| Patent | Date |
|---|
Lithographic objective having a first lens group including only lenses having a positive refractive power
Grant 7,289,279 - Schuster , et al. October 30, 2 | 2007-10-30 |
Projection objective having adjacently mounted aspheric lens surfaces
Grant 7,154,678 - Schuster , et al. December 26, 2 | 2006-12-26 |
Illumination system particularly for microlithography
App 20060245540 - Schultz; Jorg ; et al. | 2006-11-02 |
Lithographic objective having a first lens group including only lenses having a positive refractive power
App 20060176573 - Schuster; Karl-Heinz ; et al. | 2006-08-10 |
Catadioptric multi-mirror systems for projection lithography
App 20060109559 - Hudyma; Russell ; et al. | 2006-05-25 |
Lithographic objective having a first lens group including only lenses having a positive refractive power
Grant 7,023,627 - Schuster , et al. April 4, 2 | 2006-04-04 |
Illumination system particularly for microlithography
Grant 7,006,595 - Singer , et al. February 28, 2 | 2006-02-28 |
Device and method for changing the stress-induced birefringence and/or the thickness of an optical component
Grant 6,937,394 - Labus August 30, 2 | 2005-08-30 |
Method for adjusting a lamp relative to an illuminating beam path of a microscope and a microscope suitable for carrying out the method
App 20050117210 - Ott, Peter | 2005-06-02 |
Optical system with isolated measuring structure
Grant 6,864,988 - Hof , et al. March 8, 2 | 2005-03-08 |
Method for adjusting a lamp relative to an illuminating beam path of a microscope and a microscope suitable for carrying out the method
Grant 6,862,137 - Ott March 1, 2 | 2005-03-01 |
Lithographic objective having a first lens group including only lenses having a positive refractive power
App 20040228001 - Schuster, Karl-Heinz ; et al. | 2004-11-18 |
Geometric beamsplitter and method for its fabrication
Grant 6,809,871 - Heller , et al. October 26, 2 | 2004-10-26 |
Projection exposure apparatus for microlithography
Grant 6,788,471 - Wagner , et al. September 7, 2 | 2004-09-07 |
Lithographic objective having a first lens group including only lenses having a positive refractive power
Grant 6,788,387 - Schuster , et al. September 7, 2 | 2004-09-07 |
Projection exposure system as well as a process for compensating image defects occuring in the projection optics of a projection exposure system, in particular for microlithography
Grant 6,784,977 - von Bunau , et al. August 31, 2 | 2004-08-31 |
Optical imaging system with polarizer and a crystalline-quartz plate for use therewith
Grant 6,774,984 - Gerhard August 10, 2 | 2004-08-10 |
Mount for an optical element in an optical imaging device
Grant 6,744,574 - Weber , et al. June 1, 2 | 2004-06-01 |
Optical integrator for an illumination device
Grant 6,733,165 - Van Der Lei , et al. May 11, 2 | 2004-05-11 |
Method and apparatus for polishing or lapping an aspherical surface of a work piece
Grant 6,733,369 - Stacklies , et al. May 11, 2 | 2004-05-11 |
Diffractive optical element and also optical arrangement comprising a diffractive optical element
Grant 6,728,036 - Kleemann , et al. April 27, 2 | 2004-04-27 |
Microlithographic illumination method and a projection lens for carrying out the method
Grant 6,728,043 - Gruner , et al. April 27, 2 | 2004-04-27 |
Catadioptric reduction lens
Grant 6,717,746 - Epple , et al. April 6, 2 | 2004-04-06 |
Projection exposure system
Grant 6,707,537 - Dieckmann , et al. March 16, 2 | 2004-03-16 |
Method for focus detection and an imaging system with a focus-detection system
App 20040000627 - Schuster, Karl-Heinz | 2004-01-01 |
Method and a device for determining the radiation-damage resistance of an optical material
App 20030223065 - Wang, Hexin | 2003-12-04 |
Projection objective having adjacently mounted aspheric lens surfaces
Grant 6,646,718 - Schuster , et al. November 11, 2 | 2003-11-11 |
Illumination system with reduced heat load
Grant 6,611,574 - Singer , et al. August 26, 2 | 2003-08-26 |
Method and system for measuring the imaging quality of an optical imaging system
App 20030137655 - Wegmann, Ulrich | 2003-07-24 |
Objective with lenses made of a crystalline material
App 20030137733 - Gerhard, Michael ; et al. | 2003-07-24 |
Illumination system particularly for microlithography
App 20030095622 - Schultz, Jorg ; et al. | 2003-05-22 |
Zoom system for an illumination device
App 20030090638 - Koehler, Jess ; et al. | 2003-05-15 |
Illumination system particularly for microlithography
App 20030086524 - Schultz, Jorg ; et al. | 2003-05-08 |
Method and coating system for coating substrates for optical components
App 20030082298 - Bauer, Harry ; et al. | 2003-05-01 |
Point-diffraction interferometer
App 20030067611 - Visser, Hugo Matthieu | 2003-04-10 |
Mount for an optical element in an optical imaging device
App 20030058551 - Weber, Ulrich ; et al. | 2003-03-27 |
Geometric beamsplitter and method for its fabrication
App 20030026001 - Heller, Matthias ; et al. | 2003-02-06 |
Catadioptric reduction lens
App 20030021040 - Epple, Alexander ; et al. | 2003-01-30 |
Optical system with a plurality of optical elements
App 20030010902 - Hof, Albrecht ; et al. | 2003-01-16 |
Attenuating filter for ultraviolet light
App 20020191310 - Weigl, Bernhard ; et al. | 2002-12-19 |
Microlithographic illumination method and a projection lens for carrying out the method
App 20020191288 - Gruner, Toralf ; et al. | 2002-12-19 |
Optical imaging system with polarizer and a crystalline-quartz plate for use therewith
App 20020186462 - Gerhard, Michael | 2002-12-12 |
Polarizer and microlithography projection system with a polarizer
App 20020176166 - Schuster, Karl-Heinz | 2002-11-28 |
Catadioptric reduction lens
App 20020167737 - Perrin, Jean Claude ; et al. | 2002-11-14 |
Optical beam guidance system and method for preventing contamination of optical components contained therein
App 20020145808 - Freitag, Ansgar ; et al. | 2002-10-10 |
Optical integrator for an illumination device
App 20020126931 - Van Der Lei, Sijbe Abraham ; et al. | 2002-09-12 |
Coating of optical elements, in particular for use with ultraviolet light
App 20020114880 - Dreistein, Joerg ; et al. | 2002-08-22 |
Antireflection coating for ultraviolet light at large angles of incidence
App 20020114068 - Kuschnereit, Ralf ; et al. | 2002-08-22 |
Holding device for an optical element made of a crystalline material
App 20020108928 - Hartmaier, Jurgen ; et al. | 2002-08-15 |
Antireflection coating for ultraviolet light
App 20020105721 - Paul, Hans-Jochen ; et al. | 2002-08-08 |
| 