Patent | Date |
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Optical imaging device and imaging method for microscopy Grant 10,422,985 - Epple , et al. Sept | 2019-09-24 |
Optical element Grant 9,933,711 - Shklover , et al. April 3, 2 | 2018-04-03 |
Reflective optical element for grazing incidence in the EUV wavelength range Grant 9,703,209 - Shklover July 11, 2 | 2017-07-11 |
Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type Grant 9,541,685 - Kierey , et al. January 10, 2 | 2017-01-10 |
Mirror with dielectric coating Grant 9,297,936 - Erxmeyer , et al. March 29, 2 | 2016-03-29 |
Optical arrangement for converting an incident light beam, method for converting a light beam to a line focus, and optical device therefor Grant 9,042,032 - Muenz May 26, 2 | 2015-05-26 |
Optical Imaging Device And Imaging Method For Microscopy App 20150124075 - Epple; Alexander ;   et al. | 2015-05-07 |
Method For Repairing Optical Elements, And Optical Element App 20150092170 - Ehrler; Oli ;   et al. | 2015-04-02 |
Cooler For Plasma Generation Chamber Of Euv Radiation Source App 20150083938 - Anderl; Willi ;   et al. | 2015-03-26 |
Reflective Optical Element For Grazing Incidence In The Euv Wavelength Range App 20150009480 - Shklover; Vitaliy | 2015-01-08 |
Optical Element App 20140211181 - Shklover; Vitaliy ;   et al. | 2014-07-31 |
Illumination apparatus and method for controlling energy of a laser source Grant 8,723,073 - Weigl , et al. May 13, 2 | 2014-05-13 |
Optical Arrangement For Converting An Incident Light Beam, Method For Converting A Light Beam To A Line Focus, And Optical Device Therefor App 20140118843 - Muenz; Holger | 2014-05-01 |
Method For Producing A Reflective Optical Component For An Euv Projection Exposure Apparatus And Component Of This Type App 20130335816 - Kierey; Holger ;   et al. | 2013-12-19 |
Holding arrangement for an optical element Grant 8,508,868 - Weber , et al. August 13, 2 | 2013-08-13 |
Euv Collector Mirror Shell Of An Euv Collector For Euv Lithography App 20130176614 - Anderl; Willi ;   et al. | 2013-07-11 |
Holding arrangement for an optical element Grant 8,456,771 - Weber , et al. June 4, 2 | 2013-06-04 |
Optical system having heat dissipation arrangement Grant 8,456,615 - Holderer , et al. June 4, 2 | 2013-06-04 |
Optical arrangement, method of use, and method for determining a diffraction grating Grant 8,441,729 - Kleemann May 14, 2 | 2013-05-14 |
Mirror With Dielectric Coating App 20130083411 - ERXMEYER; Jeffrey ;   et al. | 2013-04-04 |
Reflective optical element for use in an EUV system Grant 8,342,701 - Kierey , et al. January 1, 2 | 2013-01-01 |
Method for measuring a spectrum of a narrowband light source, and spectrometer arrangement Grant 8,289,520 - Kraus , et al. October 16, 2 | 2012-10-16 |
Optical System For Generating A Light Beam For Treating A Substrate App 20120153189 - Wangler; Johannes ;   et al. | 2012-06-21 |
Optical System For Generating A Light Beam For Treating A Substrate App 20120154895 - Muenz; Holger ;   et al. | 2012-06-21 |
Bandwidth Narrowing Module For Setting A Spectral Bandwidth Of A Laser Beam App 20120099612 - Deubel; Markus ;   et al. | 2012-04-26 |
Optical delay module for lengthening the propagation path of a light beam and pulse multiplication or elongation module Grant 8,141,785 - Herkommer , et al. March 27, 2 | 2012-03-27 |
Optical system and method for shaping a profile of a laser beam Grant 7,944,615 - Shklover , et al. May 17, 2 | 2011-05-17 |
Reflective Optical Element For Use In An Euv System App 20110051267 - Kierey; Holger ;   et al. | 2011-03-03 |
Optical System Having An Optical Arrangement App 20110025992 - Holderer; Hubert ;   et al. | 2011-02-03 |
Optical illumination system for creating a line beam Grant 7,864,429 - Muenz , et al. January 4, 2 | 2011-01-04 |
Optical Arrangement, Method Of Use, And Method For Determining A Diffraction Grating App 20100328775 - Kleemann; Bernd | 2010-12-30 |
Method For Measuring A Spectrum Of A Narrowband Light Source, And Spectrometer Arrangement App 20100079765 - Kraus; Johannes ;   et al. | 2010-04-01 |
Continuous Coating Installation, Methods For Producing Crystalline Solar Cells, And Solar Cell App 20100024865 - Shah; Arvind ;   et al. | 2010-02-04 |
Optical devices and related systems and methods Grant 7,629,572 - Shklover , et al. December 8, 2 | 2009-12-08 |
Optical System And Method For Shaping A Profile Of Alaser Beam App 20090244712 - Shklover; Vitaliy ;   et al. | 2009-10-01 |
Optical Illumination System For Creating A Line Beam App 20090231718 - Muenz; Holger ;   et al. | 2009-09-17 |
Illumination Apparatus And Method For Controlling Energy Of A Laser Source App 20090201955 - Weigl; Bernhard ;   et al. | 2009-08-13 |
Optical illumination system for creating a line beam Grant 7,538,948 - Muenz , et al. May 26, 2 | 2009-05-26 |
Optical delay module for lenghtening the propagation path of a light beam and pulse multiplication or elongation module Grant 7,486,707 - Herkommer , et al. February 3, 2 | 2009-02-03 |
Method For Coating An Optical Component For A Laser Arrangement And Related Optical Component App 20090027776 - Schall; Michael ;   et al. | 2009-01-29 |
Optical imaging system for imaging at least two planes of a light beam spaced apart in the beam direction Grant 7,477,438 - Herkommer January 13, 2 | 2009-01-13 |
Illumination System App 20080316748 - Egger; Raphael | 2008-12-25 |
Method and optical arrangement for beam guiding of a light beam with beam delay Grant 7,321,468 - Herkommer , et al. January 22, 2 | 2008-01-22 |
Optical grating and method for the manufacture of such an optical grating Grant 7,187,499 - Kleemann , et al. March 6, 2 | 2007-03-06 |
Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed grating Grant 7,175,773 - Heidemann , et al. February 13, 2 | 2007-02-13 |
Optical grating and method for the manufacture of such an optical grating App 20060227425 - Kleemann; Bernd ;   et al. | 2006-10-12 |
Optical arrangement, optical grating and method for the manufacture of such an optical grating Grant 7,092,161 - Kleemann , et al. August 15, 2 | 2006-08-15 |
Optical arrangement, optical grating and method for the manufacture of such an optical grating App 20050030627 - Kleemann, Bernd ;   et al. | 2005-02-10 |
Optical arrangement, Littrow grating for use in an optical arrangement and also use of a Littrow grating Grant 6,762,881 - Kleemann , et al. July 13, 2 | 2004-07-13 |
Apparatus for compressing the bandwidth of a light beam App 20040091012 - Herkommer, Alois | 2004-05-13 |