus ; et al.	2011-09-01
Device And Method For Measuring Lithography Masks App 20110205549 - Hof; Albrecht ; et al.	2011-08-25
Method For Analyzing Masks For Photolithography App 20110188732 - STROESSNER; ULRICH	2011-08-04
Method For Electron Beam Induced Etching App 20110183444 - Auth; Nicole ; et al.	2011-07-28
Method For Electron Beam Induced Deposition Of Conductive Material App 20110183517 - Auth; Nicole ; et al.	2011-07-28
Method For Electron Beam Induced Etching Of Layers Contaminated With Gallium App 20110183523 - Auth; Nicole ; et al.	2011-07-28
Microscope For Reticle Inspection With Variable Illumination Settings App 20110164313 - Stroessner; Ulrich	2011-07-07
Method for determining intensity distribution in the image plane of a projection exposure arrangement Grant 7,961,297 - Greif-Wuestenbecker , et al. June 14, 2	2011-06-14
Method For Emulation Of A Photolithographic Process And Mask Inspection Microscope For Performing The Method App 20110090329 - Poortinga; Eric ; et al.	2011-04-21
Method and arrangement for repairing photolithography masks Grant 7,916,930 - Zibold , et al. March 29, 2	2011-03-29
Device and method for the interferometric measurement of phase masks Grant 7,911,624 - Haidner , et al. March 22, 2	2011-03-22
Method For Processing An Object With Miniaturized Structures App 20100297362 - Budach; Michael ; et al.	2010-11-25
Method for determining the image quality of an optical imaging system Grant 7,831,105 - Engel , et al. November 9, 2	2010-11-09
Particle-Optical System App 20100270474 - Platzgummer; Elmar ; et al.	2010-10-28
Method For Repairing Phase Shift Masks App 20100266937 - Zibold; Axel ; et al.	2010-10-21
Verification Method For Repairs On Photolithography Masks App 20100254591 - Scherubl; Thomas ; et al.	2010-10-07
Method And Device For Determining The Position Of An Edge Of A Marker Structure With Subpixel Accuracy In An Image, Having A Plurality Of Pixels, Of The Marker Structure App 20100254611 - Arnz; Michael	2010-10-07
Method For Calibrating A Specimen Stage Of A Metrology System And Metrology System Comprising A Specimen Stage App 20100241384 - Huebel; Alexander ; et al.	2010-09-23
Method For Determination Of Residual Errors App 20100097608 - Schellhorn; Uwe ; et al.	2010-04-22
Endoscope Apparatus App 20090303316 - Iwasaki; Tomoki ; et al.	2009-12-10
Method and device for analysing the imaging behavior of an optical imaging element Grant 7,626,689 - Stroessner , et al. December 1, 2	2009-12-01
Charged Particle Beam Exposure System App 20090212240 - Platzgummer; Elmar ; et al.	2009-08-27
Charged particle beam exposure system and beam manipulating arrangement App 20090140160 - Platzgummer; Elmar ; et al.	2009-06-04
Imaging system for emulation of a high aperture scanning system Grant 7,535,640 - Totzeck , et al. May 19, 2	2009-05-19
Arrangement for inspecting objects, especially masks in microlithography Grant 7,525,115 - Dobschal , et al. April 28, 2	2009-04-28
Method and Device for Analysing the Imaging Behavior of an Optical Imaging Element App 20080297775 - Greif-Wustenbecker; Jorn ; et al.	2008-12-04
Optical component for beam shaping Grant 7,443,589 - Erdmann , et al. October 28, 2	2008-10-28
Device and Method for the Interferometric Measurement of Phase Masks App 20080231862 - Haidner; Helmut ; et al.	2008-09-25
Method for Determining Intensity Distribution in the Image Plane of a Projection Exposure Arrangement App 20080212060 - Greif-Wuestenbecker; Joern ; et al.	2008-09-04
Charged Particle System App 20080210887 - Buschbeck; Herbert ; et al.	2008-09-04
Advanced pattern definition for particle-beam exposure Grant 7,368,738 - Platzgummer May 6, 2	2008-05-06
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection Grant 7,286,284 - Totzeck , et al. October 23, 2	2007-10-23
Light detector with enhanced quantum efficiency App 20050116144 - Hartung, Frank ; et al.	2005-06-02

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