Patent | Date |
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Organotin Oxide Hydroxide Patterning Compositions, Precursors, And Patterning App 20220299878 - Meyers; Stephen T. ;   et al. | 2022-09-22 |
Organometallic Solution Based High Resolution Patterning Compositions And Corresponding Methods App 20220291582 - Meyers; Stephen T. ;   et al. | 2022-09-15 |
Organometallic solution based high resolution patterning compositions and corresponding methods Grant 11,392,029 - Meyers , et al. July 19, 2 | 2022-07-19 |
Tin dodecamers and radiation patternable coatings with strong EUV absorption Grant 11,392,028 - Cardineau , et al. July 19, 2 | 2022-07-19 |
Stable Solutions Of Monoalkyl Tin Alkoxides And Their Hydrolysis And Condensation Products App 20220187705 - Jiang; Kai ;   et al. | 2022-06-16 |
Stable solutions of monoalkyl tin alkoxides and their hydrolysis and condensation products Grant 11,300,876 - Jiang , et al. April 12, 2 | 2022-04-12 |
Methods To Produce Organotin Compositions With Convenient Ligand Providing Reactants App 20220064192 - Edson; Joseph B. ;   et al. | 2022-03-03 |
Apparatuses For Reducing Metal Residue In Edge Bead Region From Metal-containing Resists App 20220028685 - Waller; Mollie ;   et al. | 2022-01-27 |
Apparatuses for reducing metal residue in edge bead region from metal-containing resists Grant 11,187,986 - Waller , et al. November 30, 2 | 2021-11-30 |
Organotin Clusters, Solutions Of Organotin Clusters, And Application To High Resolution Patterning App 20210347791 - Cardineau; Brian J. ;   et al. | 2021-11-11 |
Organotin clusters, solutions of organotin clusters, and application to high resolution patterning Grant 11,098,070 - Cardineau , et al. August 24, 2 | 2021-08-24 |
Organometallic Solution Based High Resolution Patterning Compositions And Corresponding Methods App 20210048745 - Meyers; Stephen T. ;   et al. | 2021-02-18 |
Organometallic Metal Chalcogenide Clusters And Application To Lithography App 20210026241 - Cardineau; Brian J. ;   et al. | 2021-01-28 |
Stabilized Interfaces Of Inorganic Radiation Patterning Compositions On Substrates App 20210011383 - Cardineau; Brian J. ;   et al. | 2021-01-14 |
Organotin Oxide Hydroxide Patterning Compositions, Precursors, And Patterning App 20200371439 - Meyers; Stephen T. ;   et al. | 2020-11-26 |
Organometallic Photoresist Developer Compositions And Processing Methods App 20200326627 - Jiang; Kai ;   et al. | 2020-10-15 |
Organotin oxide hydroxide patterning compositions, precursors, and patterning Grant 10,775,696 - Meyers , et al. September 15, 2 | 2020-09-15 |
Organotin Oxide Hydroxide Patterning Compositions, Precursors, And Patterning App 20200257196 - A1 | 2020-08-13 |
Organotin oxide hydroxide patterning compositions, precursors, and patterning Grant 10,732,505 - Meyers , et al. | 2020-08-04 |
Apparatuses For Reducing Metal Residue In Edge Bead Region From Metal-containing Resists App 20200209756 - Waller; Mollie ;   et al. | 2020-07-02 |
Organometallic solution based high resolution patterning compositions and corresponding methods Grant 10,642,153 - Meyers , et al. | 2020-05-05 |
Methods of reducing metal residue in edge bead region from metal-containing resists Grant 10,627,719 - Waller , et al. | 2020-04-21 |
Organometallic Solution Based High Resolution Patterning Compositions And Corresponding Methods App 20200064733 - Meyers; Stephen T. ;   et al. | 2020-02-27 |
Stable Solutions Of Monoalkyl Tin Alkoxides And Their Hydrolysis And Condensation Products App 20190391486 - Jiang; Kai ;   et al. | 2019-12-26 |
Tin Dodecamers And Radiation Patternable Coatings With Strong Euv Absorption App 20190308998 - Cardineau; Brian J. ;   et al. | 2019-10-10 |
Organotin Clusters, Solutions Of Organotin Clusters, And Application To High Resolution Patterning App 20190153001 - Cardineau; Brian J. ;   et al. | 2019-05-23 |
Organotin Oxide Hydroxide Patterning Compositions, Precursors, And Patterning App 20190137870 - Meyers; Stephen T. ;   et al. | 2019-05-09 |
Organotin oxide hydroxide patterning compositions, precursors, and patterning Grant 10,228,618 - Meyers , et al. | 2019-03-12 |
Methods Of Reducing Metal Residue In Edge Bead Region From Metal-containing Resists App 20180046086 - Waller; Mollie ;   et al. | 2018-02-15 |
Organotin Oxide Hydroxide Patterning Compositions, Precursors, And Patterning App 20170102612 - Meyers; Stephen T. ;   et al. | 2017-04-13 |
Organometallic Solution Based High Resolution Patterning Compositions And Corresponding Methods App 20160116839 - Meyers; Stephen T. ;   et al. | 2016-04-28 |