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Patent applications and USPTO patent grants for Campbell; Timothy Scott.The latest application filed is for "methods of downstream microwave photoresist removal and via clean, particularly following stop-on tin etching".
Patent | Date |
---|---|
Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching Grant 7,157,375 - Campbell , et al. January 2, 2 | 2007-01-02 |
Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching App 20060043062 - Campbell; Timothy Scott ;   et al. | 2006-03-02 |
Semiconductor device contamination reduction in a fluorinated oxide deposition process App 20050191863 - Olmer, Leonard Jay ;   et al. | 2005-09-01 |
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